一种真空蒸镀设备的密封机构
By introducing support tubes, reinforced flanges, and ball bearings into the vacuum evaporation equipment, the problems of loose sealing seats and lack of support for the output shaft were solved, achieving stable operation of the equipment and maintenance of the vacuum environment, and extending the service life of the sealing components.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU BOKEXI TECH CO LTD
- Filing Date
- 2025-08-04
- Publication Date
- 2026-07-17
AI Technical Summary
The bolts on the flange surface of the magnetohydrodynamic sealing seat in existing vacuum evaporation equipment are prone to loosening due to equipment vibration and temperature changes, leading to the sealing seat falling off. In addition, the output shaft lacks effective support, which affects the stability of the vacuum environment and the life of the sealing components.
A sealing mechanism for a vacuum evaporation equipment was designed, comprising a combination of a support tube, a reinforcing flange, an adjusting screw, and a fixing block. The support tube is bolted to the equipment, and the stability of the support tube is enhanced by ball bearings and anti-slip protrusions. The magnetic fluid sealing seat is reinforced by the cooperation of the adjusting screw and the fixing block to prevent loosening, while the ball bearings reduce friction.
It effectively prevents the sealing seat from loosening and falling off, improves the smoothness of the output shaft operation, extends the life of the sealing components, maintains the stability of the vacuum environment inside the equipment, and ensures the continuity of the vapor deposition process.
Smart Images
Figure CN224515949U_ABST
Abstract
Claims
1. A sealing mechanism of a vacuum evaporation apparatus comprising a magnetic fluid sealing seat (1), characterized in that: The left side of the magnetic fluid sealing seat (1) is movably connected to the output shaft (2), and the right side of the magnetic fluid sealing seat (1) is welded to the support tube (3). The left side of the surface of the support tube (3) is movably fitted with a reinforcing flange (4). The front and rear sides of the inside of the reinforcing flange (4) are provided with grooves (5). The front and rear sides of the reinforcing flange (4) are threadedly connected to the adjusting screw (6). The opposite ends of the adjusting screw (6) are inserted into the inner cavity of the groove (5) and are movably connected to the fixing block (7) through the bearing. The top and bottom of the right side of the reinforcing flange (4) are riveted with support blocks (8). The opposite side of the support block (8) is in contact with the support tube (3). The inner wall of the support tube (3) is inlaid with ball bearings (9).
2. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: The fixed block (7) is provided with anti-slip protrusions (10) on one side opposite to the fixed block (7), and the left side of the front side and the left side of the rear side of the support tube (3) are provided with anti-slip grooves (11) that are compatible with the anti-slip protrusions (10).
3. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: The number of the balls (9) is several, and the surface of the balls (9) is in contact with the output shaft (2).
4. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: The left end of the output shaft (2) is connected to a cooling roller (12) by bolts, and the right end of the output shaft (2) extends through to the right side of the support tube (3).
5. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: The magnetohydrodynamic sealing seat (1) has a first sealing groove (13) on its right side, and a first sealing ring (14) is placed in the inner cavity of the first sealing groove (13).
6. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: A second sealing groove (15) is provided on the left side of the surface of the support tube (3), and a second sealing ring (16) is provided inside the second sealing groove (15).
7. The sealing mechanism of a vacuum deposition apparatus according to claim 1, wherein: The top and bottom of the inner cavity of the groove (5) are provided with guide grooves (17), and the top and bottom of the fixing block (7) are riveted with guide blocks (18). The opposite side of the guide blocks (18) extends into the inner cavity of the guide groove (17).