气浮组件和外延生长设备

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By designing arc-shaped air channels and inclined air outlets on the air flotation tray, combined with the structure of support columns and bearing plates, the problem of falling debris caused by large-flow gas was solved, achieving the effects of reducing costs and improving the quality of epitaxial growth.

CN224513683UActive Publication Date: 2026-07-17ZHONGHUAN ADVANCED SEMICONDUCTOR TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office: CN · China
Patent Type: Utility models(China)
Current Assignee / Owner: ZHONGHUAN ADVANCED SEMICONDUCTOR TECHNOLOGY CO LTD
Filing Date: 2025-06-23
Publication Date: 2026-07-17

AI Technical Summary

Technical Problem

In existing technologies, high-flow-rate process gas blowing the air-floating tray causes tiny particles and impurities to fall off, affecting the performance and yield of semiconductor devices, increasing production costs and wasting resources.

Method used

A flotation component is designed. By setting a first arc-shaped air channel and an inclined air outlet on the second side of the flotation tray, the direction of gas flow is changed, the amount of gas used is reduced, and the rotational stability of the flotation tray is improved. The structural design of support columns and bearing plates is adopted to reduce friction and falling object defects.

Benefits of technology

Reduce production costs, minimize resource waste, improve the quality and efficiency of semiconductor epitaxial growth, reduce falling object defects, and ensure stable rotation of the air-floating tray.

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Abstract

本申请公开了一种气浮组件和外延生长设备，气浮组件包括：气浮托盘、下半月和支撑柱。气浮托盘用于承载衬底，气浮托盘的第二面设置有第一安装孔；下半月包括承载板，承载板设置于气浮托盘的下方，承载板设置有相互连通的进气孔和第一出气孔；支撑柱的一端与第一安装孔可转动连接，支撑柱的另一端与承载板连接；其中，气浮托盘的第二面还设置有第一弧形气道，第一弧形气道的第一端靠近第一安装孔设置，第一弧形气道的第二端靠近气浮托盘的边缘设置；和 / 或，承载板朝向气浮托盘的一面还设置有第二弧形气道。本申请的气浮组件能够减少气体的使用量，不仅可以降低生产成本，而且还可以减少外延生长过程中因驱动气体导致的掉落物缺陷。

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Claims

1. An air float assembly characterized by, include: An air-floating tray (1) has a first side (11) and a second side (12) opposite to each other. The first side (11) of the air-floating tray (1) is used to support a substrate. The second side (12) of the air-floating tray (1) is provided with a first mounting hole (121). The first mounting hole (121) is located near the center area of the air-floating tray (1). The second half of the month (2) includes a support plate (21), which is located below the air flotation tray (1). The support plate (21) is provided with an air inlet (211) and a first air outlet (212) that are interconnected. The air inlet (211) is used to allow gas to enter and blow it through the first air outlet (212) to the second side (12) of the air flotation tray (1). A support column (3) is provided, one end of which is rotatably connected to the first mounting hole (121), and the other end of which is connected to the bearing plate (21). The second surface (12) of the air flotation tray (1) is further provided with a first arc-shaped air passage (122). The first arc-shaped air passage (122) has a first end (1221) and a second end (1222) opposite to each other. The first end (1221) of the first arc-shaped air passage (122) is located near the first mounting hole (121) along the radial direction of the air flotation tray (1), and the second end (1222) of the first arc-shaped air passage (122) is located near the edge of the air flotation tray (1). The first air outlet (212) is located near the first end (1221) of the first arc-shaped air passage (122); and / or, The side of the support plate (21) facing the air flotation tray (1) is also provided with a second arc-shaped air passage, the shape of which may be the same as or different from that of the first arc-shaped air passage (122).

2. The air float assembly of claim 1, wherein, The depth of the first end (1221) of the first arc-shaped air passage (122) is greater than the depth of the second end (1222) of the first arc-shaped air passage (122), the depth being the vertical distance from the second surface (12) of the air flotation tray (1) to the bottom surface of the first arc-shaped air passage (122); and / or, The width of the first end (1221) of the first arc-shaped airway (122) is smaller than the width of the second end (1222) of the first arc-shaped airway (122), and the width is the dimension of the first arc-shaped airway (122) in the radial direction of the first arc-shaped airway (122).

3. The gas float assembly of claim 1, wherein, The depth of the first arc-shaped air passage (122) is H, which satisfies: 3mm≤H≤7mm. The depth is the vertical distance from the second surface (12) of the air flotation tray (1) to the bottom surface of the first arc-shaped air passage (122).

4. The gas float assembly of claim 1, wherein, The bottom surface of the first arc-shaped air passage (122) has an air resistance structure, which is used to increase the resistance of the gas flowing from the first end (1221) of the first arc-shaped air passage (122) to the second end (1222) of the first arc-shaped air passage (122), so as to increase the thrust of the gas on the air-floating tray (1).

5. The gas float assembly of claim 1, wherein, The number of the first arc-shaped air passages (122) is multiple, and the multiple first arc-shaped air passages (122) are evenly distributed along the circumference of the first mounting hole (121); and / or, There are multiple first air outlets (212), and the multiple first air outlets (212) are evenly distributed along the circumference centered on the first mounting hole (121).

6. The gas float assembly of claim 1, wherein, The support plate (21) has a groove (213) on the side facing the air flotation tray (1). The edge of the air flotation tray (1) is placed in the groove (213). An exhaust channel (214) is provided on the outer periphery of the groove (213). The exhaust channel (214) communicates with the groove (213) and is used to allow the gas to be discharged from the groove (213).

7. The gas float assembly of claim 1, wherein, The first vent (212) is configured as an inclined hole so that the gas flowing out from the first vent (212) can drive the air flotation tray (1) to rotate.

8. The gas float assembly of claim 1, wherein, The support column (3) is provided with through holes (31) extending through both ends. The bearing plate (21) is provided with a second mounting hole (215). A second air outlet (216) is provided in the second mounting hole (215). The second air outlet (216) is connected to the air inlet (211). The end of the support column (3) away from the air flotation tray (1) is inserted into the second mounting hole (215) and fixedly connected to the bearing plate (21). The through hole (31) is used to allow the gas to flow in from the second air outlet (216) and blow onto the second surface (12) of the air flotation tray (1).

9. The gas float assembly of claim 1, wherein, The lower half of the moon (2) also includes a base (22), which is connected to the side of the support plate (21) facing away from the air-floating tray (1). The vertical cross-sectional shape of the base (22) is arc-shaped, and the bending direction of the base (22) is towards the support plate (21).

10. An epitaxial growth apparatus, characterized by comprising: Includes the air flotation assembly as described in any one of claims 1-9.