一种光刻胶涂布机的恒压刮刀调节机构
By introducing a limiting blade and adjustment components into the photoresist coating machine, the problems of excess photoresist at the blade edge and uneven photoresist thickness were solved, achieving uniformity and stability in photoresist coating and ensuring the smooth progress of subsequent processes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIXU (HUBEI) ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2025-08-05
- Publication Date
- 2026-07-17
AI Technical Summary
The constant pressure squeegee adjustment mechanism of existing photoresist coating machines has problems such as squeegee overflow at the edge and uneven coating thickness, which affects the performance of photoresist and the smooth progress of subsequent processes.
A constant pressure squeegee adjustment mechanism was designed, which includes a limiting blade and an adjustment component. The limiting blade limits the edge of the photoresist, and the adjustment component adjusts the relative position of the limiting blade and the squeegee to ensure coating uniformity and stability.
It effectively solves the problems of excess photoresist at the edge of the squeegee and uneven photoresist thickness, improves the uniformity and stability of photoresist coating, and provides a guarantee for subsequent processes.
Smart Images
Figure CN224507495U_ABST
Abstract
Claims
1. A constant pressure blade adjustment mechanism for a photoresist coater, characterized by, include: Coating table (1); A sliding frame (2) is slidably mounted on the coating table (1); The slide (4) is slidably installed between the two sides of the inner wall of the sliding frame (2), and the top of the sliding frame (2) is fixedly installed with a cylinder (5) for driving the slide (4) to rise and fall. Mounting bracket (6), which is fixedly mounted on the bottom of the slide plate (4), has a scraper (61) detachably mounted on the bottom of the mounting bracket (6), and has two mounting plates (7) slidably mounted on the mounting bracket (6). The bottom of each of the two mounting plates (7) has two limiting blades (8) symmetrically mounted on it. The side of the limiting blade (8) is in close contact with one side of the scraper (61), and the bottom of the limiting blade (8) is on the same horizontal plane as the bottom of the scraper (61). The mounting bracket (6) is equipped with an adjustment component (9) for driving the two limiting blades (8).
2. The constant pressure blade adjustment mechanism of a photoresist coater according to claim 1, wherein The bottom of the coating table (1) is equipped with a moving component (3) for driving the sliding frame (2) to move left and right. The moving component (3) includes a drive motor (31) fixedly installed on the bottom of the inner wall of the sliding frame (2). A gear (32) is fixedly installed at the output end of the drive motor (31). A straight tooth plate (33) is fixedly installed at the bottom of the coating table (1). The gear (32) and the straight tooth plate (33) mesh with each other.
3. The constant pressure blade adjustment mechanism of a photoresist coater according to claim 1, wherein Both sides of the inner wall of the sliding frame (2) are fixedly installed with sliders (10), and both sides of the coating table (1) are constructed with sliding grooves. The two sliders (10) are respectively slidably installed in the two sliding grooves.
4. The constant pressure blade adjustment mechanism of claim 1, wherein The mounting bracket (6) has a fixed plate (11) fixedly installed at the bottom. The bottom of the fixed plate (11) has a mounting groove, and an electromagnet (12) is fixedly installed inside it. The top of the scraper (61) is engaged with the mounting groove, and the top of the scraper (61) is magnetically connected to the electromagnet (12).
5. The constant pressure doctor blade adjustment mechanism of a photoresist coating machine according to claim 1, characterized in that, The mounting bracket (6) has two through slots (13), and the two mounting plates (7) are slidably installed in the two through slots (13).
6. The constant pressure blade adjustment mechanism of a photoresist coater according to claim 1, wherein Positioning plates (14) are fixedly installed on both sides of the slide plate (4), and a hot air blower (15) is fixedly installed on the bottom of the positioning plate (14).
7. The constant pressure blade adjustment mechanism of a photoresist coater according to claim 1, wherein The mounting plate (7) and the limiting blade (8) are rotatably connected by a damping shaft.