一种新型多烘箱手套箱
By integrating the oven, glove box body, and transition chamber into a multi-oven glove box, the problems of sample transfer contamination and low efficiency in traditional ovens are solved, achieving efficient and reliable chip packaging processing, which is suitable for the production of high-density integrated chips.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 中科光智(重庆)科技有限公司
- Filing Date
- 2025-08-28
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional ovens have problems such as the need for sample transfer to be exposed to the atmosphere, leading to water and oxygen pollution; the need for transfer between multiple devices, which exacerbates cross-contamination; and the limitation of efficiency due to the single process.
Design a multi-oven glove box that integrates an oven, a glove box body, and a transition chamber. Sample processing is performed in a sealed environment through a vacuum system, including vacuuming, heating and baking, and vacuum breaking operations, ensuring that the sample is not exposed to the atmosphere throughout the process. Seamless sample transfer and parallel processing of multiple processes are achieved through a controller and vacuum pump system.
This technology enables the entire sample processing to be carried out in a closed environment, avoiding water and oxygen pollution, reducing cross-contamination, improving packaging reliability and production efficiency, supporting the demand for high-density chip packaging, and reducing equipment investment and maintenance costs.
Smart Images
Figure CN224517192U_ABST
Abstract
Claims
1. A new multi-oven glovebox comprising a glovebox body (1), characterized in that, It also includes an oven (2) and a transition chamber (3). The glove box body (1) is connected to the oven (2) and the transition chamber (3) through the inner door (4) of the oven and the inner door (6) of the transition chamber. The inner door (4) of the oven and the inner door (6) of the transition chamber are both located inside the glove box body (1). The oven (2) and the transition chamber (3) are respectively provided with an outer door (5) of the oven and an outer door (17) of the transition chamber. The oven (2) and the transition chamber (3) are respectively connected to a vacuum system (7).
2. A novel multi-oven glove box as claimed in claim 1, wherein: The two vacuum systems (7) include a vacuum pump (8) and a baffle valve (9). The two vacuum pumps (8) are connected to the oven (2) and the transition chamber (3) respectively through a vacuum pipeline (20). The vacuum pipeline (20) is equipped with a baffle valve (9) and also includes a controller. The controller is electrically connected to the two baffle valves (9) respectively.
3. A novel multi-oven glove box as claimed in claim 1, wherein: The glove box body (1) is equipped with a pressure sensor (10) electrically connected to the controller. The pressure sensor (10) is used to detect the pressure inside the glove box body (1).
4. A novel multi-oven glove box as claimed in claim 1, wherein: The oven (2) is equipped with a vacuum gauge (11), which is electrically connected to the controller.
5. A novel multi-oven glove box as claimed in claim 1, wherein: The transition chamber (3) is equipped with a cylinder (12) that is electrically connected to the controller, and the piston rod of the cylinder (12) is fixedly connected to the inner door of the transition chamber (3).
6. A novel multi-oven glove box as claimed in claim 1, wherein: The oven (2) is equipped with a temperature controller (13) that is electrically connected to the controller.
7. A novel multi-oven glove box as claimed in claim 1, wherein: The oven (2) is provided in three parts, and each of the three ovens (2) has a multi-layer heating plate (14) built in. The three ovens (2) are located on the rear side of the glove box body (1) and connected by a flange.
8. A novel multi-oven glove box as claimed in claim 1, wherein: The glove box body (1) is equipped with a purification system. The purification system includes a water analysis instrument (15) and a water oxygen analysis instrument (16) installed in the glove box body (1). The purification system also includes a nitrogen inlet device that is connected to the glove box body (1). The nitrogen inlet device, the water analysis instrument (15) and the water oxygen analysis instrument (16) are all electrically connected to the controller.