一种自动清洁的电子枪机构
The automated electron gun cleaning mechanism, which uses a servo motor to drive a lead screw and a moving block in conjunction with a polishing device, solves the problem of low cleaning efficiency of electron guns in coating machines, achieving efficient and stable cleaning results and preventing debris from splashing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGXI ZHAO CHI SEMICON CO LTD
- Filing Date
- 2025-06-23
- Publication Date
- 2026-07-17
AI Technical Summary
In existing technologies, the cleaning efficiency of electron guns in coating machines is low, and manual cleaning consumes a lot of time and effort, affecting the normal operation of the equipment.
Design an automatic cleaning electron gun mechanism that uses a servo motor to drive a lead screw and a moving block in conjunction with a grinding device to achieve automated cleaning of the electron gun, and uses a clamping component to ensure stability and prevent debris from splashing during the cleaning process.
It improves cleaning efficiency and quality, reduces the labor intensity of workers, adapts to different sizes of electron guns, meets the needs of various usage scenarios, and prevents debris from flying during the cleaning process.
Smart Images
Figure CN224509286U_ABST
Abstract
Claims
1. An automatically cleaning electron gun mechanism comprising a housing, characterized by, The housing contains a cleaning assembly, which includes a guide plate fixedly mounted on the side wall of the housing. A first fixed frame, slidable up and down along the guide plate, is located on one side of the guide plate. A second fixed frame extends through the upper side wall of the housing, positioned directly above the first fixed frame. A first moving block and a second moving block are slidably connected to the first and second fixed frames, respectively. The second moving block is threadedly connected to an operating rod, one end of which is rotatably connected to the first moving block. A grinding device is located on the side of the first moving block away from the operating rod, and a lead screw, threadedly connected to the side near the second moving block, is used to drive the second moving block to slide within the second fixed frame. A drive motor is located on the side of the housing adjacent to the second fixed frame, and the output shaft of the drive motor is fixedly connected to one end of the lead screw. The automatic cleaning electron gun mechanism also includes a clamping assembly located inside the housing for fixing the electron gun to the lower end of the grinding device.
2. The self-cleaning electron gun mechanism of claim 1, wherein, The clamping assembly includes two sets of connecting blocks that are slidably connected to the housing. Each connecting block has a clamping plate spaced apart on its upper side. A support rod is provided between the connecting block and the clamping plate. A driving member is provided between the two sets of connecting blocks to make the two sets of connecting blocks slide relative to each other.
3. The self-cleaning electron gun mechanism of claim 2, wherein, The driving component is a bidirectional lead screw that is rotatably connected to the housing. The bidirectional lead screw passes through two sets of connecting blocks and is threadedly connected to the two connecting blocks. One end of the bidirectional lead screw passes through one side of the housing.
4. The self-cleaning electron gun mechanism of claim 2, wherein, The support rod is U-shaped.
5. The self-cleaning electron gun mechanism of claim 2, wherein, The inner wall of the housing is provided with a first baffle, and the support rod is slidably connected to one end of the first baffle. A protective door is provided at the front of the housing, and an observation window is provided on the protective door.
6. The self-cleaning electron gun mechanism of claim 1, wherein, The second moving block is provided with a second baffle on both sides of the sliding direction, and the second baffle is set through the second fixed frame.
7. The self-cleaning electron gun mechanism of claim 1, wherein, A fixing assembly is provided at the lower part of the housing. The fixing assembly includes an L-shaped mounting plate. One end of the mounting plate is fixedly connected to the lower end of the housing. The connecting end of the mounting plate away from the housing is positioned towards the middle of the housing. An extrusion plate parallel to one side of the lower end of the housing is provided on the side of the mounting plate near the housing. A threaded rod is threadedly connected to the end of the mounting plate near the extrusion plate. The threaded rod passes through one end of the mounting plate and is rotatably connected to the extrusion plate.
8. The self-cleaning electron gun mechanism of claim 1, wherein, The motor is a servo motor.