一种再生水制备超纯水工艺的验证装置

Abstract

本实用新型提供一种再生水制备超纯水工艺的验证装置，涉及超纯水制备工艺验证技术领域，包括：依次连接的原水箱、过滤单元、消毒杀菌单元、第一中间水箱、一级反渗透处理单元、第二中间水箱、二级反渗透处理单元、第三中间水箱、电去离子单元、氮封水箱、总有机碳检测与紫外线处理结合单元、抛光混床树脂单元和终端过滤器单元，终端过滤器单元设置有取样口和取样阀；一级反渗透处理单元并联连接有阳离子交换床单元和阴离子交换床单元，电去离子单元并联连接有混床单元，一级反渗透处理单元的上游管路、第一分支管路、电去离子单元的上游管路和第二分支管路上分别设置有一个阀门；能够验证再生水制备超纯水工艺的工艺效果。

Claims

1. A verification device for a process of producing ultrapure water from regenerated water, characterized in that, include: The system comprises, in sequence, a raw water tank, a filtration unit, a disinfection and sterilization unit, a first intermediate water tank, a primary reverse osmosis treatment unit, a second intermediate water tank, a secondary reverse osmosis treatment unit, a third intermediate water tank, an electro-deionization unit, a nitrogen-sealing water tank, a total organic carbon detection and ultraviolet treatment combined unit, a polishing mixed bed resin unit, and a terminal filter unit. The terminal filter unit is equipped with a sampling port and a sampling valve. A first branch pipe connects the upstream and downstream pipelines of the primary reverse osmosis treatment unit, and a cation exchange bed unit and an anion exchange bed unit are sequentially installed on the first branch pipe. A second branch pipe connects the upstream and downstream pipelines of the electro-deionization unit, and a mixed bed unit is installed on the second branch pipe. A valve is installed on each of the upstream pipelines of the primary reverse osmosis treatment unit, the first branch pipe, the upstream pipeline of the electro-deionization unit, and the second branch pipe.

2. The verification device for the process of producing ultrapure water from regenerated water according to claim 1, characterized in that, The filtration unit is an external pressure ultrafiltration unit.

3. The device for verifying the process of producing ultrapure water from regenerated water according to claim 1, characterized in that, The disinfection and sterilization unit is an ultraviolet light disinfection and sterilization unit.

4. The apparatus for verifying the process of producing ultrapure water from regenerated water according to claim 1, wherein A high-pressure pump and a diaphragm pump are respectively installed on the upstream pipeline and the first branch pipeline of the primary reverse osmosis treatment unit.

5. The device for verifying the process of producing ultrapure water from regenerated water according to claim 1, characterized in that, The terminal filter unit is a capsule filter.

6. The apparatus for verifying the process of producing ultrapure water from regenerated water according to claim 1, wherein The terminal filter unit is connected to the nitrogen-sealed water tank via a circulation pipeline, and an online resistivity meter is installed on the circulation pipeline.

7. The device for verifying the process of producing ultrapure water from regenerated water according to claim 1, characterized in that, The terminal filter unit is connected to a TOC online detection instrument.

8. The device for verifying the process of producing ultrapure water from regenerated water according to claim 1, characterized in that, The filtration unit is connected to the raw water tank via a first return pipeline, the primary reverse osmosis treatment unit is connected to the first intermediate water tank via a second return pipeline, and the secondary reverse osmosis treatment unit is connected to the second intermediate water tank via a third return pipeline.

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