用于旋转阴极的磁棒调节结构
By adjusting the structure with a rotating cathode magnetic rod, using a motor-driven flexible coupling and synchronous belt drive, combined with a rotating cylinder to drive the water inlet pipe to move synchronously, online angle adjustment is achieved. This solves the problems of long adjustment time and complex structure of traditional magnetic rod adjustment, and improves production efficiency and equipment life.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU LONGWAY TECH CO LTD
- Filing Date
- 2025-08-28
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional magnetic rod adjustment requires opening a cavity for disassembly, which is time-consuming, leading to production interruptions and high levels of manual intervention. In addition, the traditional protective target surface to be coated requires a baffle structure, which is complex.
The rotating cathode magnetic rod adjustment structure is adopted, and the online angle adjustment is achieved through the motor-driven flexible coupling and synchronous belt drive. Combined with the rotating cylinder driving the water inlet pipe to move synchronously, the angle is detected by the sensor, which simplifies the structure and avoids the aging of the seals.
It enables online angle adjustment, reduces operation time to the minute level, avoids production interruption, reduces the risk of manual intervention, extends service life, and simplifies the structure for easy maintenance.
Smart Images
Figure CN224513602U_ABST
Abstract
Claims
1. A magnetic rod adjustment structure for a rotary cathode, comprising a rotary cathode magnetic rod (1), characterized in that: An adjustment component is fixedly connected to the end of the rotating cathode magnetic rod (1), and a power component is fixedly connected to the end of the adjustment component. A sensor (10) is fixedly connected to the frame of the power component to detect the rotation angle.
2. The magnetic rod adjustment structure for a rotary cathode according to claim 1, characterized by: The power components include: a motor (3) and a flexible coupling (31). The output end of the motor (3) is fixedly connected to the end of the flexible coupling (31), and the flexible coupling (31) is used to transmit power.
3. The magnetic rod adjustment structure for a rotary cathode according to claim 1, characterized by: The adjustment assembly includes: an external vacuum box (2), an auxiliary connecting plate (21), an auxiliary connecting shaft (22), a bearing (23), a synchronous belt (24), an auxiliary support seat (25), a driven wheel (26), and a skeleton oil seal (27). The shell of the external vacuum box (2) is rotatably connected to the frame of the auxiliary connecting plate (21). The skeleton oil seal (27) is fitted between the auxiliary connecting plate (21) and the auxiliary connecting shaft (22). The outer wall of the auxiliary connecting plate (21) is engaged with the inner wall of the bearing (23). The outer wall of the bearing (23) is fitted with the inner wall of the auxiliary support seat (25). The frame of the auxiliary support seat (25) is fixedly connected to the shell of the external vacuum box (2). The end of the auxiliary connecting shaft (22) is fixedly connected to the shaft of the driven wheel (26). The driven wheel (26) is meshed with the synchronous belt (24) for transmission.
4. The magnetic rod adjustment structure for a rotary cathode according to claim 1, characterized by: The power component includes a rotary cylinder (4) which is used to provide power.
5. The magnetic rod adjustment structure for a rotary cathode according to claim 1, characterized by: The adjustment assembly includes: an external housing (5), a coupling (52), and a water inlet pipe (53). The middle part of the housing of the external housing (5) is rotatably connected to the shaft of the coupling (52), and the open end of the external housing (5) is fixedly connected to the pipe body of the water inlet pipe (53).