A roughness detection device and system

Abstract

This invention discloses a roughness detection device and system. The roughness detection device includes: a detection and processing device, a moving stage, and an optical path device. The moving stage is coupled to the detection and processing device and is used to carry the sample to be tested. The moving stage moves under the control of the detection and processing device. The optical path device includes a multi-wavelength light source assembly and an objective lens. The multi-wavelength light source assembly is used to emit laser beams of at least two wavelengths in parallel. The objective lens is disposed on the output optical path of the multi-wavelength light source assembly and is used to focus the laser beams of each wavelength onto the surface of the sample to be tested. The roughness data includes the roughness at various locations on the surface of the sample to be tested. This invention enables rapid and accurate roughness detection of the surface of the sample to be tested without damaging the sample surface.

Description

Technical Field

[0001] This utility model relates to the field of optical component testing technology, and in particular to a roughness testing device and system. Background Technology

[0002] Existing instruments for inspecting the roughness of the back side of wafer substrates have several limitations. For example, while contact profilometers are low-cost, their contact-based nature requires the probe to traverse the sample surface, which can easily scratch the sample, and their slow speed makes them unsuitable for high-efficiency production. White light interferometry is sensitive to surface reflection and is unsuitable for some polished wafers, easily introducing human error and affecting the accuracy of the results. These instruments struggle to accurately assess the actual quality of the wafer surface, hindering the optimization and improvement of subsequent processes. Furthermore, existing inspection methods still have room for improvement in calculating the goodness of fit, impacting both efficiency and accuracy. There is also room for improvement in data analysis and processing, further affecting the accurate assessment of the roughness of the back side of wafer substrates.

[0003] In view of this, it is necessary to improve the existing inspection instruments used to detect the roughness of the back side of a wafer substrate in order to solve the above problems.

[0004] It should be noted that the above description of the background technology is only for the purpose of providing a clear and complete explanation of the technical solution of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background technology section of this utility model. Utility Model Content

[0005] The purpose of this invention is to reveal the problems of existing testing instruments, such as easily scratching the sample surface, slow testing speed, and large errors.

[0006] To achieve the above objectives, this utility model provides a roughness detection device, comprising:

[0007] Detection and processing equipment;

[0008] A mobile stage, coupled to the detection and processing equipment, is used to carry the sample to be tested, and moves under the control of the detection and processing equipment;

[0009] An optical path device, comprising a multi-wavelength light source assembly and an objective lens, wherein the multi-wavelength light source assembly is used to emit laser beams of at least two wavelengths in parallel; the objective lens is disposed in the output optical path of the multi-wavelength light source assembly and is used to focus the laser beams of each wavelength onto the surface of the sample to be tested.

[0010] The detection and processing equipment is used to collect and process at least two wavelengths of reflected laser beams reflected from the surface of the sample to be tested to obtain actual roughness data; the laser beams correspond one-to-one with the reflected laser beams, and the roughness data includes the roughness of each position on the surface of the sample to be tested.

[0011] As a further improvement to this utility model,

[0012] The optical path device further includes a first beam guiding component, which is disposed on the output optical path of the multi-wavelength light source component. The total coverage of the laser beam transmitted from the first beam guiding component is smaller than the total coverage of the laser beams emitted by all the multi-wavelength light source components.

[0013] As a further improvement of this utility model, the multi-wavelength light source assembly includes a multi-wavelength light source, the multi-wavelength light source including a first laser to a third laser arranged sequentially along a set horizontal direction, and the first beam guiding assembly includes:

[0014] A first reflecting mirror is disposed in the output light path of the first laser;

[0015] The second reflector is disposed on the reflected light path of the first reflector;

[0016] The third reflector is disposed in the output optical path of the third laser.

[0017] The fourth reflecting mirror is disposed in the reflected light path of the third reflecting mirror;

[0018] The first reflector, the second reflector, the fourth reflector, and the third reflector are arranged sequentially along the predetermined horizontal direction, and the laser beam emitted by the second laser passes between the second reflector and the fourth reflector and enters the objective lens.

[0019] As a further improvement of this utility model, the detection and processing device includes a processor and at least two detectors coupled to the processor, wherein each detector corresponds to a laser beam.

[0020] The detector is used to collect reflected laser beams of various wavelengths to obtain optical signals;

[0021] The processor is used to convert the optical signal corresponding to each laser beam into a corresponding digital signal; process the digital signal corresponding to each laser beam to obtain at least two roughness data; and perform weighted summation on the roughness at the same position in all the roughness data to obtain the actual roughness data.

[0022] As a further improvement of this utility model, the numerical aperture of the objective lens is greater than or equal to 1.4;

[0023] The objective lens includes: a dynamic focusing lens, a static optical lens, an aberration correction lens group, a stray light suppression device, and a chromatic aberration compensation lens group, which are sequentially arranged in the output optical path of the multi-wavelength light source assembly.

[0024] As a further improvement to this utility model,

[0025] The dynamic focusing lens is coupled to the detection and processing device, which is used to adjust the focal length of the dynamic focusing lens. The dynamic focusing lens is a liquid lens with positive optical power, and the image-side surface of the liquid lens is concave and the object-side surface is convex.

[0026] The static optical lens is a biconvex lens with positive optical power;

[0027] The aberration correction lens group is cemented together from the image side by a calcium fluoride lens with negative optical power and a quartz lens with positive optical power, arranged sequentially from the image side. The image side surface of the aberration correction lens group is concave and the object side surface is convex.

[0028] The stray light suppression device is an aperture;

[0029] The chromatic aberration compensation lens assembly is composed of low-dispersion glass, medium-dispersion liquid, and high-dispersion peel-bonded material arranged sequentially from the image side.

[0030] As a further improvement to this utility model,

[0031] The optical path device further includes a second beam guiding component, which is disposed in the output optical path of the first beam guiding component and the output optical path of the reflected laser beam emitted from the objective lens, for transmitting all the laser beams to the objective lens and reflecting the reflected laser beams to the detector.

[0032] As a further improvement of this utility model, the multi-wavelength light source assembly includes: a multi-wavelength light source and a collimation assembly disposed on the outgoing optical path of the multi-wavelength light source. The collimation assembly is used to collimate the laser beams of each wavelength emitted by the multi-wavelength light source so that the laser beams of each wavelength are parallel.

[0033] The optical path device further includes: a light intensity control component disposed on the output optical path of the collimation component and a beam purification component disposed on the output optical path of the light intensity control component. The light intensity control component includes at least two apertures arranged sequentially along a set horizontal direction, each aperture corresponding to a laser beam, and the apertures are used to adjust the power of the laser beams of each wavelength. The beam purification component includes at least two filters arranged sequentially along a set horizontal direction, each filter corresponding to a laser beam, and the filters are used to filter out stray light from the laser beams of each wavelength emitted from the light intensity control component.

[0034] Based on the same design concept, this utility model also discloses a roughness detection system, comprising:

[0035] The roughness detection device according to any one of the preceding inventions;

[0036] A support platform is used to support the movable stage in the roughness detection device.

[0037] As a further improvement of this utility model, the roughness detection system further includes:

[0038] The bracket is fixed to the load support platform;

[0039] A position adjustment device is provided, which is movably connected to the support and fixedly connected to the optical path device in the roughness detection device. The position adjustment device is coupled to the detection and processing device and is used to move vertically under the control of the detection and processing device to adjust the vertical distance between the optical path device and the sample to be tested.

[0040] Compared with the prior art, the beneficial effects of this utility model are:

[0041] In this invention, the roughness detection device includes: a detection and processing device, a moving stage, and an optical path device. The moving stage is coupled to the detection and processing device, and is used to carry the sample to be tested. The moving stage moves under the control of the detection and processing device. The optical path device includes a multi-wavelength light source assembly and an objective lens. The multi-wavelength light source assembly is used to emit laser beams of at least two wavelengths in parallel. The objective lens is disposed on the output optical path of the multi-wavelength light source assembly and is used to focus the laser beams of each wavelength onto the surface of the sample to be tested. The detection and processing device is used to collect and process the reflected laser beams of at least two wavelengths reflected from the surface of the sample to obtain actual roughness data. The laser beams and reflected laser beams correspond one-to-one, and the roughness data includes the roughness at various locations on the surface of the sample to be tested. By combining laser beams of different wavelengths to detect the surface roughness of the sample to be tested, the influence of differences in the reflectivity of laser beams on samples of different materials is eliminated, enabling the device to be applied to the detection of samples of different materials and expanding its application range. Furthermore, during the testing process, the objective lens and the moving stage work together to achieve automatic focusing, focusing laser beams of various wavelengths onto the surface of the sample under test. This ensures that the detection point (i.e., the current detection position on the surface of the sample) is always located at the focal plane of the objective lens, thereby improving detection accuracy and solving the problems of sensitivity to surface reflection and susceptibility to human error inherent in existing testing instruments. Simultaneously, the objective lens employs a non-contact testing method to measure the surface roughness of the sample, not only addressing the issue of potential surface damage in existing instruments but also increasing testing speed to meet the demands of high-efficiency production. Attached Figure Description

[0042] Figure 1 This is a topology diagram of a roughness detection system shown in this utility model;

[0043] Figure 2 This is a partial topological diagram of a roughness detection device shown in this utility model;

[0044] Figure 3 This is a topological diagram of an objective lens shown in this utility model;

[0045] Figure 4 This is a surface scattering distribution diagram for roughness detection using a traditional white light interferometer.

[0046] Figure 5 The surface scattering distribution diagram is used for roughness detection by the detection device of this utility model. Detailed Implementation

[0047] The present utility model will be described in detail below in conjunction with the embodiments shown in the accompanying drawings. It should be noted that these embodiments are not limitations on the present utility model, and any equivalent transformation or substitution in terms of function, method, or structure made by those of ordinary skill in the art based on these embodiments shall fall within the protection scope of the present utility model.

[0048] It should be understood that in the present utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These are only for the convenience of describing the technical solution and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the technical solution.

[0049] Please refer to Figures 1 to 5 As shown, a specific embodiment of a roughness detection device 100 is shown in the present utility model. The roughness detection device 100 is used to detect the surface roughness of a sample to be measured 200. In particular, it can quickly and accurately detect the surface roughness of the sample to be measured 200 without damaging the surface of the sample to be measured 200, solving the problems of existing detection instruments such as being prone to scratching the sample surface, slow detection speed, and large errors, thereby providing reliable data support for quality control and process improvement in the semiconductor manufacturing process, and further improving the device yield and production efficiency.

[0050] Refer to Figure 1 As shown, the roughness detection device 100 includes: a detection and processing device 10, a moving stage 20, and an optical path device 30. The moving stage 20 is coupled to the detection and processing device 10. The moving stage 20 is used to carry the sample to be measured 200, and the moving stage 20 moves under the control of the detection and processing device 10. The optical path device 30 includes a multi-wavelength light source component 31 and an objective lens 32. The multi-wavelength light source component 31 is used to emit laser beams of at least two wavelengths in parallel; the objective lens 32 is disposed on the outgoing optical path of the multi-wavelength light source component 31, and the objective lens 32 is used to focus the laser beams of each wavelength onto the surface of the sample to be measured 200 respectively. The detection and processing device 10 is used to collect and process at least two wavelengths of reflected laser beams reflected from the surface of the sample to be measured 200 to obtain actual roughness data. Among them, the laser beams and the reflected laser beams correspond one by one, and the roughness data includes the roughness of each position on the surface of the sample to be measured 200.

[0051] Based on this, in specific implementation, the roughness detection device 100 places the sample 200 to be tested on the moving stage 20, and the detection processing device 10 sends a movement signal to the moving stage 20 to move the moving stage 20, thereby adjusting the horizontal position of the sample 200 to allow each wavelength of laser beam to scan different positions on the surface of the sample 200. A multi-wavelength light source assembly 31 emits at least two wavelengths of laser beams in parallel, and an objective lens 32 focuses each wavelength of laser beam onto the surface of the sample 200. The detection processing device 10 collects and processes the reflected laser beams of at least two wavelengths from the surface of the sample 200 to obtain the actual roughness data.

[0052] The roughness detection device 100 shown in this invention combines laser beams of different wavelengths to detect the surface roughness of the sample 200 under test, eliminating the influence of differences in the reflectivity of laser beams on different materials of the sample 200. This allows it to be applied to the detection of samples 200 made of different materials, expanding its application range. Furthermore, during the detection process, the objective lens 32 and the moving stage 20 work together to achieve automatic focusing, focusing the laser beams of each wavelength onto the surface of the sample 200 under test. This ensures that the detection point (i.e., the current detection position on the surface of the sample 200) is always located at the focal plane of the objective lens 32, thereby improving detection accuracy. This solves the problems of sensitivity to surface reflection and susceptibility to human error inherent in existing detection instruments. Simultaneously, the objective lens 32 uses a non-contact detection method to detect the surface roughness of the sample 200, not only solving the problem of easily damaging the sample surface in existing detection instruments but also increasing the detection speed, meeting the needs of high-efficiency production.

[0053] In addition, the cooperation between the multi-wavelength light source assembly 31 and the objective lens 32 achieves a longitudinal resolution of 0.5μm, significantly improving the detection speed and overcoming the problem of insufficient resolution in the roughness range of 0.5-1.5μm in existing detection methods (such as laser scattering method), thus meeting the requirements of high-precision detection.

[0054] In particular, the roughness detection device 100 provided by this utility model is suitable for wafer detection of various materials such as silicon (Si), silicon carbide (SiC), and silicon nitride (SiN), and has wide applicability. It can overcome the problem of poor adaptability of existing detection instruments to test samples 200 of different materials.

[0055] It should be noted that the laser beam with at least two wavelengths includes two or more types. This embodiment does not specifically limit this, and the following description uses the laser beam with at least two wavelengths, including the laser beam with three wavelengths, as an example. However, this should not limit the scope of protection of this utility model.

[0056] In one implementation, the reference Figure 2 As shown, the multi-wavelength light source assembly 31 includes a multi-wavelength light source 311 and a collimating assembly 312 disposed on the output optical path of the multi-wavelength light source 311. The multi-wavelength light source 311 includes a first laser 3111 to a third laser 3113 arranged sequentially along a predetermined horizontal direction. The collimating assembly 312 is used to collimate the laser beams of each wavelength emitted by the multi-wavelength light source assembly 31, so that the laser beams of each wavelength are parallel.

[0057] The laser beams of at least two wavelengths include a first laser beam 201 to a third laser beam 203, that is, the first laser beam 201 is emitted by a first laser 3111, the second laser beam 202 is emitted by a second laser 3112, and the third laser beam 203 is emitted by a third laser 3113. The wavelength of the first laser beam 201 is a first predetermined wavelength, the wavelength of the second laser beam 202 is a second predetermined wavelength, and the wavelength of the third laser beam 203 is a third predetermined wavelength.

[0058] Furthermore, the first set wavelength is smaller than the second set wavelength, and the second set wavelength is smaller than the third set wavelength.

[0059] Furthermore, the weighting coefficient for the roughness data corresponding to the first set wavelength is less than the weighting coefficient for the roughness data corresponding to the second set wavelength, and the weighting coefficient for the roughness data corresponding to the second set wavelength is less than the weighting coefficient for the roughness data corresponding to the third set wavelength. By assigning different weighting coefficients to the roughness corresponding to laser beams of different wavelengths, and adjusting the weighting coefficients according to the different materials of the test sample 200, the advantages of different wavelength laser beams are combined to more comprehensively reflect the surface roughness of the test sample 200.

[0060] Furthermore, the first set wavelength is located within a first wavelength range, the second set wavelength is located within a second wavelength range, and the third set wavelength is located within a third wavelength range, and the first, second, and third wavelength ranges do not overlap. Specifically, the first wavelength range is 200-405nm, the second wavelength range is 495-560nm, and the third wavelength range is 620-650nm. In short, the first wavelength range is ultraviolet laser, the second wavelength range is green laser, and the third wavelength range is red laser. Ultraviolet laser is suitable for roughness detection of the test sample 200 of high reflectivity material, red laser is suitable for roughness detection of the test sample 200 of low reflectivity material, and green laser can be used as the main light source for roughness detection of the test sample 200 of medium reflectivity material. Therefore, in this invention, by using laser beams of specific wavelengths and assigning them specific detection roles, the reflectivity characteristics of different materials are addressed, and the actual roughness data is ultimately calculated to improve the robustness and accuracy of the detection.

[0061] Furthermore, at least a portion of the surface of the sample 200 has a reflectivity to the second laser beam 202 that is greater than the reflectivity of the corresponding position of the sample 200 to the first laser beam 201, and at least a portion of the surface of the sample 200 has a reflectivity to the third laser beam 203 that is greater than the reflectivity of the corresponding position of the sample 200 to the second laser beam 202.

[0062] It should be noted that the surface roughness of the sample 200 is detected by using three different wavelength laser beams. Different wavelength laser beams are suitable for sample 200 made of different materials, so that the roughness detection device 100 can adapt to the surface reflection characteristics of sample 200 made of different materials, realize multi-spectral fusion, and eliminate the influence of material reflectivity differences.

[0063] In one implementation, such as Figure 1 As shown, the roughness testing device 100 also includes a tube 40. For example... Figure 2 As shown, the optical path device 30 further includes: a light intensity control component 33 disposed on the output optical path of the collimation component 312, and a beam purification component 34 disposed on the output optical path of the light intensity control component 33. Both the light intensity control component 33 and the beam purification component 34 are disposed inside the tube 40. The light intensity control component 33 is used to adjust the power of the laser beams of each wavelength, and the beam purification component 34 is used to filter out stray light from the laser beams of each wavelength emitted from the light intensity control component 33.

[0064] Furthermore, the light intensity control component 33 includes at least two apertures arranged sequentially along a predetermined horizontal direction. For example, as... Figure 2 As shown, the light intensity control component 33 includes a first aperture 331, a second aperture 332, and a third aperture 333. Each aperture corresponds to a laser beam. The aperture is used to adjust the power of the laser beam at each wavelength, optimize the spot size to a Gaussian shape, and expand the beam by combining the spot size of the laser beam and the entrance pupil diameter of the objective lens 32, thereby adjusting the light transmission energy of the laser beam.

[0065] Furthermore, the beam purification assembly 34 includes at least two filters arranged sequentially along a predetermined horizontal direction. For example, such as... Figure 2 As shown, the beam purification assembly 34 includes a first filter 341, a second filter 342, and a third filter 343. Each filter corresponds to a laser beam, and the filters are used to filter out stray light (such as high-frequency noise in the laser beam) from each wavelength of the laser beam emitted from the beam intensity control assembly 33.

[0066] Taking three laser beams of different wavelengths (i.e., the first laser beam 201 to the third laser beam 203) as an example, the aperture includes the first aperture 331 to the third aperture 333, and the filter includes the first filter 341 to the third filter 343. The first laser beam 201 passes through the first aperture 331 and the first filter 341 in sequence, the second laser beam 202 passes through the second aperture 332 and the second filter 342 in sequence, and the third laser beam 203 passes through the third aperture 333 and the third filter 343 in sequence.

[0067] In one implementation, such as Figure 1 As shown, the roughness detection device 100 also includes a protective housing 50. For example... Figure 2 As shown, the optical path device 30 also includes a first beam guiding component 35, which is disposed within the protective housing 50. The first beam guiding component 35 is disposed on the output optical path of the multi-wavelength light source component 31. The total coverage of the laser beam transmitted from the first beam guiding component 35 is smaller than the total coverage of the laser beams emitted by all the multi-wavelength light source components 31, thereby reducing the optical path volume.

[0068] Furthermore, such as Figure 2 As shown, the first beam guiding assembly 35 includes a first reflector 351, a second reflector 352, a third reflector 353, and a fourth reflector 354. The first reflector 351 is disposed in the output light path of the first laser 3111, the second reflector 352 is disposed in the output light path of the first reflector 351, the third reflector 353 is disposed in the output light path of the third laser 3113, and the fourth reflector 354 is disposed in the output light path of the third reflector 353.

[0069] The first reflector 351, the second reflector 352, the fourth reflector 354 and the third reflector 353 are arranged sequentially along a set horizontal direction, and the laser beam emitted by the second laser 3112 passes through the second reflector 352 and the fourth reflector 354 and enters the objective lens 32.

[0070] It should be noted that the first laser beam 201 emitted from the first laser 3111 passes sequentially through the first reflecting mirror 351, the second reflecting mirror 352, and the objective lens 32 to reach the surface of the sample 200 under test; the second laser beam 202 emitted from the second laser 3112 passes through the gap between the second reflecting mirror 352 and the fourth reflecting mirror 354, and passes through the objective lens 32 to reach the surface of the sample 200 under test; the third laser beam 203 emitted from the third laser 3113 passes sequentially through the third reflecting mirror 353, the fourth reflecting mirror 354, and the objective lens 32 to reach the surface of the sample 200 under test. Thus, the first laser beam 201 to the third laser beam 203 are focused by the first reflecting mirror 351 to the fourth reflecting mirror 354, forming focused parallel light of three wavelengths, thereby reducing the optical path volume.

[0071] In one implementation, such as Figure 2 As shown, the optical path device 30 also includes a second beam guiding component 36. The second beam guiding component 36 is disposed in the output optical path of the first beam guiding component 35 and the output optical path of the reflected laser beam emitted from the objective lens 32. The second beam guiding component 36 is used to transmit all laser beams to the objective lens 32 and reflect the reflected laser beams to the detector 12.

[0072] In one embodiment, the numerical aperture of the objective lens 32 is greater than or equal to 1.4. (See reference...) Figure 3 As shown, the objective lens 32 includes: a dynamic focusing lens 321, a static optical lens 322, an aberration correction lens group 323, a stray light suppression element 324, and a chromatic aberration compensation lens group 325, which are sequentially disposed on the outgoing optical path of the multi-wavelength light source assembly 31.

[0073] Furthermore, the dynamic focusing lens 321 is coupled to the detection and processing device 10, which is used to adjust the focal length of the dynamic focusing lens 321. The dynamic focusing lens 321 is a liquid lens with positive optical power, wherein the image-side surface of the liquid lens is concave and the object-side surface is convex. The dynamic focusing lens 321 can change the curvature of the liquid by applying voltage, thereby adjusting the beam aperture and incident angle in real time.

[0074] The static optical lens 322 is a biconvex lens with positive optical power. The static optical lens 322 works in conjunction with the dynamic focusing lens 321 to stabilize the basic optical power of the optical path.

[0075] The aberration correction lens assembly 323 is cemented together from the image side by a calcium fluoride lens 3231 with negative optical power and a quartz lens 3232 with positive optical power, arranged sequentially from the image side. The image side surface of the aberration correction lens assembly 323 is concave, and the object side surface is convex. The aberration correction lens assembly 323 uses the dispersion difference between the two materials (i.e., calcium fluoride and quartz) to correct spherical aberration.

[0076] The stray light suppression component 324 is an aperture stop used to enhance the stray light suppression effect, intercept stray light emitted by non-imaging objects, reduce its impact on the imaging surface, and improve image contrast and clarity.

[0077] The chromatic aberration compensation lens group 325 is composed of a low-dispersion glass, a medium-dispersion liquid, and a high-dispersion peel-bonded layer, arranged sequentially from the image side. The chromatic aberration compensation lens group 325 eliminates broadband chromatic aberration by utilizing the dispersion differences of the three layers. Furthermore, the side of the chromatic aberration compensation lens group 325 closest to the sample 200 is immersed in liquid and in contact with the sample 200. The liquid can act as part of the liquid lens, eliminating the need for a solid lens and reducing interface reflection.

[0078] Understandably, the image side refers to the side closer to the multi-wavelength light source component 31, and the object side refers to the side closer to the sample 200 to be tested.

[0079] In one implementation, such as Figure 2 As shown, the detection and processing device 10 includes a processor 11 and at least two detectors 12 coupled to the processor 11. Each detector 12 corresponds to a laser beam and is used to collect reflected laser beams of various wavelengths to obtain optical signals. The processor 11 is used to convert the optical signal corresponding to each laser beam into a corresponding digital signal; process the digital signal corresponding to each laser beam to obtain at least two types of roughness data; and perform weighted summation of the roughness at the same location in all roughness data to obtain the actual roughness data. Therefore, by combining laser beams of different wavelengths to detect the surface roughness of the sample 200 under test, the influence of differences in the reflectivity of laser beams on different materials of the sample 200 under test is eliminated, enabling the detection of different samples 200 under test and expanding the application range.

[0080] For example, such as Figure 2 As shown, the detection and processing device 10 includes a first detector 121, a second detector 122, and a third detector 123. The first detector 121 collects the laser beam formed by the reflection of a first laser beam 201 from the surface of the sample 200; the second detector 122 collects the laser beam formed by the reflection of a second laser beam 202 from the surface of the sample 200; and the third detector 123 collects the laser beam formed by the reflection of a third laser beam 203 from the surface of the sample 200. Different detectors 12 independently collect the optical signals corresponding to laser beams of different wavelengths, without interfering with each other.

[0081] Preferably, the processor 11 includes a field-programmable gate array (FPGA), which processes the surface topography data of the sample 200 under test in real time (including optical signals and digital signals corresponding to the reflected laser beam).

[0082] In one embodiment, the roughness detection device 100 is further equipped with a plasma surface treatment device (not shown), which can perform plasma treatment on the test sample 200 of certain high reflectivity materials to improve the consistency of detection. During the detection process, the roughness detection device 100 automatically identifies the material type, selects a suitable combination of laser beams, and automatically adjusts the current test parameters to achieve intelligent detection.

[0083] In summary, the multi-wavelength light source component 31 emits at least two wavelengths of laser beams in parallel. The laser beams pass sequentially through the light intensity control component 33, the beam purification component 34, the first beam guiding component 35, the second beam guiding component 36, and the objective lens 32 to reach the surface of the sample 200 to be tested. The reflected laser beams of at least two wavelengths reflected from the surface of the sample 200 to be tested are guided to the detection and processing device 10 by the second beam guiding component 36, and the detection and processing device 10 processes the reflected laser beams.

[0084] Therefore, the roughness detection device 100 disclosed in this utility model has the following advantages: First, since it uses laser beams of at least two wavelengths to detect the surface roughness of the sample 200, the reflectivity of different wavelength laser beams varies for different materials. This allows for the more accurate acquisition of actual roughness data for different material systems by utilizing the characteristics of different materials. Second, different wavelength laser beams have different sensitivities to surface defects and structures. Short-wavelength laser beams are more sensitive to minute surface features (such as nanoscale scratches and particles), while long-wavelength laser beams have better detection capabilities for larger surface undulations (such as micrometer-level steps). Therefore, by using multiple wavelength laser beams simultaneously, the advantages of different wavelengths can be combined to more comprehensively reflect the surface roughness of the sample 200. Third, the roughness detection device 100 can cover a wider roughness range. For areas with low surface roughness, short-wavelength laser beams can be used for high-precision measurement; for areas with high surface roughness, long-wavelength laser beams can better adapt to larger height variations. For example, when the surface of the sample 200 has both nanometer-scale micro-roughness and micrometer-scale macro-ripples, the roughness detection device 100 can measure roughness data at different scales using laser beams of different wavelengths, and then combine these roughness data to obtain more accurate actual roughness data. Finally, the roughness detection device 100 can provide multiple sets of detection data, which can be cross-verified. If the measurement data of a certain wavelength is abnormal, the detection results of other wavelengths can be referenced to ensure the continuity and reliability of the detection, whereas a single-wavelength white light interferometer may not be able to continue normal measurement in this situation.

[0085] Based on the same design concept, this utility model also discloses a specific implementation of a roughness detection system 1000. (See reference...) Figure 1 As shown, the roughness detection system 1000 includes: a roughness detection device 100 and a support platform 300, the support platform 300 being used to support the movable stage 20 in the roughness detection device 100.

[0086] In one embodiment, the roughness detection system 1000 further includes a support 400 and a position adjustment device 500. The support 400 is fixed to the support stage 300 and is fixedly assembled with the multi-wavelength light source assembly 31, the tube 40, the protective housing 50, and the objective lens 32 to support the entire assembly. The position adjustment device 500 is movably connected to the support 400 and fixedly connected to the optical path device 30 in the roughness detection device 100, and is coupled to the detection processing device 10. The position adjustment device 500 is used to move vertically under the control of the detection processing device 10 to adjust the vertical distance between the optical path device 30 and the sample 200 to be tested. Thus, the cooperation between the position adjustment device 500 and the moving stage 20 achieves automatic focusing, ensuring that the detection point is always located at the focal plane of the objective lens 32, thereby improving detection accuracy.

[0087] The following describes a specific embodiment of the roughness detection system 1000 of this utility model.

[0088] [Example 1]

[0089] See also Figure 1 and Figure 2 The multi-wavelength light source component 31 emits laser beams of three wavelengths (405nm, 532nm, and 650nm) in parallel. By using these three wavelengths of laser beams to adapt to different surface reflection characteristics, multispectral fusion is achieved, eliminating the influence of differences in material reflectivity. Specifically, the 405nm laser beam is suitable for the detection of high-reflectivity materials, the 650nm beam is suitable for the detection of low-reflectivity materials, and the 532nm beam is suitable for the detection of medium-reflectivity materials.

[0090] The objective lens 32 has a numerical aperture of 1.4 μm. By increasing the aperture and aperture of the objective lens 32, the longitudinal resolution is improved to 0.4 μm, achieving high-precision measurement. The objective lens 32 works in conjunction with the stage 20 to achieve an autofocus function, ensuring that the detection point is always located on the focal plane of the objective lens 32, thereby improving measurement accuracy.

[0091] The moving stage 20 is driven by piezoelectric ceramics, achieving a positioning accuracy of ±0.1μm. It supports micro-displacement in both two-dimensional planes and the vertical direction, enabling automatic scanning and fine adjustment. The moving stage 20 is coupled to the detection and processing equipment 10, receiving current test parameters in real time and performing detection on the sample 200 to be tested.

[0092] The inspection and processing equipment 10 processes the optical signal corresponding to the reflected laser beam in real time to obtain at least two sets of roughness data, and performs weighted summation on the roughness at the same location in all roughness data to obtain the actual roughness number. Simultaneously, the inspection and processing equipment 10 integrates a module for a standard objective lens 32, used for periodically calibrating the performance of the objective lens 32 to ensure measurement stability. The inspection and processing equipment 10 also includes a roughness database for storing batch information of samples 200, as well as corresponding historical roughness data and test parameters.

[0093] [Example 2]

[0094] See also Figure 1 and Figure 2 The multi-wavelength light source component 31 emits laser beams of three wavelengths (355nm, 532nm, and 650nm) in parallel. By using these three wavelengths of laser beams to adapt to different surface reflection characteristics, multispectral fusion is achieved, eliminating the influence of differences in material reflectivity. Specifically, the 355nm laser beam is suitable for the detection of high-reflectivity materials, the 650nm beam is suitable for the detection of low-reflectivity materials, and the 532nm beam is suitable for the detection of medium-reflectivity materials.

[0095] The objective lens 32 has a numerical aperture of 1.5. By increasing the aperture and aperture of the objective lens 32, the longitudinal resolution is improved to 0.03 μm, achieving high-precision measurement. The objective lens 32 works in conjunction with the stage 20 to achieve an autofocus function, ensuring that the detection point is always located on the focal plane of the objective lens 32, thus improving measurement accuracy.

[0096] The moving stage 20 is driven by piezoelectric ceramics, achieving a positioning accuracy of ±0.05μm. It supports micro-displacement in both two-dimensional planes and the vertical direction, enabling automatic scanning and fine adjustment. The moving stage 20 is coupled to the detection and processing equipment 10, receiving current test parameters in real time and performing detection on the sample 200 to be tested.

[0097] The inspection and processing equipment 10 processes the optical signal corresponding to the reflected laser beam in real time to obtain at least two sets of roughness data, and performs weighted summation on the roughness at the same location in all roughness data to obtain the actual roughness number. Simultaneously, the inspection and processing equipment 10 integrates a module for a standard objective lens 32, used for periodically calibrating the performance of the objective lens 32 to ensure measurement stability. The inspection and processing equipment 10 also includes a roughness database for storing batch information of samples 200, as well as corresponding historical roughness data and test parameters.

[0098] Combination Figure 4 and Figure 5 As shown, Figure 4 The results of traditional roughness testing using a white light interferometer are unsatisfactory. Figure 5 The roughness detection results of the roughness detection system 1000 disclosed in this application show that most of the light can be received, and the effect is good. However, since the back surface of the sample 200 is usually roughened, excessively high roughness (e.g., Ra greater than 1 μm) leads to reduced reflectivity and diffuse reflection of light, making it difficult for the white light interferometer to clearly extract the interference signal. Figure 4 Large areas of black indicate that no surface reflected light signal was received, which leads to deviations in roughness calculation.

[0099] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

[0100] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A roughness detecting device characterized by comprising: include: Detection and processing equipment; A mobile stage, coupled to the detection and processing equipment, is used to carry the sample to be tested, and moves under the control of the detection and processing equipment; An optical path device, comprising a multi-wavelength light source assembly and an objective lens, wherein the multi-wavelength light source assembly is used to emit laser beams of at least two wavelengths in parallel; the objective lens is disposed in the output optical path of the multi-wavelength light source assembly and is used to focus the laser beams of each wavelength onto the surface of the sample to be tested. The detection and processing equipment is used to collect and process at least two wavelengths of reflected laser beams reflected from the surface of the sample to be tested to obtain actual roughness data; the laser beams correspond one-to-one with the reflected laser beams, and the roughness data includes the roughness of each position on the surface of the sample to be tested.

2. The roughness detection device according to claim 1, characterized in that, The optical path device further includes a first beam guiding component, which is disposed on the output optical path of the multi-wavelength light source component. The total coverage of the laser beam transmitted from the first beam guiding component is smaller than the total coverage of the laser beams emitted by all the multi-wavelength light source components.

3. The roughness detection device according to claim 2, characterized in that, The multi-wavelength light source assembly includes a multi-wavelength light source, which includes a first laser to a third laser arranged sequentially along a predetermined horizontal direction. The first beam guiding assembly includes: A first reflecting mirror is disposed in the output light path of the first laser; The second reflector is disposed on the reflected light path of the first reflector; The third reflector is disposed in the output optical path of the third laser. The fourth reflecting mirror is disposed in the reflected light path of the third reflecting mirror; The first reflector, the second reflector, the fourth reflector, and the third reflector are arranged sequentially along the predetermined horizontal direction, and the laser beam emitted by the second laser passes between the second reflector and the fourth reflector and enters the objective lens.

4. The roughness detection device according to claim 2, wherein The detection and processing device includes a processor and at least two detectors coupled to the processor, each detector corresponding to a laser beam. The detector is used to collect reflected laser beams of various wavelengths to obtain optical signals; The processor is used to convert the optical signal corresponding to each laser beam into a corresponding digital signal; process the digital signal corresponding to each laser beam to obtain at least two roughness data; and perform weighted summation on the roughness at the same position in all the roughness data to obtain the actual roughness data.

5. The roughness detection device according to claim 1, wherein The numerical aperture of the objective lens is greater than or equal to 1.4; The objective lens includes: a dynamic focusing lens, a static optical lens, an aberration correction lens group, a stray light suppression device, and a chromatic aberration compensation lens group, which are sequentially arranged in the output optical path of the multi-wavelength light source assembly.

6. The roughness detection device according to claim 5, characterized in that, The dynamic focusing lens is coupled to the detection and processing device, which is used to adjust the focal length of the dynamic focusing lens. The dynamic focusing lens is a liquid lens with positive optical power, and the image-side surface of the liquid lens is concave and the object-side surface is convex. The static optical lens is a biconvex lens with positive optical power; The aberration correction lens group is cemented together from the image side by a calcium fluoride lens with negative optical power and a quartz lens with positive optical power, arranged sequentially from the image side. The image side surface of the aberration correction lens group is concave and the object side surface is convex. The stray light suppression device is an aperture; The chromatic aberration compensation lens assembly is composed of low-dispersion glass, medium-dispersion liquid, and high-dispersion peel-bonded material arranged sequentially from the image side.

7. The roughness detection device according to claim 4, characterized in that, The optical path device further includes a second beam guiding component, which is disposed in the output optical path of the first beam guiding component and the output optical path of the reflected laser beam emitted from the objective lens, for transmitting all the laser beams to the objective lens and reflecting the reflected laser beams to the detector.

8. The roughness detection device according to claim 1, wherein The multi-wavelength light source assembly includes: a multi-wavelength light source and a collimation assembly disposed on the output optical path of the multi-wavelength light source. The collimation assembly is used to collimate the laser beams of each wavelength emitted by the multi-wavelength light source so that the laser beams of each wavelength are parallel. The optical path device further includes: a light intensity control component disposed on the output optical path of the collimation component and a beam purification component disposed on the output optical path of the light intensity control component. The light intensity control component includes at least two apertures arranged sequentially along a set horizontal direction, each aperture corresponding to a laser beam, and the apertures are used to adjust the power of the laser beams of each wavelength. The beam purification component includes at least two filters arranged sequentially along a set horizontal direction, each filter corresponding to a laser beam, and the filters are used to filter out stray light from the laser beams of each wavelength emitted from the light intensity control component.

9. A roughness detection system characterized by, include: The roughness detection device according to any one of claims 1-8; A support platform is used to support the movable stage in the roughness detection device.

10. The roughness detection system of claim 9, wherein, The roughness detection system also includes: The bracket is fixed to the load support platform; A position adjustment device is provided, which is movably connected to the support and fixedly connected to the optical path device in the roughness detection device. The position adjustment device is coupled to the detection and processing device and is used to move vertically under the control of the detection and processing device to adjust the vertical distance between the optical path device and the sample to be tested.

Images