一种用于X射线衍射成像仪的样品台及X射线衍射成像仪
By combining a graphite support plate and a graphite bearing plate, the problems of easy damage to the sample stage and insufficient support are solved, achieving efficient experimental results and reducing costs, and adapting to the needs of multiple samples.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZING SEMICON CORP
- Filing Date
- 2025-08-14
- Publication Date
- 2026-07-17
AI Technical Summary
The sample stage of existing X-ray diffraction imagers uses polyimide film, which is easily damaged, complicated to replace, and lacks sufficient support, resulting in unreliable experimental results and high costs.
The system employs a combination structure of a graphite support disk and a graphite carrier disk, with the graphite carrier disk being detachably nested within the graphite support disk. The material is isostatic graphite, and the surface is coated with a protective layer to ensure mechanical strength and experimental stability.
It improves the efficiency of sample stage use and the authenticity and reliability of experimental results, reduces equipment maintenance costs, adapts to different sample requirements, and expands the experimental range.
Smart Images
Figure CN224518620U_ABST
Abstract
Claims
1. A sample stage for an X-ray diffraction imager, characterized by, include: A graphite support disk, wherein a first groove is provided inside the graphite support disk, and at least one first slot is also provided inside the graphite support disk, the first slot being located outside the first groove and communicating with the first groove; At least one graphite support disk is provided, wherein a second groove is provided in the graphite support disk, and at least one second slot is also provided in the graphite support disk, the second slot being located outside the second groove and communicating with the second groove, and at least one outwardly protruding buckle is provided on the circumferential edge of the graphite support disk, wherein the size of each graphite support disk matches the size of the first groove, and the buckle matches the first slot, so that each graphite support disk is detachably nested in the graphite support disk.
2. The sample stage of claim 1, wherein, The graphite support disk and the graphite bearing disk are made of isostatic graphite.
3. The stage of claim 1, wherein, The surface roughness of the graphite support disk and the graphite bearing disk is less than 0.1 μm.
4. The stage of claim 1, wherein, The surfaces of the graphite support disk and the graphite carrier disk are also coated with a protective layer to prevent graphite particles from contaminating the sample.
5. The sample stage of claim 4, wherein, The protective layer includes a diamond-like carbon film or an amorphous carbon film.
6. The sample stage of claim 5, wherein, When the protective layer is the diamond-like carbon film, the thickness of the protective layer is 1µm to 1.6µm; When the protective layer is the amorphous carbon film, the thickness of the protective layer is 1.2 μm to 2 μm.
7. The stage of claim 1, wherein, The graphite support disk and the graphite bearing disk are circular graphite disks, and the first groove and the second groove are cylindrical grooves. The central axis of the first groove is coaxial with the central axis of the graphite support disk, and the central axis of the second groove is coaxial with the central axis of the graphite bearing disk.
8. The sample stage of claim 7, wherein, The dimensions of the graphite support disk match the dimensions of the first groove, and the buckle matches the first slot, specifically including: The diameter of the graphite support disk is smaller than the diameter of the first groove, and the thickness of the graphite support disk is less than or equal to the depth of the first groove. The width of the buckle is less than or equal to the width of the first slot, the height of the buckle is less than or equal to the height of the first slot, and the length of the buckle is less than or equal to the length of the first slot.
9. The sample stage of claim 8, wherein, The graphite support disk includes a first graphite support disk and a second graphite support disk, wherein the diameter of the second groove in the first graphite support disk is a first dimension; The diameter of the second groove within the second graphite bearing disk is a second dimension, wherein the second dimension is smaller than the first dimension.
10. An X-ray diffraction imager, characterized by, Includes the sample stage as described in any one of claims 1-9.