测试载具及采用该测试载具的半导体测试装置
By designing a test fixture and using sensors to detect and adjust the pads, the problem of uneven force on power semiconductor terminals was solved, achieving uniform force and accuracy calibration during the testing process and avoiding internal delamination.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN YUANLICHUANG TECH CO LTD
- Filing Date
- 2025-08-13
- Publication Date
- 2026-07-17
AI Technical Summary
In semiconductor testing, processing and assembly errors can cause uneven forces on the terminals of a power semiconductor, leading to internal delamination.
Design a test carriage, including a carrier plate, sensors, and adjustment pads. By detecting pressure with the sensors and adjusting the pads, the pressure control of the test head is simulated to ensure uniform force on each terminal.
This effectively avoids damage to power semiconductors during testing, ensures uniform force on terminals, prevents internal delamination, and improves testing accuracy.
Smart Images
Figure CN224518799U_ABST
Abstract
Claims
1. A test carrier, characterized by, The test carrier (100) is arranged at intervals relative to and opposite to the test pressure head along a first direction, and includes: The carrier (110) is provided with a terminal simulation part (111) for simulating the height of the force-bearing surface of the power semiconductor terminal. The terminal simulation part (111) is provided on both sides of the carrier (110) along the second direction, and the second direction is set at an angle to the first direction. Sensor (120) is provided on the terminal analog section (111); and An adjustment pad (130) is provided on the side of the sensor (120) facing the test head according to the detection signal of the sensor (120), and the adjustment pad (130) is in contact with the surface of the sensor (120); The sensor (120) or the adjusting pad (130) is used to press and cooperate with the test head.
2. The test carrier of claim 1, wherein, The test carrier (100) further includes a fixing block (140), which is disposed on the carrier plate (110) and together with the terminal simulation part (111) forms a limiting groove (1001), and at least a portion of the sensor (120) and / or the adjustment pad (130) is accommodated and limited within the limiting groove (1001).
3. The test carrier of claim 2, wherein, The terminal simulation part (111) includes a pressure block (1111) and a limiting block (1112) protruding from the pressure block (1111) in a first direction. The limiting block (1112) and the fixing block (140) are arranged opposite to each other in a second direction. The pressure block (1111) is located between the limiting block (1112) and the fixing block (140). The three together form the limiting groove (1001).
4. The test carrier of claim 3, wherein, At least one of the fixing block (140) and the limiting block (1112) is provided with a clearance (1002) that communicates with the limiting groove (1001). And / or, a clearance gap (1002) communicating with the limiting groove (1001) is provided between the fixing block (140) and the limiting block (1112). And / or, the shape of the pressure block (1111) is adapted to the shape of the sensor (120).
5. The test carrier of claim 3, wherein, The fixing block (140) includes a fixing body (141) and a positioning protrusion (142) connected to the fixing body (141). The positioning protrusion (142) protrudes from the fixing body (141) along the second direction and cooperates with the limiting block (1112) to limit the sensor (120). The fixing body (141) is connected to the carrier plate (110).
6. The test carrier of claim 2, wherein, The fixing block (140) is movably disposed on the carrier plate (110); the test carrier (100) further includes a locking member for locking the fixing block (140) to the carrier plate (110), and when the fixing block (140) is locked to the carrier plate (110), it provides a locking force to the sensor (120) in at least a second direction.
7. The test vehicle according to claim 6, characterized in that, The fixing block (140) is provided with an elongated hole (1402) for the locking member to pass through, the length of which is along the second direction.
8. The test carrier of claim 2, wherein, The fixing block (140) is provided with a wiring groove (1401) communicating with the limiting groove (1001), and the wiring groove (1401) is provided to pass through the fixing block (140) along the second direction; And / or, the carrier (110) is provided with mounting slots (112) on both sides along the second direction, the mounting slots (112) are located on the opposite side of the terminal simulation parts (111) on both sides, and at least a portion of the fixing block (140) is accommodated in the mounting slots (112).
9. The test carrier of claim 1, wherein, The carrier disk (110) is provided with at least two simulated sections (111) of terminals opposite each other along the second direction as a simulated group (1101). The simulated groups (1101) are arranged at intervals along the third direction. The third direction, the second direction and the first direction are at angles to each other.
10. A semiconductor testing apparatus, characterized in that, The test fixture includes a test platform, a test head, and a test carrier (100) according to any one of claims 1 to 9. The test head and the test platform are arranged opposite to each other and spaced apart along a first direction. The test carrier (100) is supported on the test platform. The test head is capable of moving closer to or away from the test carrier (100) along the first direction.