等离子处理装置

Abstract

本实用新型公开了一种等离子处理装置，包括：机座；传送模块，包括移动轨和托具，移动轨设置在机座上，托具设置在移动轨上，托具用于放置工件；等离子模块，等离子模块用于对工件进行等离子处理；第一拍摄模块，设置在机座上，第一拍摄模块位于移动轨的输入端的上方，第一拍摄模块用于对工件的表面进行拍摄；预清洁模块，设置在机座上，预清洁模块位于移动轨的输入端的上方，托具依次经过预清洁模块、第一拍摄模块和等离子模块，预清洁模块用于对工件进行清洁；控制模块；本实用新型提出的等离子处理装置能够优先对工件上的明显异物进行清理，并对等离子处理后的工件进行检测，确保等离子处理的效果。

Claims

1. A plasma processing apparatus, characterized by comprising: include: Base; The conveying module includes a moving rail and a support. The moving rail is mounted on the machine base, and the support is mounted on the moving rail. The support moves along the moving rail and is used to place a workpiece. A plasma module is disposed above the moving rail, and the plasma module is used to perform plasma treatment on the workpiece located on the support below; A first imaging module is mounted on the base and located above the input end of the moving rail. The first imaging module is used to photograph the surface of the workpiece to detect the surface of the workpiece. A pre-cleaning module is mounted on the base and located above the input end of the moving rail. The support passes sequentially through the pre-cleaning module, the first imaging module, and the plasma module. The pre-cleaning module is used to clean the workpiece. The control module, the transmission module, the plasma module, the first imaging module, and the pre-cleaning module are all electrically connected to the control module.

2. The plasma processing apparatus of claim 1, wherein, It also includes a second imaging module, which is mounted on the base and located above the output end of the moving rail. The fixture passes sequentially through the pre-cleaning module, the first imaging module, the plasma module, and the second imaging module. The second imaging module is electrically connected to the control module and is used to photograph the surface of the workpiece to detect the surface of the workpiece.

3. The plasma processing apparatus of claim 1, wherein, It also includes a drive module, which is electrically connected to the control module. The drive module includes a fixing member, a first slide rail, and a second slide rail. The second slide rail is fixed on the base. The first slide rail and the second slide rail are perpendicular to each other and are slidably connected. The first slide rail is used to slide on the second slide rail. The fixing member is connected to the plasma module and is slidably connected to the first slide rail. The fixing member is used to slide on the first slide rail.

4. The plasma processing apparatus of claim 3, wherein, The fixing member is provided with a first telescopic bracket. The fixed end of the first telescopic bracket is fixedly connected to the fixing member, and the movable end of the first telescopic bracket is fixedly connected to the plasma module. The first telescopic bracket is used to drive the plasma module to move in the vertical direction.

5. The plasma processing apparatus of claim 4, wherein, The plasma module includes a plasma generator and multiple spray guns. The spray guns are respectively connected to the movable end of the first telescopic bracket and are respectively connected to the plasma generator.

6. The plasma processing apparatus of claim 5, wherein, The support includes multiple support positions, each of which is used to place one of the workpieces, and the distance between adjacent support positions is equal to the distance between adjacent spray guns in the same direction.

7. The plasma processing apparatus of claim 1, wherein, The pre-cleaning module includes an air gun for spraying high-pressure gas onto the workpiece.

8. The plasma processing apparatus of claim 7, wherein, The pre-cleaning module also includes a second telescopic bracket, the fixed end of which is fixedly connected to the base, and the movable end of which is fixedly connected to the air gun. The second telescopic bracket is used to drive the air gun to move in the vertical direction.

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