A Chlorine-Resistant Etching Waste Gas Treatment Device
By introducing cross plates and spray pipes into the waste gas treatment device to form a "maze" channel structure, combined with activated carbon adsorption and moisture absorption treatment, the problem of short waste gas flow path is solved, and efficient purification of chlorine etching waste gas is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHEMAX(NANTONG) ELECTRONIC MATERIALS LTD
- Filing Date
- 2025-08-25
- Publication Date
- 2026-07-17
AI Technical Summary
Existing chlorine-resistant etching waste gas treatment devices have short waste gas flow paths and limited contact time between waste gas and treatment liquid, resulting in insufficient reaction. This makes it difficult to guarantee the purification effect, especially for etching waste gas with high chlorine content.
A "maze" channel structure including cross plates and spray pipes is designed to extend the residence time of exhaust gas in the treatment box. The treatment liquid is evenly sprayed onto the exhaust gas path through the spray pipes and nozzles, and pretreatment and further purification are carried out in combination with activated carbon adsorption blocks and moisture-absorbing blocks.
It significantly improves the contact efficiency between waste gas and treatment liquid, enhances the reaction effect on harmful components such as chlorine, and reduces maintenance difficulty and cost.
Smart Images

Figure CN224506733U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of waste gas treatment equipment, specifically a chlorine-resistant etching waste gas treatment device. Background Technology
[0002] Chlorine-containing waste gas mainly originates from industrial production processes such as chemical, metallurgical, and electronic etching. Its components include toxic and harmful gases such as chlorine and hydrogen chloride, which are highly irritating and corrosive. If it is discharged directly without effective treatment, it will not only cause serious pollution to the atmospheric environment, damage the ozone layer, and exacerbate environmental problems such as acid rain, but also cause great harm to the human respiratory system and skin, and even lead to poisoning accidents. Therefore, the purification and treatment of chlorine-containing waste gas is an indispensable and key link in industrial production.
[0003] Existing Chinese patent document CN213790825U discloses an etching machine exhaust gas treatment device, including a treatment cabinet, a first exhaust pipe, a water treatment sleeve, an exhaust fan, and an axial flow fan. The first exhaust pipe is mounted on the top of the treatment cabinet via reinforcing ribs. An exhaust port is provided at one end of the treatment cabinet, and an exhaust fan is bolted into the exhaust port. A second exhaust pipe is connected to the other end of the treatment cabinet. A water treatment sleeve is fitted onto the exhaust end of the exhaust port. A water distribution pipe is fixedly installed on the inner wall of the water treatment sleeve, and a nozzle is installed at the outlet end of the water distribution pipe. An air outlet sleeve is provided at the top of the water treatment sleeve, and an air outlet is provided at one end of the water treatment sleeve. The air inlet of the exhaust sleeve is connected to the air outlet of the water treatment sleeve via an L-shaped air pipe, and the air inlet of the first exhaust pipe is connected to the air outlet of the exhaust sleeve. This allows harmful chemicals such as chlorine in the gas to be effectively dissolved in the water, and the gas is filtered by the water. The filtered water is then discharged into the wastewater tank, thus treating the waste gas generated by the etching machine. However, this chlorine-resistant etching waste gas treatment device still has shortcomings: its waste gas flow path is relatively short, and the contact time between the waste gas and the treatment liquid is limited, which can easily lead to insufficient reaction. As a result, some harmful components are discharged before being completely removed, especially for etching waste gas with high chlorine content, where the purification effect is difficult to guarantee. Utility Model Content
[0004] The purpose of this invention is to provide a chlorine-resistant etching waste gas treatment device to address the problem that the waste gas flow path in the above-mentioned chlorine-resistant etching waste gas treatment device is relatively short, the contact time between the waste gas and the treatment liquid is limited, and the reaction is prone to incomplete, resulting in the discharge of some harmful components without complete removal. This is especially true for etching waste gas with high chlorine content, where the purification effect is difficult to guarantee.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a chlorine-resistant etching waste gas treatment device, comprising: a waste gas treatment box, an inlet pipe connected through to the bottom of one side of the waste gas treatment box, an exhaust pipe connected through to the top of the waste gas treatment box, a sealed box door hinged to one end of the waste gas treatment box, a cross plate fixedly connected to one side inside the waste gas treatment box, a guide plate fixedly connected to the top surface of the cross plate, a spray pipe installed on the end face of the cross plate, a liquid storage box installed at one end of the top of the waste gas treatment box, a jet pump installed on one side of the liquid storage box, a liquid guide pipe connected through to one end of the jet pump, the spray pipes being connected through a connecting pipe, a liquid receiving box connected to a slide rail at the bottom inside the waste gas treatment box, and several sets of spray nozzles provided on the sides of each spray pipe.
[0006] As a further improvement of this utility model: the number of cross plates is arranged in several groups, which are staggered on both sides inside the exhaust gas treatment box, and the ends of the cross plates in several groups are all arranged upwards, so as to guide the exhaust gas entering from the intake pipe and increase its path.
[0007] As a further improvement of this utility model: a triangular cross-section guide plate is fixedly connected between the top of several sets of cross plates and the inner wall of the exhaust gas treatment box, so that the liquid sprayed on the top surface of the guide plate will automatically flow down for easy collection.
[0008] As a further embodiment of this utility model: a spray pipe structure is installed on the end face of several sets of cross plates, and several sets of spray nozzle structures are installed on one side of several sets of spray pipes. The spray pump is connected to the first set of spray pipes through a liquid guide pipe, and several sets of spray pipes are connected to each other through a connecting pipe. A liquid inlet plug is provided at one end of the liquid storage box.
[0009] As a further embodiment of this utility model: a moisture-absorbing plug is inserted inside the exhaust pipe, an installation ring is bonded to the bottom surface of the moisture-absorbing plug, and several sets of installation buckles are symmetrically fixed to the top surface of the installation ring. The exhaust gas treatment box at the corresponding location of the exhaust pipe has symmetrically opened installation grooves that match the number and specifications of the installation buckles, and an installation handle is fixed to the bottom surface of the installation ring.
[0010] As a further improvement of this utility model: an activated carbon adsorption block is inserted inside the air intake pipe. The activated carbon adsorption block is movably inserted into the air intake pipe through a structure of the same number and specifications of mounting rings, mounting buckles, mounting grooves and mounting handles as the moisture-absorbing block, so as to facilitate quick and convenient disassembly and replacement.
[0011] As a further embodiment of this utility model: a drain pipe is provided on one side of the liquid receiving box, and the drain pipe is simultaneously passed through the corresponding exhaust gas treatment box. A fitting block is fixed to the outer side of one end of the drain pipe. A fitting groove structure adapted to the specifications of the fitting block is opened on one side inside the liquid receiving box so as to quickly remove the drain pipe and pull out the liquid receiving box. An exhaust fan is installed at the top of the exhaust pipe.
[0012] Compared with the prior art, the beneficial effects of this utility model are: In this utility model, several sets of cross plates with staggered sides and upward-facing ends form a "maze"-like channel, which greatly extends the residence time of exhaust gas in the treatment box. At the same time, the spray pipe at the end of each set of cross plates works in conjunction with multiple sets of spray nozzles to evenly spray the treatment liquid in the storage box onto the exhaust gas path, so that the treatment liquid and exhaust gas can fully contact and react, and remove harmful components such as chlorine in a targeted manner. In this invention, both the activated carbon adsorption block and the moisture-absorbing block can be quickly disassembled and assembled using an installation ring, an installation buckle, and an installation groove. Workers can easily replace them using the installation handle, and the sealed door facilitates the inspection and maintenance of internal components. This design significantly reduces maintenance difficulty and time costs. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the overall structure of the chlorine-resistant etching waste gas treatment device described in this utility model; Figure 2 This is a schematic diagram of the cross plate in the chlorine-resistant etching waste gas treatment device of this utility model; Figure 3 This is a schematic diagram of the liquid storage box in the chlorine-resistant etching waste gas treatment device of this utility model; Figure 4 This is a schematic diagram of the connecting pipe in the chlorine-resistant etching waste gas treatment device of this utility model; Figure 5 This is a structural schematic diagram of point A in the chlorine-resistant etching waste gas treatment device described in this utility model; Figure 6 This is a schematic diagram of the liquid receiving box in the chlorine-resistant etching waste gas treatment device described in this utility model.
[0014] In the diagram: 1. Exhaust gas treatment box; 2. Inlet pipe; 3. Exhaust pipe; 4. Cross plate; 5. Guide plate; 6. Spray pipe; 7. Liquid storage box; 8. Jet pump; 9. Liquid guide pipe; 10. Connecting pipe; 11. Liquid receiving box; 12. Drain pipe; 13. Fitting block; 14. Fitting groove; 15. Moisture-absorbing plug; 16. Mounting ring; 17. Mounting buckle; 18. Mounting groove; 19. Mounting handle; 20. Spray nozzle; 21. Activated carbon adsorption plug; 22. Exhaust fan; 23. Liquid inlet plug; 24. Sealed box door. Detailed Implementation
[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0016] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this utility model, it should be noted that unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. The embodiments of this utility model will be described below based on its overall structure.
[0017] Reference Figures 1 to 6 In this embodiment of the utility model, a chlorine-resistant etching waste gas treatment device includes: a waste gas treatment box 1, an air inlet pipe 2 connected through the bottom end of one side of the waste gas treatment box 1, an exhaust pipe 3 connected through the top end of the waste gas treatment box 1, a sealed box door 24 hinged to one end of the waste gas treatment box 1, a cross plate 4 fixedly connected to one side inside the waste gas treatment box 1, a guide plate 5 fixedly connected to the top surface of the cross plate 4, a spray pipe 6 installed at the end of the cross plate 4, a liquid storage box 7 installed at one end of the top of the waste gas treatment box 1, a jet pump 8 installed on one side of the liquid storage box 7, a liquid guide pipe 9 connected through one end of the jet pump 8, and the spray pipes 6 connected through a connecting pipe 10. A liquid receiving box 11 is connected to the slide rail at the bottom inside the waste gas treatment box 1, and several sets of spray nozzles 20 are provided on the sides of the spray pipes 6.
[0018] The above scheme is adopted: the exhaust gas treatment box 1 is the core treatment space of the whole device, providing a closed environment for exhaust gas treatment. The inlet pipe 2 is used to introduce the exhaust gas generated by chlorine etching into the treatment box, and the exhaust pipe 3 is responsible for discharging the treated clean gas. The sealed box door 24 adopts a hinged design, which not only ensures the sealing of the treatment box, but also makes it easy for staff to open it to inspect or maintain the internal components.
[0019] Reference Figure 2 There are several sets of cross plates 4, which are staggered on both sides inside the exhaust gas treatment box 1, and the ends of the cross plates 4 are all facing upwards to guide the exhaust gas entering from the intake pipe 2 and increase its path.
[0020] The above scheme employs a layout where several sets of cross plates 4 are staggered on both sides and have their ends facing upwards, forming a maze-like channel structure. When the exhaust gas enters the exhaust gas treatment box 1 from the inlet pipe 2, it is guided layer by layer by the cross plates 4, which forces it to change its flow direction, significantly extending the residence time and flow path of the exhaust gas in the box. This design allows the exhaust gas to fully contact the subsequently sprayed treatment liquid, avoiding short-flow of exhaust gas, i.e., being discharged without being fully treated, thus improving the thoroughness of exhaust gas treatment. In particular, it can enhance the reaction efficiency for etching exhaust gas with high chlorine content.
[0021] Reference Figure 2 Several sets of cross plates 4 are fixed between the top of the cross plates and the inner wall of the exhaust gas treatment box 1, and the guide plates 5 with triangular cross sections are fixed to them so that the liquid sprayed on the top surface of the guide plates 5 can automatically flow down for unified collection.
[0022] The above solution involves a triangular cross-section guide plate 5 installed at an angle between the top of the cross plate 4 and the inner wall of the treatment tank. Its smooth surface and angle of inclination guide the treatment liquid splashed onto the surface during spraying to flow down quickly. On the one hand, this avoids waste caused by treatment liquid residue on the guide plate 5. On the other hand, it guides the liquid to flow to the cross plate 4 or the liquid receiving box 11, ensuring that the waste liquid can be collected uniformly and preventing the liquid from accumulating randomly in the tank and corroding the equipment. It also ensures the wettability of the surface of the cross plate 4, which helps to continuously react with the exhaust gas.
[0023] Reference Figure 2 and Figure 3 Each of the several sets of cross plates 4 has a spray pipe 6 structure installed on its end face. Each of the several sets of spray pipes 6 has a spray nozzle 20 structure installed on one side. The spray pump 8 is connected to the first set of spray pipes 6 through the liquid guide pipe 9. The several sets of spray pipes 6 are connected to each other through the connecting pipe 10. One end of the liquid storage box 7 is provided with a liquid inlet plug 23.
[0024] The above scheme is adopted: the spray pipes 6 and spray nozzles 20 at the end of each cross plate 4 form a targeted spraying unit. The spray nozzles 20 are distributed in multiple groups, which can spray the treatment liquid evenly into the exhaust gas flow path in the form of mist or column, ensuring that it is fully mixed with the staggered flow of exhaust gas. The spray pump 8 delivers the treatment liquid in the storage box 7 to the first group of spray pipes 6 through the liquid guide pipe 9, and then distributes it to other groups through the connecting pipe 10, so as to realize the synchronous spraying of multiple groups and improve the reaction efficiency. The liquid inlet plug 23 of the storage box 7 makes it convenient for the staff to replenish the treatment liquid at any time, and can prevent the liquid in the box from evaporating or being contaminated by the outside.
[0025] Reference Figures 4 to 6 A moisture-absorbing plug 15 is inserted inside the exhaust pipe 3. A mounting ring 16 is bonded to the bottom surface of the moisture-absorbing plug 15. Several sets of mounting buckles 17 are symmetrically fixed to the top surface of the mounting ring 16. The top wall of the exhaust gas treatment box 1 at the corresponding location of the exhaust pipe 3 is symmetrically provided with mounting grooves 18 that match the number and specifications of the mounting buckles 17. A mounting handle 19 is fixed to the bottom surface of the mounting ring 16.
[0026] The above solution is adopted: the moisture-absorbing block 15 is made of water-absorbing material and is used to absorb the residual moisture in the treated gas, so as to prevent the humid gas from condensing in the pipeline or affecting the downstream equipment after it is discharged. The mounting buckle 17 on the mounting ring 16 is connected to the mounting groove 18 on the top wall of the exhaust gas treatment box 1 by a snap-fit connection. With the help of the mounting handle 19, the moisture-absorbing block 15 can be quickly disassembled and replaced. The operation is convenient, no complicated tools are required, and regular maintenance is convenient to ensure the moisture absorption effect.
[0027] Reference Figures 4 to 6 An activated carbon adsorption block 21 is inserted inside the air intake pipe 2. The activated carbon adsorption block 21 is movably inserted into the air intake pipe 2 through a structure with the same number and specifications of mounting rings 16, mounting buckles 17, mounting grooves 18 and mounting handles 19 as the moisture-absorbing block 15, so as to facilitate quick and convenient disassembly and replacement.
[0028] The above solution utilizes the strong adsorption properties of activated carbon to pre-treat the waste gas entering the treatment chamber. It can adsorb particulate impurities or some organic pollutants mixed in the waste gas, reducing the burden on subsequent treatment processes. It adopts the same installation structure as the moisture-absorbing block 15. Quick disassembly and assembly are achieved through the cooperation of the installation ring 16, installation buckle 17 and installation groove 18. The staff can easily replace the saturated block through the installation handle 19, ensuring the pre-treatment effect while reducing maintenance costs and time.
[0029] Reference Figure 3 and Figure 6A drain pipe 12 is provided on one side of the liquid receiving box 11. The drain pipe 12 passes through the corresponding exhaust gas treatment box 1. A fitting block 13 is fixed to the outside of one end of the drain pipe 12. A fitting groove 14 structure that matches the size of the fitting block 13 is provided on one side of the inside of the liquid receiving box 11 so as to quickly remove the drain pipe 12 and pull out the liquid receiving box 11. An exhaust fan 22 is installed at the top of the exhaust pipe 3.
[0030] Using the above scheme: the reaction waste liquid collected by the receiving box 11 can be discharged through the drain pipe 12, which is convenient for centralized treatment or recycling. The drain pipe 12 and the receiving box 11 are connected by the fitting block 13 and the fitting groove 14 to achieve quick disassembly and assembly. After the drain pipe 12 is removed, the receiving box 11 can be pulled out from the treatment box along the slide rail, which is convenient for thoroughly cleaning the residual waste liquid in the box or for replacement. The exhaust fan 22 at the top of the exhaust pipe 3 can provide power to accelerate the flow of exhaust gas in the treatment box, ensuring that the exhaust gas can pass smoothly through each treatment stage after entering from the inlet pipe 2 and be discharged from the exhaust pipe 3, thereby improving the overall treatment efficiency.
[0031] The working principle of this utility model is as follows: First, the waste gas generated by chlorine-resistant etching enters the device through the air inlet pipe 2. The activated carbon adsorption block 21 in the air inlet pipe 2 pre-treats the waste gas. The strong adsorption of activated carbon adsorbs particulate impurities and some organic pollutants in the waste gas, reducing the pressure of subsequent treatment. The activated carbon adsorption block 21 is fixed by the cooperation of the mounting ring 16, the mounting buckle 17 and the mounting groove 18, which makes it easy to disassemble and replace periodically through the mounting handle 19 to ensure the pre-treatment effect. Next, in the exhaust gas guiding and reaction stage, the pretreated exhaust gas enters the exhaust gas treatment box 1. Guided by several sets of cross plates 4 with staggered sides and upward-facing ends, it forms a "maze" flow path, which greatly extends the residence time of the exhaust gas in the box. At the same time, the treatment liquid in the liquid storage box 7, such as alkaline solution, is transported to the first set of spray pipes 6 through the liquid guide pipe 9 under the action of the jet pump 8. Then, it is distributed to all spray pipes 6 through the connecting pipe 10. Finally, it is evenly sprayed onto the exhaust gas flow path by each set of spray nozzles 20. The sprayed treatment liquid comes into full contact with the exhaust gas and undergoes a chemical reaction to remove harmful components such as chlorine. The triangular guide plate 5 at the top of the cross plate 4 guides the splashed treatment liquid down to avoid waste and prevent liquid accumulation from corroding the equipment. At the same time, it keeps the surface of the cross plate 4 moist to enhance the reaction effect. Then, in the waste liquid collection stage, the waste liquid after the reaction flows into the liquid receiving box 11 at the bottom of the waste gas treatment box 1 under the action of gravity. The liquid receiving box 11 is connected by a slide rail for easy pulling. When the waste liquid needs to be treated, the drain pipe 12 connected to the liquid receiving box 11 through the interlocking block 13 and the interlocking groove 14 can be removed to discharge the waste liquid for centralized treatment or recycling. Alternatively, the liquid receiving box 11 can be directly pulled out to clean the residual waste liquid. Finally, in the gas purification and discharge stage, the treated gas flows upward to the exhaust pipe 3. The moisture-absorbing block 15 inside the exhaust pipe 3 absorbs the residual moisture in the gas, preventing the humid gas from affecting subsequent equipment. The moisture-absorbing block 15 is also fixed by the mounting ring 16, mounting buckle 17 and mounting groove 18, and can be easily replaced by the mounting handle 19. At the same time, the exhaust fan 22 at the top of the exhaust pipe 3 provides power to accelerate the flow of waste gas in the treatment box, ensuring that the treated clean gas is discharged smoothly. Throughout the process, the sealed box door 24 ensures the sealing of the treatment box and facilitates equipment inspection and maintenance. The coordinated operation of all structures achieves efficient and thorough treatment of chlorine etching waste gas.
[0032] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A chlorine etch exhaust gas treatment apparatus comprising: The exhaust gas treatment box (1) is characterized in that an air inlet pipe (2) is connected to the bottom of one side of the exhaust gas treatment box (1), an exhaust pipe (3) is connected to the top of the exhaust gas treatment box (1), a sealed box door (24) is hinged to one end of the exhaust gas treatment box (1), a cross plate (4) is fixed to one side inside the exhaust gas treatment box (1), a guide plate (5) is fixed to the top surface of the cross plate (4), a spray pipe (6) is installed on the end face of the cross plate (4), a liquid storage box (7) is installed at one end of the top of the exhaust gas treatment box (1), a jet pump (8) is installed on one side of the liquid storage box (7), a liquid guide pipe (9) is connected to one end of the jet pump (8), the spray pipes (6) are connected to each other through a connecting pipe (10), a liquid receiving box (11) is connected to the bottom slide rail inside the exhaust gas treatment box (1), and several sets of spray nozzles (20) are provided on the side of each spray pipe (6).
2. The chlorine resistant etching exhaust treatment device of claim 1, wherein, The number of cross plates (4) is set in several groups, which are staggered on both sides inside the exhaust gas treatment box (1), and the ends of the cross plates (4) are all set upwards to guide the exhaust gas entering from the intake pipe (2) and increase its path.
3. The chlorine resistant etching exhaust treatment device of claim 2, wherein, Several sets of cross plates (4) are fixed with triangular cross-section guide plates (5) between the top of the cross plates (4) and the inner wall of the exhaust gas treatment box (1) so that the liquid sprayed on the top surface of the guide plates (5) can automatically flow down for unified collection.
4. The chlorine resistant etching exhaust treatment device of claim 3, wherein, Each of the several sets of cross plates (4) is equipped with a spray pipe (6) structure at its end face. Each of the several sets of spray pipes (6) is equipped with a spray nozzle (20) structure on one side. The spray pump (8) is connected to the first set of spray pipes (6) through a liquid guide pipe (9). The several sets of spray pipes (6) are connected to each other through a connecting pipe (10). One end of the liquid storage box (7) is provided with a liquid inlet plug (23).
5. The chlorine resistant etching exhaust treatment device of claim 1, wherein, The exhaust pipe (3) is fitted with a moisture-absorbing block (15), and the bottom surface of the moisture-absorbing block (15) is bonded with an installation ring (16). The top surface of the installation ring (16) is symmetrically fixed with several sets of installation buckles (17). The top wall of the exhaust gas treatment box (1) at the corresponding position of the exhaust pipe (3) is symmetrically provided with installation slots (18) that match the number and specifications of the installation buckles (17). The bottom surface of the installation ring (16) is fixed with an installation handle (19).
6. The chlorine resistant etching exhaust treatment device of claim 5, wherein, The air intake pipe (2) is equipped with an activated carbon adsorption block (21). The activated carbon adsorption block (21) is movably inserted into the air intake pipe (2) by means of the same number and specifications of the moisture-absorbing block (15) mounting rings (16), mounting buckles (17), mounting grooves (18) and mounting handles (19) so as to facilitate quick and convenient disassembly and replacement.
7. The chlorine resistant etching exhaust treatment device of claim 1, wherein, A drain pipe (12) is provided on one side of the liquid receiving box (11). The drain pipe (12) passes through the corresponding exhaust gas treatment box (1) at the same time. A fitting block (13) is fixed to the outside of one end of the drain pipe (12). A fitting groove (14) structure that matches the size of the fitting block (13) is opened on one side of the inside of the liquid receiving box (11) so as to quickly remove the drain pipe (12) and pull out the liquid receiving box (11). A fan (22) is installed at the top of the exhaust pipe (3).