支撑装置及半导体设备
By using a support device to fix the sensor position in semiconductor equipment, the problem of abnormal alarms caused by changes in the position of the laser sensor is solved, the stability of wafer transmission and the continuity of equipment operation are achieved, and the product yield and efficiency are improved.
CN224516378UActive Publication Date: 2026-07-17SHENZHEN PENGXIN MICRO INTEGRATED CIRCUIT MFG CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN PENGXIN MICRO INTEGRATED CIRCUIT MFG CO LTD
- Filing Date
- 2025-09-09
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In existing technologies, the laser sensor above the vacuum transmission cavity is prone to positional changes, which can lead to changes in the detection distance, trigger abnormal alarms, and affect wafer transmission accuracy and equipment stability.
Method used
A support device is provided, including a base and a support member. The sensor is fixed by connecting the base and the support member to avoid positional changes and ensure the stability and detection accuracy of the sensor.
Benefits of technology
It effectively reduces the frequency of abnormal alarms, ensures the continuity of wafer transfer and process, reduces production interruptions, improves equipment utilization efficiency and product yield, and reduces production costs.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224516378U_ABST
Abstract
一种支撑装置及半导体设备，支撑装置配置为设置于半导体设备内，所述半导体设备包括用于容纳晶圆的腔室和位于所述腔室一侧的传感器，所述传感器用于检测所述腔室内晶圆的位置，包括：基座和支撑件，支撑件具有相对的第一端和第二端；所述支撑件的第一端设置于所述基座上，第二端设有支撑部，所述支撑部用于支撑所述传感器，并对所述传感器的位置进行固定。本申请可避免传感器因位置变动导致检测数据偏离正常阈值，维持传感器对晶圆位置的检测精度并大幅降低异常报警频率。
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