一种磁控溅射在线可调磁棒用光纤通讯装置

Abstract

本实用新型属于磁控溅射设备技术领域，其公开了一种磁控溅射在线可调磁棒用光纤通讯装置，包括外部光纤通讯组件以及内部光纤通讯组件，外部光纤通讯组件包括光纤发射端子，其设置于基座组件上的光线发射端子通道内，光纤发射端子的出光面朝向磁轭组件；内部光纤通讯组件包括接收端子，其安装于磁轭组件上的接收端子通道内，且接收端子的进光面正对光纤发射端子；光纤发射端子通道内，位于光线发射端子的出光面所在侧设置有密封组件，密封组件将光纤发射端子通道的该侧密封，且光纤发射端子射出的光信号可穿透密封组件，由接收端子接收，实现磁轭组件能够相对基座组件摆动活动的同时，还能够实现信号的传输和通讯。

Claims

1. A fiber optic communication device for an online adjustable magnetron sputtering magnet rod, comprising a base assembly (10) and a drive assembly (70), wherein a target (60) is sleeved on the outside of a yoke assembly (20), and the two ends of the target (60) and the yoke assembly (20) are respectively movably connected to the base assembly (10) and the drive assembly (70); characterized in that: The system includes an external optical fiber communication component (30) and an internal optical fiber communication component (40). The external optical fiber communication component (30) is disposed on the base component (10), and the internal optical fiber communication component (40) is mounted on the magnetic yoke component (20). The external optical fiber communication component (30) includes an external optical fiber transceiver terminal (31). The base component (10) is provided with a light emission terminal channel, and the external optical fiber transceiver terminal (31) passes through the external optical fiber transceiver terminal channel. The light-emitting surface of the external optical fiber transceiver terminal (31) faces the magnetic yoke component (20). The internal optical fiber communication component (40) includes an internal optical fiber transceiver terminal. (41); On the magnetic yoke assembly (20), an internal optical fiber transceiver terminal channel is provided at the connection end with the base assembly (10). The internal optical fiber transceiver terminal (41) passes through the internal optical fiber transceiver terminal channel, and the light-inlet surface of the internal optical fiber transceiver terminal (41) faces the external optical fiber transceiver terminal (31). In the external optical fiber transceiver terminal channel, a sealing assembly is provided on the side where the light-emitting surface of the light-emitting terminal is located. The sealing assembly seals this side of the external optical fiber transceiver terminal channel, and the light signal emitted by the external optical fiber transceiver terminal (31) can penetrate the sealing assembly and be received by the internal optical fiber transceiver terminal (41).

2. The fiber optic communication device for in-line adjustable magnetron sputtering of a magnetron sputtering rod according to claim 1, characterized in that: The sealing assembly includes a light-transmitting baffle (34), which is embedded in the light emitting terminal channel and is located near the light-emitting surface of the internal optical fiber transceiver terminal (41).

3. The optical fiber communication device for magnetically controllable sputtering on-line adjustable magnet bar according to claim 2, characterized in that: A first sealing ring (37) is provided between the light-transmitting baffle (34) and the light-emitting terminal channel.

4. The optical fiber communication device for magnetron sputtering on-line adjustable magnet bar according to claim 3, characterized in that: It also includes a limiting component that limits the light-transmitting baffle (34) within the light-emitting terminal channel; the limiting component is located on the side of the light-transmitting baffle (34) away from the first sealing ring (37).

5. A fiber-optic communication device for a magnetically controllable sputtering on-line adjustable magnet bar according to claim 4, characterized in that: The limiting component includes a pressure ring (35) disposed on the side of the light-transmitting baffle (34) away from the first sealing ring (37), and an elastic retaining spring (36) is attached to the outside of the pressure ring (35).

6. The fiber optic communication device for an online adjustable magnetron sputtering magnet as described in claim 5, characterized in that: The external optical fiber communication assembly (30) also includes an external optical fiber mounting base (32) and an external optical fiber limiting member (33). The front end of the external optical fiber mounting base (32) is inserted into the optical emission terminal channel, and the rear end is pressed into the entrance end of the optical emission terminal channel by a screw (121). The external optical fiber mounting base (32) has an external optical fiber transceiver terminal receiving cavity (32b) and an emission-introducing optical fiber through hole (32a). The external optical fiber transceiver terminal (31) is received in the external optical fiber transceiver terminal receiving cavity (32b) and limited by the external optical fiber limiting member (33). The optical fiber introducing section (311) extends outward through the emission-introducing optical fiber through hole (32a).

7. The magnetron sputtering on-line adjustable magnet rod optical fiber communication device according to claim 1, characterized in that: The internal optical fiber communication assembly (40) further includes an internal optical fiber transceiver terminal mounting component (42) and an internal optical fiber transceiver terminal limiting component (43). The internal optical fiber transceiver terminal mounting component (42) has a through internal optical fiber transceiver terminal receiving hole (42b) and an internal optical fiber transceiver terminal fiber outlet hole (42a) in the middle. The internal optical fiber transceiver terminal mounting component (42) is connected to the side of the magnetic yoke assembly (20) facing the external optical fiber communication assembly (30). The internal optical fiber transceiver terminal (41) is received in the internal optical fiber transceiver terminal receiving hole (42b). The fiber segment (411) of the sub-(41) is led out through the fiber lead-out hole (42a). The internal fiber transceiver terminal limiting member (43) is threadedly connected to the opening of the internal fiber transceiver terminal receiving hole (42b), limiting the internal fiber transceiver terminal (41) within the internal fiber transceiver terminal receiving hole (42b). The receiving end (41a) of the internal fiber transceiver terminal (41) is exposed to the outside through the terminal lead-out hole (431) of the internal fiber transceiver terminal limiting member (43), and the receiving end (41a) of the internal fiber transceiver terminal (41) is flush with the outer end face of the terminal lead-out hole (431).

8. The optical fiber communication device for magnetron sputtering on-line adjustable magnet bar according to claim 7, characterized in that: On the outer shell (21) of the magnetic yoke assembly (20), near the location of the optical fiber outlet (42a), a wire-passing groove (211) is provided obliquely from the middle outward. The optical fiber segment (411) passes through the end of the wire-passing groove (211), which is near the location of the main control board. On the outer shell (21), near the end of the wire-passing groove (211), a wire-passing hole is provided. An optical fiber connector assembly (213) is installed on the wire-passing hole to connect the optical fiber segment (411) to the optical fiber connector assembly (213). The optical fiber segment inside the optical fiber connector assembly (213) is connected to the main control board.

9. The magnetron sputtering on-line adjustable magnet rod optical fiber communication device according to claim 1, characterized in that: The base assembly (10) includes a mounting plate (11) that separates the vacuum area of ​​the vacuum sputtering equipment from the outside; it also includes an external mounting assembly (50) that includes an outlet pipe (51), a first flange (52), a mounting block (53), and a flange connector (54). A through hole is provided on the mounting plate (11), the end of the outlet pipe (51) is inserted into the through hole, and the outer peripheral surface is fully welded to the edge of the through hole. The first flange (52) is located on the end of the outlet pipe (51) away from the mounting plate (11), and the connection between the two is fully welded. A second flange (531) is provided at the lower end of the mounting block (53), the second flange (531) is adapted to the first flange (52), and the flange connector (54) presses the second flange (531) onto the first flange (52). A seal (57) is provided between the second flange (531) and the first flange (52).

10. The optical fiber communication device for magnetron sputtering on-line adjustable magnet bar according to claim 9, characterized in that: The end of the mounting block (53) away from the second flange (531) is the mounting end (532). Two mounting holes are opened on the upper surface of the mounting end (532). Each mounting hole has a wire outlet channel (533) at the bottom that communicates with the lower end of the second flange (531). A clamping member (55) is threaded into the mounting hole. A second sealing ring (56) is provided between the clamping member (55) and the bottom surface of the mounting hole.

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