一种可调靶基距的夹具
By designing a fixture with an adjustable target-substrate distance, the problem of limited process parameter adjustment caused by a fixed target-substrate distance in vacuum coating equipment was solved, enabling diversified adjustment of coating samples and improving the uniformity of thin film deposition and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUHAN RES INST OF MATERIALS PROTECTION
- Filing Date
- 2025-05-27
- Publication Date
- 2026-07-17
AI Technical Summary
In existing vacuum coating equipment, the target-substrate distance is fixed, which limits the range of process parameter adjustment. This makes it difficult to meet the coating requirements of multi-material compatibility and workpieces with complex geometric features, affecting the uniformity of thin film deposition and production efficiency.
Design an adjustable target-base distance fixture that uses a rotating mechanism and positioning components to adjust the height and horizontal position of the coated sample, and uses clamping components to fix the sample to meet the needs of different coating processes.
It enables flexible adjustment of the target-substrate distance, improves the uniformity of thin film deposition and production efficiency, and adapts to the coating requirements of multi-material and complex workpieces.
Smart Images
Figure CN224513603U_ABST
Abstract
Claims
1. A fixture for adjustable target pitch, characterized by, include: A rotating mechanism includes a driving element and a rotating shaft, wherein the driving element is connected to the rotating shaft and is capable of driving the rotating shaft to rotate; A plurality of positioning elements are spaced apart along the axial direction of a rotation axis. Each positioning element includes a support portion and a mounting portion. The support portion is mounted on the rotation axis, and the mounting portion is connected to the support portion. The mounting portion has a first state and a second state. In the first state, the mounting portion can slide along an axial direction perpendicular to the rotation axis. In the second state, the mounting portion is fixed to the support portion. Each of the mounting parts is connected to at least one clamping member, which is used to fix the coating sample.
2. The adjustable target pitch clamp of claim 1, wherein, The support part includes a support rod, which is mounted on the rotating shaft. The support rod has a groove along the axis perpendicular to the rotating shaft. In the first state, the mounting part can slide along the groove.
3. The adjustable target pitch clamp of claim 2, wherein, The middle part of the support rod is connected to the rotating shaft, and the two mounting parts are respectively connected to the opposite ends of the support rod. Each opposite end of the support rod is provided with a sliding groove. In the first state, the two mounting parts can slide along the two sliding grooves respectively.
4. The adjustable target pitch clamp of claim 2, wherein, The spacing between two adjacent support rods is 5-20cm.
5. The adjustable target-base distance clamp according to claim 2, characterized in that, The surface of the support rod is provided with a wear-resistant layer.
6. The adjustable target pitch clamp of claim 2 or 5, wherein, The mounting part includes a mounting plate, a locking screw, and a locking nut. The mounting plate is connected to the clamping member. One end of the locking screw is fixed to the mounting plate. The locking screw passes through the sliding groove, and the other end is screwed into the locking nut.
7. The adjustable target pitch clamp of claim 6, wherein, The mounting part also includes a gasket, which is sleeved on the locking screw and positioned between the locking nut and the mounting plate.
8. The adjustable target pitch clamp of claim 7, wherein, The clamping component includes a locking bolt and a pressure plate. Each pressure plate has a through hole, and the locking bolt passes through the through hole and is screwed into a threaded hole on the mounting plate.
9. The adjustable target-base distance clamp according to claim 8, characterized in that, The rotating mechanism also includes a base, a bracket, and a docking part. The bracket is mounted on the base and has an insertion hole. The driving component is mounted on the base, and the output end of the driving component is fixedly connected to the docking part. The docking part is detachably connected to the bottom end of the rotating shaft, and the top end of the rotating shaft passes through the insertion hole.
10. The adjustable target pitch clamp of claim 9, wherein, The docking part includes a connecting block, a stop bar, and a limiting mechanism. The connecting block has a groove and a limiting hole. The limiting hole communicates with the groove. The stop bar is fixedly connected to the bottom end of the rotating shaft. When the bottom end of the rotating shaft is inserted into the groove, the stop bar is engaged in the limiting hole and extends to the outside of the connecting block. The limiting mechanism can be fixedly connected to the connecting block and abut against the stop bar to prevent the rotating shaft from disengaging from the groove.