一种UPS级盐酸制备中的多级氯气干燥设备
By using a multi-stage chlorine drying equipment and a combination of dehydrating agents and absorbent materials, the problem of incomplete chlorine drying in existing technologies has been solved, enabling the high-purity production of UPS-grade hydrochloric acid, which is suitable for semiconductor manufacturing and liquid crystal display industries.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HUARONG CHEM (CHENGDU) CO LTD
- Filing Date
- 2025-07-15
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technology cannot meet the requirements of UPS-grade hydrochloric acid for drying raw chlorine gas, and cannot effectively remove moisture, resulting in excessive levels of metal impurities.
A multi-stage chlorine drying system is used, including a bath, a water absorption tank, and an evaporation tank. Drying is carried out using dehydrating agents and water-absorbing materials. Multi-stage dehydration is achieved through a circulating pump and a heater, and further drying is achieved in conjunction with water-absorbing materials to ensure the purity of chlorine.
It achieves multi-stage dehydration of chlorine, meets the chlorine production requirements of UPS, improves the purity of chlorine and reduces the content of metal impurities, and is suitable for micron-level integrated circuit and TFT-LCD manufacturing processes.
Smart Images
Figure CN224506689U_ABST
Abstract
Claims
1. A multi-stage chlorine gas drying apparatus in the production of UPS grade hydrochloric acid, characterized by, include: The bathtub contains a dehydrating agent, has an air inlet pipe at the bottom, and an exhaust pipe at the top. A water-absorbing tank, one end of which is connected to the exhaust pipe, and the other end of which is provided with an exhaust port, and the water-absorbing tank contains water-absorbing material; An evaporator has a discharge pipe at its inlet end, an inlet pipe at its outlet end, and a steam pipe at its top. A heater is located inside the evaporator. The discharge pipe has one end located inside the bath and submerged in the dehydrating agent, while the input pipe has one end located on the bath. Both the discharge pipe and the input pipe are equipped with circulation pumps.
2. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid according to claim 1, characterized in that, A condenser is installed on the steam pipe.
3. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid according to claim 1, characterized in that, The dehydrating agent is concentrated sulfuric acid, and the water-absorbing material is phosphorus pentoxide.
4. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid according to claim 1, characterized in that, The bottom of the bathtub is equipped with a coil, which has multiple exhaust holes and is connected to the air inlet pipe.
5. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid according to claim 1, characterized in that, The evaporator is equipped with a temperature sensor.
6. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid, according to claim 1, characterized in that, The water absorption tank includes: The bottom of the housing is connected to the exhaust pipe; A cover is detachably mounted on the top of the box, and the cover is provided with the exhaust port; A mesh bag is detachably attached to the cover, the mesh bag contains the absorbent material, and the mesh bag can be placed inside the box.
7. The multi-stage chlorine gas drying device in the preparation of UPS grade hydrochloric acid, according to claim 1, characterized in that, The bath is equipped with a level gauge, and the volume of the dehydrating agent occupies 60%-80% of the bath volume.
8. The multi-stage chlorine drying equipment for the preparation of UPS-grade hydrochloric acid according to claim 1, characterized in that: Two bathtubs are arranged side by side; The air inlet pipes of the two bathtubs are connected to a main air inlet pipe, and an air inlet three-way valve is provided at the connection point; The exhaust pipes of the two bathtubs are connected to a main exhaust pipe, and an exhaust three-way valve is provided at the connection point; The exhaust main pipe is connected to the water suction box.
9. The multi-stage chlorine drying equipment for UPS-grade hydrochloric acid preparation according to claim 8, characterized in that: Each of the two bathtubs is equipped with a drain pipe, and the two drain pipes are connected to the main drain pipe, with a drain three-way valve at the connection point; Each of the two bathtubs is equipped with one of the aforementioned input pipes, which are connected to the main input pipe, and an input three-way valve is provided at the connection point.
10. The multi-stage chlorine gas drying apparatus in the preparation of UPS grade hydrochloric acid according to any one of claims 1-9, characterized in that, A temporary storage tank is provided on the input pipe, and a circulation pump is provided between the temporary storage tank and the bath, and a circulation pump is also provided between the temporary storage tank and the evaporator.