镀膜反应气体分布式混气箱结构

Abstract

本实用新型涉及镀膜玻璃加工领域，且公开了镀膜反应气体分布式混气箱结构，包括底板，所述底板的顶部设置有支撑脚，所述支撑脚的一端设置有气罐，所述气罐的顶部设置有进气管。该镀膜反应气体分布式混气箱结构，可以使得该混气箱具备混合均匀性好的作用，通过设置的预混球体等结构，在气体进入反应腔前进行快速的预混操作，有效提高了反应气体的混合均匀性，这避免了非预混气体在反应腔内形成局部浓度梯度，确保了气体在反应腔内的充分混合，从而提高了膜层厚度、成分和结构的均匀性，由于反应气体混合均匀性的提升，有助于精确控制薄膜的化学组成和物理性能，进而提高膜层的整体质量，均匀的膜层成分和结构有助于提升膜层的均匀性和附着力。

Claims

1. A structure of a coated reaction gas distribution mixed gas box, comprising a bottom plate (1), characterized in that: The bottom plate (1) is provided with a support foot (2) at the top, and a gas tank (3) is provided at one end of the support foot (2). An air inlet pipe (4) is provided at the top of the gas tank (3), an air inlet valve (5) is provided at the top of the gas tank (3), and a connecting pipe (6) is provided on one side of the gas tank (3). One end of the connecting pipe (6) is provided with a mixing box body (7), the top of the mixing box body (7) is provided with a motor (8), the output end of the motor (8) is provided with a rotating shaft (9), and the outer wall of the rotating shaft (9) is provided with a premixing sphere (10).

2. The film-coating reaction gas distribution mixed gas box structure according to claim 1, characterized in that: There are three gas cylinders (3), which are equally spaced on the top of the base plate (1).

3. The film-coating reaction gas distribution mixed gas box structure according to claim 1, characterized in that: The two ends of the connecting pipe (6) pass through one side of the gas tank (3) and one side of the mixing box body (7) respectively, and extend into the interior of the gas tank (3) and the interior of the mixing box body (7).

4. The film-coating reaction gas distribution mixed gas box structure according to claim 1, characterized in that: The inner wall of the mixing box body (7) is provided with a mixing chamber, which is a spherical mixing chamber.

5. The film-coating reaction gas distribution mixed gas box structure according to claim 1, characterized in that: The top of the mixing chamber body (7) is provided with a bearing (11), and the mixing chamber body (7) is movably connected to the rotating shaft (9) through the bearing (11).

6. The coating reaction gas distribution gas mixing box structure according to claim 1, characterized in that: An exhaust pipe (12) is provided on one side of the mixing box body (7), and an exhaust valve (13) is provided on one side of the mixing box body (7).

Images