一种喷头及沉积设备
By improving the nozzle structure, uniform and staggered spraying of various reaction precursor gases was achieved, solving the problem of poor film uniformity and improving the quality and efficiency of the deposition process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HUAWEI TECH CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-07-17
AI Technical Summary
When existing spray heads spray various reactive precursor gases, the uniformity of the thin film is poor, which affects the quality of the deposition process.
A nozzle structure was designed, including multiple flow channels and jet orifice groups. The jet orifice groups are arranged in an array and connected to the storage device through the flow channels to ensure uniform and staggered spraying of different precursor gases. Baffles are used to avoid gas mixing and improve the directness of airflow control and deposition uniformity.
This method achieves uniform distribution of various precursor gases on the substrate surface, improves the uniformity and quality of thin film deposition, reduces the complexity of the production process, and avoids contamination caused by unexpected reactions.
Smart Images
Figure CN224513610U_ABST
Abstract
Claims
1. A showerhead for a deposition apparatus, characterized by, The nozzle includes: The chamber has multiple flow channels, which are respectively used to communicate with a storage device in the deposition equipment for storing different precursors; the chamber has a first wall, which is oriented toward the workpiece to be processed. The first wall is provided with a plurality of arrayed first jet hole groups, each of which includes a plurality of first jet holes arranged in an array; the plurality of first jet holes in the same first jet hole group are respectively connected to the plurality of flow channels; Alternatively, the first wall may be provided with a plurality of second jet hole groups, each of which includes a plurality of second jet holes, the plurality of second jet holes being arranged in a circular array to form a ring; the plurality of second jet holes in the same second jet hole group are all connected to the same flow channel; the plurality of second jet hole groups are evenly distributed in concentric rings and are respectively staggered and connected to the plurality of flow channels.
2. The showerhead of claim 1, wherein The outer periphery of the plurality of first jet holes on the first wall is circular or rectangular.
3. The showerhead of claim 1 or 2, wherein, The first jet holes in the first jet hole group are distributed in a rectangular or circular array.
4. The showerhead of claim 3, wherein, The multiple flow channels are stacked sequentially and correspond to any row or column of the multiple first jet holes in the multiple first jet hole groups.
5. The showerhead of claim 4, wherein, The first jet holes in the first jet hole group are arranged in an M×N rectangular array; where M is the number of rows and N is the number of columns; the number of flow channels is S; M, N, and S are all positive integers greater than 1. If S = K × M, where K is a positive integer; each of the K flow channels in the S flow channels is stacked sequentially and corresponds to a row of multiple first jet holes in the multiple first jet hole groups; If S = P × N, where P is a positive integer; each of the P flow channels in the S flow channels is stacked sequentially, and each corresponds to one of the multiple first jet holes in a column of the multiple first jet hole groups.
6. The showerhead of claim 1, wherein The diameter of the second jet orifice ranges from 0.1 mm to 1 mm; and / or the spacing between two adjacent second jet orifices is from 3 mm to 30 mm.
7. The showerhead of claim 1 or 6, wherein Each of the flow channels includes an air inlet channel, a connecting channel, and an air extraction channel connected in sequence. The air inlet channel is used to communicate with the storage device for storing the precursor, and the connecting channel is used to communicate with a plurality of second air jets in the second air jet group. The air extraction channel is used to communicate with a pump in the deposition equipment to eject the precursor in the storage device from the second air jets through the air inlet channel and the connecting channel. The air intake channel and the air extraction channel in the plurality of flow channels extend radially along the second jet hole group and are spaced apart in the circumferential direction; and the air intake channel and the air extraction channel in the same flow channel are adjacent to each other.
8. The showerhead of claim 1 or 2, wherein, The outer side of the first wall is also provided with a plurality of baffles, which are provided at least between two adjacent first jet hole groups in the plurality of first jet hole groups, or between two adjacent second jet hole groups in the plurality of second jet hole groups.
9. The showerhead of claim 8, wherein, The height of the baffle plate ranges from 3mm to 3cm.
10. A deposition apparatus, characterized by, include: A reaction chamber, wherein a stage for fixing the workpiece to be processed is provided inside the reaction chamber; The showerhead of any one of claims 1-9, disposed within a reaction chamber, and a first wall of the chamber in the showerhead faces the substrate table; a plurality of storage devices respectively for storing different precursors and respectively in communication with a plurality of flow channels in the showerhead.
11. The deposition apparatus of claim 10, wherein Any one of the flow channels in the showerhead comprises a gas inlet channel, a connecting channel and a gas outlet channel in sequence; the gas inlet channels in the plurality of flow channels are in communication with the plurality of storage devices, and the connecting channels are in communication with a plurality of second gas injection holes in the second group of gas injection holes; The deposition apparatus further comprises a plurality of pumps respectively in communication with the gas outlet channels in the plurality of flow channels.