一种硅片烘干系统
CN224517281UActive Publication Date: 2026-07-17JIANGSU VISTAR EQUIPMENT TECHNOLOGY CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU VISTAR EQUIPMENT TECHNOLOGY CO LTD
- Filing Date
- 2025-08-05
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
How can the drying efficiency of existing silicon wafer drying systems be improved while ensuring performance and reliability?
Method used
A silicon wafer drying system is adopted, which includes a reciprocating conveyor and a shifting device. The reciprocating conveyor simultaneously transports the material during the drying process. Combined with the coordinated work of multiple drying chambers and the shifting device, the conveying efficiency and drying efficiency of the flower basket are improved.
Benefits of technology
It improves the drying efficiency of silicon wafers, reduces heat loss from the drying chamber, shortens drying time, and enhances overall operating efficiency and system miniaturization.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224517281U_ABST
Abstract
本申请涉及一种硅片烘干系统，包括：烘干区，包括至少一个烘干腔室，上料工位；下料工位；往复输送装置，设有多个花篮载台；往复输送装置处于第一状态时，上料工位和烘干腔室内均具有花篮载台；往复输送装置可运行使花篮载台沿第一方向移动，输送上料工位的花篮载台至烘干腔室，输送烘干腔室中的花篮载台至下游烘干腔室或下料工位，以使往复输送装置由第一状态切换至第二状态；往复输送装置可运行使花篮载台反向移动，以使往复输送装置由第二状态切换至第一状态；以及第一移位装置，用以驱动烘干腔室内的花篮离开花篮载台；还用以驱动烘干腔室内的花篮移动至同一烘干腔室内的花篮载台。
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