一种晶圆标准片存储盒
By setting a limiting component on the wafer standard wafer storage box, the problem of collision between the standard wafer and the side wall of the storage box during movement is solved, thus improving the service life of the wafer standard wafer.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 捷捷微电(南通)科技有限公司
- Filing Date
- 2025-09-05
- Publication Date
- 2026-07-17
AI Technical Summary
During movement, the standard film storage box is prone to collision with the side wall of the storage box, resulting in a high risk of breakage.
Design a wafer standard wafer storage box, comprising an upper box and a lower box, with multiple limiting members arranged along the periphery of the wafer standard wafer. The limiting members work together to clamp the wafer standard wafer, reducing the risk of collision.
By using the clamping mechanism, the risk of collision between the wafer standard and the side wall of the storage box during movement is reduced, thus improving the lifespan of the wafer standard.
Smart Images
Figure CN224511887U_ABST
Abstract
Claims
1. A wafer standard storage box characterized by comprising: The device includes an upper box and a lower box that are fastened together to form a receiving cavity. The receiving cavity is used to receive a wafer standard. A plurality of first limiting members are provided on the upper box, and a plurality of second limiting members corresponding to the first limiting members are provided on the lower box. The plurality of first limiting members and the plurality of second limiting members are arranged along the periphery of the wafer standard. After the upper box and the lower box are fastened together, the first limiting members and the corresponding second limiting members cooperate to limit the wafer standard. The first limiting member and / or the second limiting member include an abutting part and a clamping part fixedly connected, wherein the abutting part limits the wafer standard to move radially, and the clamping part limits the wafer standard to move axially.
2. The wafer standard storage box according to claim 1, wherein The abutting portion has a limiting surface that cooperates to limit the wafer standard piece, and the limiting surface is an arc surface.
3. The wafer standard storage box according to claim 1 or 2, wherein After the upper box and the lower box are fastened together, the first limiting member and the corresponding second limiting member are aligned in the direction perpendicular to the wafer standard.
4. The wafer standard storage case according to claim 1 or 2, wherein The upper box and the lower box have a first fastening edge and a second fastening edge at their fastening points. The upper box and the lower box are hinged at the first fastening edge and connected at the second fastening edge by at least two latches.
5. The wafer standard storage box according to claim 4, wherein The latch includes a lock body located in the lower box and a lock block located in the upper box. The lock body includes a fixing block fixed to the lower box and a lock tongue slidably connected to the fixing block. The lock tongue can slide to switch between an unlocked position and a locked position. When the upper box and the lower box are engaged, the lock tongue slides from the unlocked position to the locked position to lock with the lock block.
6. The wafer standard storage box according to claim 5, wherein The latch has a through groove, and the lock block has a protrusion. When the latch is in the locked position, the protrusion is located in the through groove, and the bottom wall and the opposite side walls of the through groove respectively abut against the protrusion.
7. The wafer standard storage box according to claim 4, wherein The upper box and the lower box are engaged at the second fastening edge by a groove and a protrusion, and the groove communicates with the portion of the receiving chamber located in the lower box.
8. The wafer standard storage box according to claim 7, wherein The protrusion and the groove are trapezoidal.
9. The wafer standard storage case according to claim 1 or 2, wherein The wafer standard wafer storage box is a square box with chamfered corners at the sharp corners.