一种带预对准及真空吸附的基板存储装置
By introducing pre-alignment and adsorption components into the solar substrate storage device, the problems of positional displacement and falling off during substrate insertion and transfer are solved, achieving stable storage and efficient transfer of the substrate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- QINGDAO BAD AUTOMATION TECHNOLOGY CO LTD
- Filing Date
- 2025-07-24
- Publication Date
- 2026-07-17
AI Technical Summary
Existing solar substrate storage devices are prone to positional displacement and damage during insertion and transfer, and there is a risk of the substrate falling off during storage, affecting their practicality.
A substrate storage device with pre-alignment and vacuum adsorption is designed. It employs a pre-alignment component and an adsorption component. The pre-alignment component aligns the substrate position through a plug-in plate and a guide plate, while the adsorption component keeps the substrate stable and prevents it from falling through a piston and a vacuum tube.
It effectively prevents the substrate from shifting or breaking during insertion and transfer, ensuring the stability and safety of the substrate during storage, and improving work efficiency and practicality.
Smart Images
Figure CN224511874U_ABST
Abstract
Claims
1. A substrate storage device with pre-alignment and vacuum chucking, characterized by, Includes a storage box (1), a support plate (3) and a pre-alignment component. Multiple support plates (3) are fixedly arranged at equal distances on the left and right sides inside the storage box (1). A pre-alignment component is installed on the outer surface of the storage box (1). A positioning sleeve (4) is fixedly arranged on the outer side of the upper surface of the storage box (1). An adsorption component is installed on the upper surface of the storage box (1) and on the support plate (3). The pre-alignment assembly includes a fixing plate (2), a through slot (201), a side guide plate (202), a horizontal guide plate (203), and a plug-in plate (204). The outer surface of the fixing plate (2) is provided with multiple through slots (201) at equal intervals. Side guide plates (202) are fixedly provided on both the left and right sides of the through slots (201). A horizontal guide plate (203) is fixedly provided at the bottom of the outer side of each through slot (201). A plug-in plate (204) is fixedly provided at the center of the upper surface of the fixing plate (2).
2. The substrate storage device with pre-alignment and vacuum chucking of claim 1, wherein: The plug plate (204) is matched with the positioning sleeve (4), and the plug plate (204) can be inserted into the positioning sleeve (4).
3. The substrate storage device with pre-alignment and vacuum chucking of claim 2, wherein: The height of the through groove (201) is equal to the distance between two adjacent support plates (3) in the vertical direction, and when the plug plate (204) is inserted into the positioning sleeve (4), the gap between the through groove (201) and the two adjacent support plates (3) corresponds one-to-one.
4. The substrate storage device with pre-alignment and vacuum chucking of claim 3, wherein: The two side guide plates (202) are in an inverted "V" shape, with the side closer to the fixed plate (2) being smaller and the side farther away from the fixed plate (2) being larger.
5. The substrate storage device with pre-alignment and vacuum chucking of claim 4, wherein: The horizontal guide plate (203) is distributed in an "S" shape on the outer surface of the fixed plate (2).
6. The substrate storage device with pre-alignment and vacuum chucking of claim 1, wherein: The adsorption assembly includes multiple adsorption holes (301) on the upper surface of the support plate (3) and a piston cylinder (5) penetrating the center of the upper surface of the storage box (1). The support plate (3) is a hollow box structure. A piston (503) is airtightly connected to the bottom of the inner side of the piston cylinder (5). A piston rod (501) is connected to the piston (503). A handle (502) is fixedly installed on the top of the piston rod (501). A suction pipe (504) is installed through the lower surface of both the left and right sides of the piston cylinder (5). The suction pipe (504) is connected to the support plate (3) through multiple connecting pipes.
7. The substrate storage device with pre-alignment and vacuum chucking of claim 6, wherein: A rubber layer is fixedly provided on the upper surface of the support plate (3).
8. The substrate storage device with pre-alignment and vacuum chucking of claim 7, wherein: An external threaded column (505) is rotatably mounted above the piston (503) via a bearing. The piston rod (501) is fixedly mounted above the external threaded column (505). A threaded hole matching the external threaded column (505) is provided at the center of the top of the piston cylinder (5).
9. The substrate storage device with pre-alignment and vacuum chucking of claim 8, wherein: The diameter of the external threaded post (505) is larger than the diameter of the piston rod (501).
10. The substrate storage device with pre-alignment and vacuum chucking of claim 1, wherein: The upper surface of the positioning sleeve (4) is threaded with a rubber head bolt (401).