一种排汽装置以及真空干燥薄膜设备
By simultaneously filling the vacuum drying film equipment with inert gas and utilizing the conical protrusion at the end of the gas filling pipe and multiple gas filling hole arrays, the problems of solvent vapor retention and natural convection retention of vapor in the high vacuum stage are solved, achieving efficient vapor discharge and stable airflow in the chamber, which is suitable for parallel processing of multiple substrates and small equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DEHU COATING EQUIP (SUZHOU) CO LTD
- Filing Date
- 2025-07-28
- Publication Date
- 2026-07-17
AI Technical Summary
During the evacuation stage of the vacuum drying film equipment, the solvent vapor cannot diffuse and be discharged sufficiently, resulting in stagnation. Furthermore, when the pressure gradient disappears in the high vacuum stage, the vapor naturally convects and stagnates, migrating slowly to the evacuation port.
Inert gas is simultaneously introduced during vacuuming to maintain the vacuum chamber pressure at around 100 Pa. By setting a conical protrusion at the end of the gas filling pipe and an array of multiple gas filling holes, the laminar vapor boundary layer is broken, turbulent mixing is enhanced, and inert gas is ensured to uniformly cover the chamber.
It accelerates steam discharge, avoids steam stagnation, ensures stable airflow in the chamber, avoids turbulence, improves drying efficiency, and prevents steam liquefaction. It is suitable for large or small vacuum drying equipment.
Smart Images
Figure CN224517166U_ABST