一种治具及定位系统
By designing a fixture to assist in the alignment and contact of the polishing pad and the grinding disc, the problem of poor contact between the polishing pad and the grinding disc was solved, thus improving the efficiency of preventive maintenance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN PENGXIN MICRO INTEGRATED CIRCUIT MFG CO LTD
- Filing Date
- 2025-08-21
- Publication Date
- 2026-07-17
AI Technical Summary
During preventative maintenance of CMP equipment, the polishing pad and the grinding disc are difficult to align accurately, resulting in the grinding disc being exposed and the polishing pad being rendered unusable, thus reducing maintenance efficiency.
A fixture was designed, including a first arc surface, a second arc surface, and a horizontal surface, to assist in the alignment and contact of the polishing pad and the grinding disc. The fixture is fixed by a fixing part and a machine tool nut to ensure that the center of the polishing pad is aligned with the center of the grinding disc and to avoid poor contact.
It achieves precise alignment between the polishing pad and the grinding disc, avoiding the grinding disc from being exposed and scrapped, and improving the efficiency of preventive maintenance.
Smart Images
Figure CN224509350U_ABST
Abstract
Claims
1. A jig for assisting in the attachment of a polishing pad, characterized by, include: The fixture body has a first arc surface, a second arc surface, and a horizontal surface on one side. The central axes of the first arc surface and the second arc surface coincide. The radius of the first arc surface is equal to the radius of the grinding disc to which the polishing pad is to be attached. The radius of the second arc surface is equal to the radius of the polishing pad. The horizontal surface connects the top of the first arc surface and the bottom of the second arc surface, and the central axis is perpendicular to the horizontal surface. The first arc surface is used to fit against the circumferential side surface of the grinding disk, the horizontal surface is used to be flush with the upper surface of the grinding disk when the first arc surface fits against the circumferential side surface of the grinding disk, and the second arc surface is used to fit against the circumferential side surface of the polishing pad.
2. The fixture according to claim 1, characterized in that, The bottom of the fixture body has a fixing part, which is used to fix it to the machine base where the grinding disc is located.
3. The fixture according to claim 2, characterized in that, The fixing part is provided with an arc-shaped groove, which is used to snap onto multiple nuts on the machine base.
4. The fixture according to claim 2, characterized in that, The fixing part is provided with a plurality of first fixing holes, which are respectively used to snap onto a plurality of nuts on the machine base.
5. The jig according to any one of claims 2-4, characterized in that, The fixture also includes a fixing plate and a fixing element; The fixing piece is connected to the side of the fixture body that is away from the first arc surface; The fastener is used to fix the fixing piece to the machine base.
6. The fixture according to claim 5, characterized in that, The fixing plate is integrally formed with the fixture body.
7. The fixture according to claim 5, characterized in that, The fixing plate is provided with a second fixing hole, and the fixing member is used to pass through the second fixing hole and connect to the machine base to fix the fixing plate to the machine base.
8. The fixture according to claim 1, characterized in that, The angle between the first and second arc surfaces is 30°-180°.
9. The fixture according to claim 1, characterized in that, The fixture is made of polyetheretherketone or polyphenylene sulfide.
10. A positioning system, characterized in that, The positioning system includes a plurality of fixtures as described in any one of claims 1-9, wherein the plurality of fixtures are spaced apart along the outer periphery of the grinding disc; In each of the fixtures, the first arc surface is in contact with the circumferential side of the grinding disc, and the horizontal surface of each fixture is flush with the upper surface of the grinding disc.