温压双参数测量的光纤法珀传感器
By stacking temperature-sensing elements and pressure-sensing components in a fiber optic Fabry-Perot sensor and sealing them together, simultaneous measurement of temperature and pressure is achieved. This solves the measurement error problem of metal diaphragm sensors when temperature changes, and improves measurement accuracy and stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHONGBEI UNIV
- Filing Date
- 2025-05-30
- Publication Date
- 2026-07-17
AI Technical Summary
Existing metal diaphragm fiber optic Fabry-Perot pressure sensors exhibit measurement errors when temperature changes, affecting measurement accuracy.
A fiber optic Fabry-Perot sensor for measuring both temperature and pressure parameters is designed. The temperature-sensing element and the pressure-sensing element are stacked on a base, with the pressure-sensing element close to the external environment and the temperature-sensing element encapsulated inside the base. A sealed connection is used, and temperature compensation is achieved by sensing the temperature through the temperature-sensing element.
It improves the accuracy of pressure and temperature measurement by the sensor in harsh environments, reduces the risk of temperature sensing element brittleness, and enhances the sensor's sealing and stability.
Smart Images
Figure CN224517822U_ABST
Abstract
Claims
1. A fiber-optic Fabry-Perot sensor for measuring temperature and pressure as two parameters, characterized in that, The device includes a sensitive unit and an optical assembly. The sensitive unit comprises a pressure-sensing part, a support ring, a temperature-sensing plate, and a base. The temperature-sensing plate, the support ring, and the pressure-sensing part are disposed on the base and stacked sequentially. The pressure-sensing part is configured to deform under the action of at least one of pressure and temperature and has a metal diaphragm. The metal diaphragm abuts against the support ring. The support ring has a through hole, and a cavity is formed between the through hole, the metal diaphragm, and the temperature-sensing plate. The temperature-sensing plate is configured to deform under the action of temperature. The connection between the pressure-sensing part and the base is a first sealed connection. The optical assembly includes a ferrule and an optical fiber fixed to the ferrule. The sensitive unit is connected to the optical assembly, and the connection between the sensitive unit and the optical assembly is a second sealed connection.
2. The fiber optic Fabry-Perot sensor for measuring temperature and pressure dual parameters according to claim 1, characterized in that, The pressure-sensing part includes a support part for supporting the metal diaphragm. When the pressure-sensing part is assembled on the base, the metal diaphragm abuts against the support ring, and the connection between the support part and the base is the first sealing connection.
3. The fiber-optic Fabry-Perot sensor for temperature and pressure dual-parameter measurement according to claim 1, characterized in that, The metal diaphragm is made of any one of stainless steel, nickel-based alloy, titanium, titanium alloy, tantalum, Monel alloy, high-elasticity alloy, or metal single crystal.
4. The fiber-optic Fabry-Perot sensor for temperature and pressure dual-parameter measurement according to claim 1, characterized in that, The material of the temperature sensing element is any one of sapphire, quartz, silicon carbide, and magnesium oxide.
5. The fiber-optic Fabry-Perot sensor for temperature and pressure dual-parameter measurement according to claim 1, characterized in that, The base and the insert are made of metal.
6. The fiber-optic Fabry-Perot sensor for temperature and pressure dual-parameter measurement according to claim 1, characterized in that, The material of the support ring is any one of stainless steel, nickel-based alloy, titanium, titanium alloy, tantalum, Monel alloy, high-elasticity alloy, single crystal metal, sapphire, quartz, silicon carbide and magnesium oxide.
7. The fiber-optic Fabry-Perot sensor for temperature and pressure dual-parameter measurement according to claim 1, characterized in that, The optical fiber is either single-mode or multimode.
8. The fiber optic Fabry-Perot sensor for measuring temperature and pressure dual parameters according to claim 1, characterized in that, The optical fiber is fixed to the ferrule by means of glass paste, adhesive or brazing. 9.The fiber-optic Fabry-Perot sensor for temperature and pressure measurement of claim 1, wherein, The optical fiber is in contact with the temperature sensing element; or there is a gap between the optical fiber and the temperature sensing element.
10. The fiber-optic Fabry-Perot sensor for temperature and pressure dual parameter measurement according to claim 1, characterized in that, The first sealing connection is a laser-welded connection, and the second sealing connection is a laser-welded connection.