一种翻盖装置
The mechanical linkage design of the flip-top device solves the problems of complex operation and poor safety of the cover of the semiconductor equipment transmission cavity, and realizes an efficient and reliable cover opening and closing function, which is suitable for semiconductor PVD equipment and other cover opening and closing scenarios.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HAICHUANG INTELLIGENT EQUIP (YANTAI) CO LTD
- Filing Date
- 2025-07-09
- Publication Date
- 2026-07-17
Smart Images

Figure CN224513605U_ABST
Abstract
Claims
1. A flip cover device, characterized by, The device includes a main housing, within which a lead screw assembly is provided. The upper end of the lead screw assembly extends out of the main housing and is connected to a rocker handle above it. The lower end of the main housing is rotatably connected to a flip cover connecting rod, which is connected to a top cover. A cavity is provided below the main housing. The lead screw assembly can drive the main housing and the flip cover connecting rod to move up and down, thereby opening and closing the top cover.
2. The flip cover device of claim 1, wherein, A base plate is connected to the lower part of the main housing, and the base plate is connected to the upper end of the cavity.
3. The flip cover device of claim 1, wherein, The end of the flip-top connecting rod furthest from the main housing is heavier than the end closest to the main housing.
4. The flip cover device of claim 2, wherein, The lead screw assembly includes a T-shaped lead screw and a lead screw nut. The upper end of the T-shaped lead screw is connected to the rocker handle via a flat key. The lead screw nut is located inside the main housing and is threadedly connected to the T-shaped lead screw.
5. The flip cover device of claim 4, wherein, The lower end of the T-shaped lead screw is connected to a guide rod, which is sleeved inside a linear bearing. The linear bearing is located inside the main housing and connected to the lower end of the main housing.
6. The flip cover device of claim 5, wherein, A guide wheel is connected to one side of the main housing, and a back plate is connected to the upper end of the base plate. A vertically arranged sliding groove is provided on the back plate. When the main housing moves up and down, it drives the guide wheel to slide up and down in the sliding groove.
7. The flip cover device of claim 6, wherein, A limiting block is provided above the substrate, and a cam bearing is provided on the limiting block. The cam bearing is located above the end of the flip-cover connecting rod near the main housing, and is used to limit the end near the main housing during the upward movement of the flip-cover connecting rod, thereby achieving the upward tilting of the end away from the main housing.
8. The flip cover device of claim 1, wherein, The main housing is provided with an eccentric shaft, which is used to press down the flip-top connecting rod near one end of the main housing during the descent of the flip-top connecting rod.
9. The flip-top device according to claim 6, characterized in that, The upper part of the back plate is connected to an upper cover plate, which is located above the main housing, and the rocker handle is connected to the upper cover plate.
10. The flip cover device of claim 9, wherein, A protective plate is connected to the lower end of the upper cover plate.