一种抽尘组件和激光开膜设备

Abstract

本申请提供一种抽尘组件和激光开膜设备，抽尘组件包括定位夹具、激光模组和抽尘模块；定位夹具用于定位待处理硅片；激光模组的激光输出端朝向定位夹具；抽尘模块包含支撑座、吹气部和抽尘部；支撑座设置在定位夹具中靠近激光模组的一侧，吹气部和抽尘部均安装于支撑座，吹气部与抽尘部间隔地设置，吹气部的吹气端朝向抽尘部的抽尘输入端，以便于通过抽尘模块抽出待处理硅片在激光处理过程中所形成的烟尘，避免了待处理硅片在激光处理过程中所形成的烟尘无法抽出的问题，提高了抽尘组件和激光开膜设备的抽尘效果。

Claims

1. A dust extraction assembly comprising: include: Positioning fixtures are used to position the silicon wafers to be processed; A laser module, wherein the laser output end of the laser module faces the positioning fixture; The dust extraction module includes a support base, an air blowing section, and a dust extraction section. The support base is disposed in the positioning fixture on the side close to the laser module. The air blowing section and the dust extraction section are both mounted on the support base. The air blowing section and the dust extraction section are disposed at intervals, and the air blowing end of the air blowing section faces the dust extraction input end of the dust extraction section.

2. The dust extraction assembly of claim 1, wherein, The support base is provided with a through hole, and the air blowing part and the dust extraction part are arranged on both sides of the through hole. One end of the through hole corresponds to the laser module, and the other end of the through hole corresponds to the positioning fixture. The through hole allows the laser output from the laser output end of the laser module to pass through. The dust extraction input end of the dust extraction unit is a rectangular hole, and the length direction of the rectangular hole is consistent with the width direction of the dust extraction unit.

3. The dust extraction assembly of claim 2, wherein, The dust extraction unit is also provided with a dust extraction channel and a dust extraction output end. The dust extraction channel is located between the dust extraction input end and the dust extraction output end, and connects the dust extraction input end and the dust extraction output end. There is a height difference between the dust extraction output end and the dust extraction input end; The dust extraction output terminal is higher than the dust extraction input terminal.

4. The dust extraction assembly of claim 3, wherein, The dust extraction output end is a ring-shaped end; The dust extraction channel comprises a polygonal channel and extends obliquely upward from the dust extraction input end to the dust extraction output end; the dust extraction output end is located in the middle of the dust extraction channel, so that the smoke and dust transported through the dust extraction channel converge at the dust extraction output end.

5. The dust extraction assembly of claim 4, wherein, The dust extraction output end has a connector that can be plugged into a pipe.

6. The dust extraction assembly of claim 1, wherein, The dust extraction module also includes a top plate, a cylinder, and a cover plate; The top plate is connected to the support base and is located above the support base; The cylinder is arranged vertically, with its mounting end installed on the top plate and its output end connected to the cover plate. The cover plate moves vertically under the drive of the cylinder's output end to close or open the dust extraction input end.

7. The dust extraction assembly of claim 1, wherein, The air blowing section is provided with a plurality of air blowing holes, which are arranged along the length direction of the air blowing section and relative to the dust extraction input end. The blowing part is provided with an air inlet channel and an air inlet end. The air inlet channel extends along the length direction of the blowing part. A plurality of air inlets are provided on the side of the air inlet channel and are respectively connected to the air inlet channel. The plurality of air inlets are arranged at intervals along the length direction of the air inlet channel. The air intake end is located on the outside of the support base and is connected to the air intake channel.

8. The dust extraction assembly of claim 1, wherein, The air blowing part is in the shape of a tube and is detachably installed on the support base; The support base is provided with a threaded hole, which exposes the outer wall of the air blowing part. The threaded hole is used for external screw connection, and the end of the screw can contact the outer wall of the air blowing part to limit the air blowing part.

9. The dust extraction assembly of claim 2, wherein, The support base is provided with multiple side plates, which form the through hole, and the through hole is arranged in a square shape.

10. A laser film opening apparatus, characterized by, Includes the dust extraction assembly as described in any one of claims 1 to 9.

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