一种高温石墨化炉注气系统装置
By designing a gas injection system in a vertical high-temperature graphitization furnace, a special gas is injected into the graphite crucible to dilute and remove volatile gases, thus solving the problem of residual gas in the graphite crucible, improving the purity of the material, and meeting the high-temperature processing requirements of high-purity materials.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHUZHOU NUOTIAN ELECTRIC HEATING TECH CO LTD
- Filing Date
- 2025-08-26
- Publication Date
- 2026-07-17
AI Technical Summary
During operation, the volatile gases inside the graphite crucible in the vertical high-temperature graphitization furnace cannot be effectively treated, affecting the purity of the purification process. Especially in the high-temperature processing of materials such as high-purity silicon and silicon carbide, existing technologies make it difficult to introduce gas into the graphite crucible from the side or bottom, resulting in residual volatile gases and affecting the purity of the materials.
A high-temperature graphitization furnace gas injection system was designed, including an external pipeline assembly, an insulated pipeline assembly, a quick-change pipeline assembly, and a graphite crucible gas injection assembly. Special gases are injected into the graphite crucible through a vertical graphite gas inlet pipe and a gas inlet dispersion plate. The detachable pipeline system enables gas to be delivered from the top into the graphite crucible, diluting volatile gases and carrying them out through the airflow.
It effectively dilutes and removes volatile gaseous substances in the graphite crucible, improves the purification cleanliness, realizes gas purification in the high-temperature processing, meets the cleanliness requirements of high-purity materials, and enhances the purity of the materials.
Smart Images
Figure CN224517367U_ABST
Abstract
Claims
1. A high temperature graphitization furnace gas injection system apparatus, characterized by: The gas injection system includes an external pipeline assembly, an insulated pipeline assembly, a quick-change pipeline assembly, and a graphite crucible gas injection assembly. The external pipeline assembly is connected to the insulated pipeline assembly, the insulated pipeline assembly is connected to the quick-change pipeline assembly, and the quick-change pipeline assembly is connected to the graphite crucible gas injection assembly. The gas injection system consists of the external pipeline assembly, the insulated pipeline assembly, the quick-change pipeline assembly, and the graphite crucible gas injection assembly. Special gases are injected into the high-temperature graphitization furnace through the gas injection system.
2. The high-temperature graphitization furnace gas injection system device according to claim 1, characterized in that: The graphite crucible gas injection assembly includes a vertical graphite gas inlet pipe and a gas inlet dispersion plate. An inner cover gas inlet hole is opened on the inner cover of the graphite crucible. The vertical graphite gas inlet pipe passes through the inner cover gas inlet hole on the inner cover of the graphite crucible and connects to the gas inlet dispersion plate. The gas inlet dispersion plate is installed at the bottom of the graphite crucible chamber. A dispersion plate gas inlet hole is provided on the upper surface of the gas inlet dispersion plate. The special gas injected from the vertical graphite gas inlet pipe enters the gas inlet dispersion plate through the dispersion plate gas inlet hole and then diffuses into the graphite crucible chamber through the gas inlet dispersion plate.
3. The high temperature graphitization furnace gas injection system apparatus of claim 2, wherein: The gas inlet dispersion plate has a flat structure, and its shape matches the inner cavity of the graphite crucible. The gas inlet dispersion plate is installed at the bottom of the inner cavity of the graphite crucible. A dispersion plate inlet hole is provided on the upper surface of the dispersion plate. The dispersion plate inlet hole is threaded to the lower end of the vertical graphite inlet pipe and locked by a lock nut after connection. The dispersion plate inlet hole is a through hole that extends to the bottom surface of the dispersion plate and connects to a bottom inlet channel leading to the gas inlet diffusion cavity in the middle of the bottom surface of the dispersion plate. The gas inlet diffusion cavity in the middle of the bottom surface of the dispersion plate is provided with multiple radially arranged diffusion channels. In the upper part of the dispersion plate body of each channel, there are multiple upward penetrating gas diffusion holes. The special gas entering from the dispersion plate inlet hole enters the gas inlet diffusion cavity in the middle of the bottom surface of the dispersion plate through the bottom inlet channel, and then is blown upward into the inner cavity of the graphite crucible through the gas diffusion holes of the multiple diffusion channels.
4. The high temperature graphitization furnace gas injection system apparatus of claim 3, wherein: On the upper surface of the multiple gas diffusion holes on each diffusion channel, there is a connecting vent groove. The vent groove is a long strip with a circular arc cross-section. The vent groove connects the multiple gas diffusion holes on the same diffusion channel to form a venting zone. The special gas enters the vent groove through the gas diffusion holes, and then diffuses upward around the boat in the graphite crucible through the vent groove.
5. The high temperature graphitization furnace gas injection system apparatus of claim 2, wherein: The quick-change pipeline assembly includes a detachable horizontal connecting pipe and two detachable pipe joints. The two detachable pipe joints are respectively connected to both ends of the detachable horizontal connecting pipe, and each has a tapered through hole on the same surface. The middle side of the tapered through hole is connected to the side connecting pipe of the detachable horizontal connecting pipe, forming a "Π"-shaped air passage. The two detachable pipe joints are inserted into the tapered through holes of the graphite crucible gas injection assembly and the second vertical graphite gas injection pipe of the insulating pipeline assembly by means of insertion and removal, so that the side air inlets of the vertical graphite gas injection assembly and the second vertical graphite gas injection pipe of the insulating pipeline assembly are connected to the detachable horizontal connecting pipe.
6. The high temperature graphitization furnace gas injection system apparatus of claim 5, wherein: The tapered through-hole of the detachable pipe connector is taperedly fitted with the vertical graphite inlet pipe of the graphite crucible gas injection assembly and the second vertical graphite inlet pipe of the insulating pipeline assembly. During assembly, the vertical graphite inlet pipe of the graphite crucible gas injection assembly and the second vertical graphite inlet pipe of the insulating pipeline assembly both pass through the tapered through-hole of the detachable pipe connector and are locked and positioned at the top by a lock nut. During disassembly, the process is reversed: first loosen the lock nut, then pull the detachable horizontal connecting pipe and the detachable pipe connectors at both ends upwards, so that the tapered through-hole of the detachable pipe connector separates from the vertical graphite inlet pipe of the graphite crucible gas injection assembly and the second vertical graphite inlet pipe of the insulating pipeline assembly. Then, open the inner cover of the graphite crucible to remove the purified material.
7. The high temperature graphitization furnace gas injection system apparatus of claim 2, wherein: The insulating pipeline assembly includes an insulating sleeve and a second vertical graphite inlet pipe. The insulating sleeve is a sleeve with an inner blind hole in the middle. The insulating sleeve is clamped to the side of the shell of the vertical high-temperature graphitization furnace, forming an insulating isolation between the inlet pipe and the shell of the vertical high-temperature graphitization furnace. The blind hole end of the insulating sleeve is located on the inner surface of the shell of the vertical high-temperature graphitization furnace. A platform is provided on the outer surface of the inner end of the insulating sleeve. An insulating sleeve screw hole is opened on the platform. The insulating sleeve screw hole communicates with the inner blind hole of the insulating sleeve. The second vertical graphite inlet pipe is installed on the insulating sleeve screw hole and locked by a lock nut. The end of the insulating sleeve located outside the shell of the vertical high-temperature graphitization furnace is connected to the stainless steel bend of the furnace external pipeline assembly through a flange.
8. The high-temperature graphitization furnace gas injection system device according to claim 2, characterized in that: The external pipeline assembly includes a stainless steel bend, an electromagnetic control valve, and an external air inlet pipe section. One end of the stainless steel bend is connected to the insulating sleeve of the insulated pipeline assembly via a flange, and the other end is also connected to the electromagnetic control valve via a flange, through which the air intake is controlled. The other end of the electromagnetic control valve is connected to the external air inlet pipe section via a flange, and the external air inlet pipe section is connected to a special gas supply device, which provides prepared special gas.