带辅热装置的炉管和PECVD设备
By installing a support tray and flange structure inside the furnace tube of the PECVD equipment, the problem of fracture caused by frequent heating and cooling and the accumulation of deposits in the auxiliary heating jacket is solved, extending the life of the jacket, reducing maintenance frequency and cost, and improving production quality and efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TRINA SOLAR CO LTD
- Filing Date
- 2025-06-26
- Publication Date
- 2026-07-17
AI Technical Summary
In existing photovoltaic cell tubular PECVD equipment, the auxiliary heating jacket is prone to breakage due to frequent temperature rises and falls, aging, and the accumulation of deposits, which can break the furnace tube, causing economic losses and downtime.
A support tray is installed inside the furnace tube. The support tray is snapped into the auxiliary heating jacket to enhance its integrity with the furnace body, reduce displacement and friction. The support tray has a buffering effect, evenly distributes thermal stress, and is fixed in position by the flange structure to ensure stable operation of the auxiliary heating jacket.
It extends the service life of the auxiliary heating jacket, reduces the frequency and cost of equipment maintenance, improves production quality and efficiency, and reduces equipment downtime.
Smart Images
Figure CN224513617U_ABST