气体控制盘面及多泵一体机
By integrating the gas path components onto the mounting carrier, the problem of inconvenient data observation caused by the scattered placement of instruments in multi-pump integrated units is solved, enabling convenient observation and maintenance of the gas path components and improving maintenance efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI TONGJIA HONGSHENG SEMICONDUCTOR EQUIPMENT CO LTD
- Filing Date
- 2025-09-24
- Publication Date
- 2026-07-17
AI Technical Summary
The instruments and meters of existing multi-pump integrated machines are scattered, which makes data observation inconvenient and maintenance and repair difficult.
By integrating the gas path components of the gas path structure onto a single mounting carrier, the data observation and maintenance of all gas path components can be made more convenient.
It facilitates data observation and maintenance of pneumatic components, improving the maintenance efficiency and maintainability of the multi-pump integrated unit.
Smart Images
Figure CN224516536U_ABST
Abstract
Claims
1. A gas control panel face, characterized by, include: Mounting carrier (1); The gas path structure (2) includes at least one nitrogen gas path structure (21) and at least one compressed air gas path structure (22). Each nitrogen gas path structure (21) and each compressed air gas path structure (22) includes at least two gas path devices, wherein each gas path device is mounted on the mounting carrier (1).
2. The gas panel faceplate of claim 1, wherein, The at least two pneumatic devices are mounted on the same side of the mounting carrier (1).
3. The gas panel faceplate of claim 1, wherein, The at least one nitrogen gas path structure (21) and the at least one compressed air gas path structure (22) are installed on the same side of the mounting carrier (1).
4. The gas control panel according to any one of claims 1 to 3, characterized in that, Each of the aforementioned pneumatic devices includes at least one of a hand valve, a flow sensor (34), a pressure regulating valve, a pressure sensor, a quick-connect fitting (43), a flow switch (311), a mass flow meter (314), and a pneumatic diaphragm valve.
5. The gas control panel according to any one of claims 1 to 3, characterized in that, The nitrogen gas path structure (21) includes a first main pipeline (31), and a flow sensor (34) and a first pressure sensor (36) sequentially disposed on the first main pipeline (31).
6. The gas panel faceplate of claim 5, wherein, The nitrogen gas path structure (21) further includes a first gas source connector (32), a first hand valve (33), a first pressure regulating valve (35), a three-way connector (37), and a first one-to-many connector (38) sequentially disposed on the first main pipeline (31). The flow sensor (34) is located between the first hand valve (33) and the first pressure regulating valve (35), and the first pressure sensor (36) is located between the first pressure regulating valve (35) and the three-way connector (37). The first gas source connector (32) is configured to connect to a nitrogen generator, and the three-way connector (37) is connected to the first branch line. The pipe (39) is connected to a second multi-connector (310), each of the second multi-connector (310) is connected to a flow switch (311), the flow switch (311) is configured to connect to a vacuum pump through a one-way valve (312); each of the first multi-connector (38) is connected to a second branch pipe (313), each of the second branch pipes (313) is sequentially provided with a mass flow meter (314), a first pneumatic diaphragm valve (315) and a first purge connector (316), the first purge connector (316) is configured to connect to the tailpipe of the vacuum pump.
7. The gas control panel according to any one of claims 1 to 3, characterized in that, The nitrogen gas path structure (21) includes a second main pipeline (41), which includes an inlet section and a drive section that are interconnected. The inlet section is located on the second side of the mounting carrier (1), and the drive section is located on the first side of the mounting carrier (1). The end of the inlet section away from the drive section is connected to a second gas source connector, which is configured to connect to a nitrogen generator.
8. The gas panel according to claim 7, wherein The drive section is provided with a drive connector (42), a quick-connect connector (43), a third one-to-many connector (44), and a diaphragm valve island (45) in sequence. The quick-connect connector (43) is configured to connect to the gate valve of the vacuum pump, and the diaphragm valve island (45) is used to drive the pneumatic diaphragm valve to operate.
9. The gas control panel according to any one of claims 1 to 3, characterized in that, The compressed air circuit structure (22) includes a third main pipeline (51), and a third air source connector (52), a second hand valve (53), a second pressure regulating valve (54), a second pressure sensor (55), a second pneumatic diaphragm valve (56), and a second purge connector (57) sequentially disposed on the third main pipeline (51). The third air source connector (52) is configured to connect to a compressed air generator, and the second purge connector (57) is configured to connect to an air amplifier.
10. A multi-pump integrated machine, characterized by, Includes the gas control panel as described in any one of claims 1 to 9.