一种针对低温泵真空腔室的真空密封装置
By connecting a cover to the flange of the vacuum chamber of the cryogenic pump and using a one-way exhaust valve and the vacuum pump to form a negative pressure seal, the problem of impurities entering during storage is solved, ensuring the cleanliness of the vacuum chamber and the adsorption efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HEFEI MAITE NUCLEAR MAGNETIC TECH CO LTD
- Filing Date
- 2025-09-16
- Publication Date
- 2026-07-17
AI Technical Summary
In existing cryogenic pumps, the vacuum chamber cannot effectively prevent the entry of tiny particles and impurity gases during storage, causing the condenser plate to adsorb impurities, which affects the adsorption rate and vacuum effect.
The vacuum chamber is sealed by a flange connection, and a negative pressure is created by a one-way exhaust valve and a vacuum pump to ensure the seal is tight and prevent external impurities from entering. The sealing effect is enhanced by the combination of a sealing ring and an annular groove.
It effectively prevents external microparticles and impurities from entering the vacuum chamber, keeps the condenser plate clean, and improves the vacuum quality of the cryogenic pump during storage.
Smart Images
Figure CN224515331U_ABST
Abstract
Claims
1. A vacuum sealing device for a vacuum chamber of a cryogenic pump, the cryogenic pump comprising a vacuum chamber (1) and a flange (2) arranged at an intake end of the vacuum chamber (1), characterized in that ； The flange (2) is connected to the cover (7) to seal the air inlet end to form the sealed vacuum chamber (1). The vacuum chamber (1) is connected to the vacuum pump (11) through the one-way exhaust valve (3). The vacuum pump (11) can extract the internal gas of the vacuum chamber (1) to form a negative pressure to seal the cover (7) at the air inlet end of the vacuum chamber (1).
2. The vacuum sealing device according to claim 1, characterized in that: The one-way exhaust valve (3) is located at the outlet of the vacuum chamber (1), and the one-way exhaust valve (3) allows the internal gas of the vacuum chamber (1) to flow to the outside through the vacuum pump (11) in one direction.
3. The vacuum sealing apparatus of claim 1, wherein: It also includes a sealing ring (8) connected to the flange (2), the area of the cover (7) is larger than the cross-sectional area of the air inlet end to close the air inlet end, and the sealing ring (8) is disposed between the end faces of the cover (7) and the flange (2) that are in contact with each other.
4. The vacuum sealing device according to claim 3, characterized in that: The end face of the cover (7) or the flange (2) forms an annular groove (9), which is used to place the sealing ring (8). The portion of the sealing ring (8) protruding from the annular groove (9) is squeezed by the end face of the flange (2) or the cover (7).
5. The vacuum sealing apparatus of claim 1, wherein: It also includes a housing (4) that forms the vacuum chamber (1) inside, with the top of the housing (4) forming the air inlet and the bottom of the housing (4) forming the air outlet connected to the one-way exhaust valve (3), which is connected to the vacuum pump (11) via an adapter (10).