一种用于金刚石合成的微波等离子体反应器
By adding branches, cooling components, and pressure relief pipes to the microwave plasma reactor, the problems of uneven airflow, high base temperature, and power outages were solved, improving diamond production efficiency and equipment safety, and achieving economic benefits.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- LUOYANG YUXIN DIAMOND CO LTD
- Filing Date
- 2025-08-22
- Publication Date
- 2026-07-17
AI Technical Summary
Existing microwave plasma chemical vapor deposition technology has problems such as uneven airflow, excessively high substrate temperature, and sudden power outages in diamond production, which affect production efficiency and equipment safety.
Branch lines are added to the main hydrogen and carbon-containing gas pipelines, and cooling components and pressure relief pipes are installed to ensure airflow uniformity and base temperature control, and to release pressure and exhaust gas in emergency situations.
It achieves uniform airflow entry, reduced base temperature, and emergency pressure relief, thereby improving diamond production efficiency and equipment safety, and creating good economic benefits.
Smart Images
Figure CN224513620U_ABST
Abstract
Claims
1. A microwave plasma reactor for diamond synthesis, characterized by: The reaction chamber includes a microwave coupler connected to its top, which is connected to a microwave source. A hydrogen main pipe is connected to the upper left side of the reaction chamber, and a carbon-containing gas main pipe is connected to the upper right side. A pressure relief pipe is connected to the middle right side of the reaction chamber. A base is installed inside the reaction chamber, and a molybdenum support is connected to the top of the base. A plasma sphere is formed above the molybdenum support. A cooling assembly is connected to the bottom of the base, and the cooling assembly is connected to a cooling water inlet pipe and a cooling water outlet pipe. A cooling water pump is connected to the end of the cooling water inlet pipe. A vacuum tube is connected to the bottom right side of the reaction chamber, and a vacuum pump is connected to the vacuum tube.
2. A microwave plasma reactor for diamond synthesis according to claim 1, characterized in that: A dielectric window is provided at the connection between the microwave coupler and the reaction chamber.
3. A microwave plasma reactor for diamond synthesis as claimed in claim 1, wherein: The right side of the main hydrogen pipe is connected to a hydrogen branch pipe, and there are 3 hydrogen branch pipes. The left side of the main carbon gas pipe is connected to a carbon gas branch pipe, and there are 3 carbon gas branch pipes.
4. A microwave plasma reactor for diamond synthesis as claimed in claim 1, wherein: The cooling assembly has a U-shaped tube inside, with its two ends connected to a cooling water inlet pipe and a cooling water outlet pipe, respectively.
5. A microwave plasma reactor for diamond synthesis as claimed in claim 1, wherein: A first self-regulating valve is installed on the cooling water inlet pipe, a cooling water pool is installed on the left side of the cooling water pump, and a pump inlet pipe connects the cooling water pool and the cooling water pump.
6. A microwave plasma reactor for diamond synthesis as claimed in claim 1, wherein: The pressure relief pipe is connected to a pressure relief tank at its end, and a second self-control valve is installed on the pressure relief tank.