一种芯片生产用除尘装置

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By incorporating adjustable baffles and air inlets into the dust removal equipment used in chip manufacturing, the problem of unadjustable airflow caused by fixed suction ports has been solved, achieving flexible airflow adjustment and efficient dust removal.

CN224507891UActive Publication Date: 2026-07-17SHENZHEN FENGTIANHUA TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner: SHENZHEN FENGTIANHUA TECHNOLOGY CO LTD
Filing Date: 2025-08-20
Publication Date: 2026-07-17

AI Technical Summary

Technical Problem

The dust inlet size of existing dust removal devices used in chip manufacturing is fixed, making it impossible to adjust the airflow according to actual needs, which leads to inconvenience in operation.

Method used

A dust removal device with an adjustable suction port size was designed. By setting baffles and air inlets on the pipe fittings, and using a rotating shaft and handle to adjust the relative position of the second air inlet and the first air inlet, the airflow can be adjusted.

Benefits of technology

It enables simple and easy-to-operate wind speed adjustment to meet different usage needs, and improves dust removal efficiency and operational flexibility.

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Abstract

本申请提供了一种芯片生产用除尘装置，涉及芯片生产除尘技术领域，包括管件，所述管件连接有外螺纹接头，且管件的端部设置有若干个第一气口，所述管件内设置有挡板，且挡板上开有若干个第二气口，所述挡板上连接有转轴，所述转轴远离挡板的一端穿过管件并延伸至管件的外部且连接有转柄。本申请通过设置的第一气口、挡板以及第二气口，第一气口与第二气口之间形成吸尘口，通过转动挡板能够调整第二气口与第一气口之间的相对位置，进而调整吸尘口的大小，进而能够调整风力，调节过程简单易操作。

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Claims

1. A dust removing apparatus for chip production, characterized by comprising: The device includes a pipe fitting (1), which is connected to an external threaded connector (5). The end of the pipe fitting (1) is provided with several first air ports (2). A baffle (301) is provided inside the pipe fitting (1), and several second air ports (302) are opened on the baffle (301). A rotating shaft (3) is connected to the baffle (301). One end of the rotating shaft (3) away from the baffle (301) passes through the pipe fitting (1) and extends to the outside of the pipe fitting (1) and is connected to a rotating handle (303).

2. The dust removing apparatus for chip production according to claim 1, wherein The fitting (1) includes a first connecting pipe (101), one end of which is connected to an external threaded pipe (103), and the outer surface of the external threaded pipe (103) is threaded to a second connecting pipe (102). Several first air ports (2) are opened on the end of the second connecting pipe (102) away from the first connecting pipe (101), and the baffle (301) is in contact with the inner wall of the second connecting pipe (102).

3. The dust removing apparatus for chip production according to claim 2, wherein The external threaded connector (5) is fixedly connected to the first connecting pipe (101), and the external threaded connector (5) is used to connect to an existing industrial vacuum cleaner through a pipe.

4. The dust removing apparatus for chip production according to claim 3, wherein The outer surface of the rotating shaft (3) passes through the first connecting pipe (101), and a bearing is provided between the outer surface of the rotating shaft (3) and the first connecting pipe (101).

5. The dust removing apparatus for chip production according to claim 2, wherein A fixing member is provided at the end of the first connecting tube (101) away from the second connecting tube (102), and the fixing member is used to fix the position of the handle (303).

6. The dust removing apparatus for chip production according to claim 5, wherein The fixing component includes a turntable (305) fixedly sleeved on the outer surface of the handle (303). A limiting ring (304) is sleeved on the outer surface of the turntable (305). A handle bolt (306) is threadedly connected to the side of the limiting ring (304). One end of the handle bolt (306) extends into the limiting ring (304) and abuts against the side of the turntable (305).

7. The dust removing apparatus for chip production according to claim 2, wherein An auxiliary structure (4) is provided on the side of the first connecting pipe (101).

8. The dust removing apparatus for chip production according to claim 7, wherein The auxiliary structure (4) includes a connector connected to the first connecting pipe (101), the connector being connected to a handle (405), and the handle (405) having a plurality of threaded holes (406).

9. The dust removing apparatus for chip production according to claim 8, wherein The connector includes a first connecting seat (401) fixedly connected to the side of the first connecting tube (101). Two second connecting seats (402) are fixedly connected to the side of the first connecting seat (401) away from the first connecting tube (101). A connecting bolt (403) is inserted between the two second connecting seats (402). A third connecting seat (404) is sleeved on the outer surface of the connecting bolt (403). The third connecting seat (404) is fixedly connected to one end of the handle (405). A nut is provided at the end of the connecting bolt (403).

10. The dust removing apparatus for chip production according to claim 9, wherein The third connecting seat (404) is located between the two second connecting seats (402), and the side of the third connecting seat (404) is in contact with the side of the second connecting seat (402).