Adaptive probe card frame to fit different chip sizes

Abstract

This utility model relates to the field of semiconductor manufacturing equipment technology, and discloses an adaptive probe card frame adapted to different chip sizes. It includes a housing, a clamping mechanism on the inner wall of the housing, a locking mechanism at the bottom of the housing, and a base at the bottom of the housing. The clamping mechanism includes multiple sleeves, which are respectively fixedly connected to the inner wall of the housing. In this utility model, the clamping mechanism, through the coordinated cooperation of the sleeves, sliding rods, and springs, combined with the limiting rods and telescopic components on the grippers, utilizes the elastic force of springs to drive the limiting rods to adaptively tighten according to the width of the probe card. Springs and sliders work together to stably clamp and fix probe cards of different sizes, solving the problem in the prior art of achieving adaptive clamping and fixing of probe cards corresponding to different chip sizes, avoiding the tediousness of manual adjustment, and improving adaptability.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to an adaptive probe card frame that adapts to different chip sizes. Background Technology

[0002] A probe card is a key component used in chip testing. It is applied in the production and testing of semiconductor chips. By contacting the solder joints or test points on the chip with probes, it can detect the electrical performance of the chip. It is an important tool for ensuring chip quality and screening qualified products.

[0003] Traditional probe card frames mainly consist of a fixed shell, a clamping device, and a base. When using them, the probe card needs to be installed in the clamping device and fixed by manually adjusting the bolts or buckles. Then the entire frame is installed on the testing equipment for testing. However, this structure has obvious drawbacks. When dealing with chips of different sizes, it is necessary to replace the corresponding clamping parts or repeatedly adjust the size of the clamping device manually. The operation is cumbersome and time-consuming, reducing testing efficiency.

[0004] In existing technologies, although some probe card frames have improved the clamping device by adopting an adjustable clamping plate structure to adapt to probe cards of different sizes, in actual use, their adjustment components can only make mechanical adjustments in a single dimension. They cannot automatically adapt the clamping force and range according to the actual size of the probe card, making it impossible to achieve adaptive clamping and fixation. When placing probe cards of different sizes, the adjustment structure needs to rely on manual judgment of the adjustment range. Due to the lack of elastic buffer and precise limit cooperation, either the probe card will shift during testing due to insufficient clamping force, or the probe card will deform due to excessive clamping. Ultimately, it is still difficult to achieve adaptive clamping and fixation for probe cards corresponding to different sized chips. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides an adaptive probe card frame that adapts to different chip sizes, aiming to improve the problem in the prior art that it is difficult to achieve adaptive clamping and fixation for probe cards corresponding to chips of different sizes.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an adaptive probe card frame that adapts to different chip sizes, including a housing, a clamping mechanism provided on the inner wall of the housing, a locking mechanism provided at the bottom of the housing, and a base II provided at the bottom of the housing;

[0007] The clamping mechanism includes multiple sleeves, which are fixedly connected to the inner walls of the outer shell. Each sleeve has a sliding groove on its inner wall. A spring is fixedly connected to the outer wall of each sleeve on the side away from each other. A sliding rod is fixedly connected to an adjacent end of each spring. Multiple sliders are fixedly connected to an adjacent side of the outer wall of each sliding rod. Each slider is slidably connected to a corresponding sliding groove. A gripper is fixedly connected to an adjacent end of each sliding rod. A telescopic component is provided at an adjacent end of each gripper.

[0008] As a further description of the above technical solution:

[0009] The locking mechanism includes two bases, which are fixedly connected to the top left and right sides of the base. Each base has a sliding groove at its top and a sliding rod at its top. The sliding rods are slidably connected to their corresponding sliding grooves. Sliding columns are fixedly connected to the left and right sides of the outer walls of the sliding rods. Springs are fixedly connected to the tops of the sliding rods. Support frames are fixedly connected to the tops of the springs. The sliding rods are slidably connected to the inner walls of their corresponding support frames. The sliding columns are slidably connected to the middle of the outer walls of their corresponding support frames. The tops of the two support frames are fixedly connected to the bottom left and right sides of the outer wall of the outer casing.

[0010] As a further description of the above technical solution:

[0011] The telescopic assembly includes multiple sliding grooves, which are respectively formed on adjacent sides of multiple grippers. Multiple limiting rods are provided on adjacent sides of multiple grippers. The multiple limiting rods on the front and rear sides are respectively fixedly connected to the corresponding grippers. The multiple limiting rods in the middle are respectively slidably connected to the corresponding grippers. The opposite sides of the multiple limiting rods in the middle are each fixedly connected to a slider, which is slidably connected to the corresponding multiple sliding grooves. A spring is fixedly connected between adjacent limiting rods.

[0012] As a further description of the above technical solution:

[0013] The top of the inner wall of the outer shell is provided with multiple sliding grooves 4, and the bottom of each of the multiple grippers is fixedly connected to a slider 3. The multiple sliding grooves 4 are slidably connected to the corresponding slider 3.

[0014] As a further description of the above technical solution:

[0015] Spring four is fixedly connected to the top left and right sides of the inner wall of the outer shell, and the top of the two spring four is fixedly connected to the same buffer pad.

[0016] As a further description of the above technical solution:

[0017] Wiring boxes are fixedly connected to the top left and right sides of the outer wall of the housing, and cameras are fixedly connected to the top of the two wiring boxes.

[0018] As a further description of the above technical solution:

[0019] A transparent dust cover is provided on the top of the outer wall of the outer shell. Metal sheets are fixedly connected to the left and right sides of the outer wall of the outer shell. Magnet sheets are fixedly connected to the left and right sides of the inner wall of the transparent dust cover. The two metal sheets are respectively attached to the corresponding magnet sheets.

[0020] As a further description of the above technical solution:

[0021] Telescopic rods are fixedly connected to the front and rear sides of the top of the second base. Both telescopic rods are fixedly connected to the bottom of the outer wall of the outer shell. Screws are threaded around the top of the second base.

[0022] This utility model has the following beneficial effects:

[0023] 1. In this utility model, the clamping mechanism, through the coordinated cooperation of the sleeve, sliding rod and spring one, combined with the limiting rod and telescopic component on the gripper, uses the elastic force of spring one to drive the limiting rod to adaptively tighten according to the width of the probe card; at the same time, spring two and slider two form a linkage, so that the intermediate limiting rod can automatically adjust the clamping distance according to the thickness of the probe card, thereby realizing stable clamping and fixing of probe cards of different sizes, effectively solving the problem in the prior art that it is difficult to achieve adaptive clamping and fixing of probe cards corresponding to different sizes of chips, avoiding the tediousness of manual adjustment and improving adaptability.

[0024] 2. In this utility model, the locking mechanism is linked to the base, slide rod, slide column and support frame. The arc-shaped guide surface of the support frame converts the thrust into rotational force, which causes the slide rod to quickly complete the separation and locking action. With the auxiliary support and positioning of the telescopic rod, the probe card frame can be easily disassembled and assembled, which effectively solves the problem of cumbersome disassembly of the probe card frame in the prior art and improves the efficiency of equipment maintenance and replacement. Attached Figure Description

[0025] Figure 1 This is a perspective view of the adaptive probe card frame adapted to different chip sizes proposed in this utility model;

[0026] Figure 2 This is a front view of the adaptive probe card frame adapted to different chip sizes proposed in this utility model;

[0027] Figure 3This is a split view of the adaptive probe card frame adapted to different chip sizes proposed in this utility model;

[0028] Figure 4 for Figure 3 Enlarged view of point A in the image;

[0029] Figure 5 This is an exploded view of the adaptive probe card frame clamping mechanism for different chip sizes proposed in this utility model;

[0030] Figure 6 for Figure 5 Enlarged view of point B in the image;

[0031] Figure 7 This is an exploded view of the adaptive probe card frame locking mechanism for different chip sizes proposed in this utility model;

[0032] Figure 8 This is a partial structural exploded view of the transparent dust cover of the adaptive probe card frame that adapts to different chip sizes, as proposed in this utility model.

[0033] Legend:

[0034] 1. Outer shell; 2. Clamping mechanism; 201. Sleeve; 202. Slide groove one; 203. Spring one; 204. Sliding rod; 205. Slider one; 206. Gripper; 207. Telescopic assembly; 2071. Slide groove two; 2072. Limiting rod; 2073. Slider two; 2074. Spring two; 3. Locking mechanism; 301. Base one; 302. Slide groove three; 303. Slide rod; 304. Slide column; 305. Spring three; 306. Support frame; 4. Base two; 5. Slide groove four; 6. Slider three; 7. Spring four; 8. Buffer pad; 9. Wiring box; 10. Camera; 11. Transparent dust cover; 12. Metal sheet; 13. Magnetic sheet; 14. Telescopic rod; 15. Screw. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0036] Reference Figure 4 , Figure 5 and Figure 6The present invention provides an embodiment of: 1. An adaptive probe card frame adaptable to different chip sizes, including a housing 1, providing an installation base and protection for the entire device; a clamping mechanism 2 is provided on the inner wall of the housing 1 to clamp and fix probe cards of different sizes; a locking mechanism 3 is provided at the bottom of the housing 1 to enable quick disassembly and fixation between the housing 1 and the base 4; the base 4 is provided at the bottom of the housing 1 to provide stable support for the entire device; the clamping mechanism 2 includes multiple sleeves 201, providing installation space and guidance for the sliding rod 204 and the spring 203; the multiple sleeves 201 are respectively fixedly connected to the inner wall of the housing 1. Around the perimeter, the inner walls of multiple sleeves 201 are provided with sliding grooves 202 to guide and limit the sliding of sliders 205. Springs 203 are fixedly connected to the inner walls of the multiple sleeves 201 on opposite sides, generating a reverse elastic force through elastic deformation to provide clamping force for the grippers 206. Sliding rods 204 are fixedly connected to adjacent ends of the multiple springs 203, connecting the springs 203 and the grippers 206 and transmitting the force. Multiple sliders 205 are fixedly connected to adjacent sides of the outer walls of the multiple sliding rods 204, cooperating with the sliding grooves 202 to ensure that the sliding rods 204 move smoothly in a straight line. 5. Each sliding rod 204 is slidably connected to the corresponding slide groove 202. Adjacent ends of the multiple sliding rods 204 are fixedly connected to grippers 206, directly contacting and clamping the probe card. Adjacent ends of the multiple grippers 206 are provided with telescopic components 207 to adapt to probe cards of different thicknesses, enhancing clamping adaptability. The telescopic component 207 includes multiple slide grooves 2071, providing guidance for the sliding of the slider 2073. Multiple slide grooves 2071 are respectively opened on adjacent sides of the multiple grippers 206. Adjacent sides of the multiple grippers 206 are provided with multiple limiting rods 2072, directly contacting the probe card to achieve limiting and clamping. Multiple... Each limiting rod 2072 is fixedly connected to its corresponding gripper 206. The multiple limiting rods 2072 in the middle are slidably connected to their corresponding grippers 206. Each of the multiple limiting rods 2072 in the middle is fixedly connected to a slider 2073 on the opposite side, which cooperates with the slide groove 2071 to ensure that the middle limiting rod 2072 slides smoothly along a straight line. The multiple sliders 2073 are slidably connected to their corresponding slide grooves 2071. Each of the multiple limiting rods 2072 is fixedly connected to a spring 2074. Through elastic deformation, the spring can automatically compensate for the spacing difference caused by probe cards of different thicknesses, thereby enhancing the stability of clamping.

[0037] Specifically, when testing chips of different sizes, after opening the transparent dust cover 11 of the outer casing 1, the appropriate probe card is placed inside the outer casing 1. At this time, the various components of the clamping mechanism 2 work together to achieve adaptive fixation: the sleeves 201 around the inner wall of the outer casing 1 provide support for the entire mechanism. When the probe card contacts the gripper 206, it pushes the sliding rod 204 to move inward toward the sleeve 201. The slider 205 on the outer wall of the sliding rod 204 slides along the groove 202 to ensure stable movement. The compression spring 203 of the sliding rod 204 generates a reverse elastic force, which is transmitted to the telescopic component 207 through the gripper 206, so that the multiple limiting rods 2072 form an inward clamping force. For probe cards of different widths, the multiple limiting rods 2072 on the front and rear sides are supported by the upper arc shape. The design incorporates the flexible adjustment of the spacing using the telescopic sliding rod 204. For probe cards of different thicknesses, the multiple limiting rods 2072 in the middle can slide along the second sliding groove 2071 of the gripper 206, with the second slider 2073 at their ends ensuring smooth sliding. At the same time, the second spring 2074 between the limiting rods 2072 automatically compensates for thickness differences through elastic deformation, always maintaining a moderate clamping force. When the probe card is removed, the first spring 203 drives the sliding rod 204 to reset, and the second spring 2074 pushes the middle limiting rod 2072 back to its initial position, restoring the entire mechanism to a standby state. Through the combination of multi-directional elastic adjustment and sliding guidance, this structure can adapt to various specifications of probe cards without manual adjustment, effectively solving the problem of inconvenience in fixing probe cards of different sizes in traditional devices.

[0038] Reference Figure 1 , Figure 2 and Figure 7 The locking mechanism 3 includes two bases 301, providing a mounting base and support for the slide rod 303. The two bases 301 are fixedly connected to the top left and right sides of the base 4. Each base 301 has a groove 302 at its top, providing space and guidance for the sliding and rotation of the slide rod 303. Each base 301 has a slide rod 303 at its top, connecting the base 301 to the support frame 306 and enabling relative movement between them. The two slide rods 303 are slidably connected to their corresponding grooves 302. Slide columns 304 are fixedly connected to the left and right sides of the outer walls of the two slide rods 303, pressing against the support frame 306. The force is converted into the rotational force of the slide rod 303. The top of each slide rod 303 is fixedly connected to a spring 305, which provides a restoring force and a preload force through elastic deformation to ensure the stable cooperation between the slide rod 303 and the base 301. The top of each spring 305 is fixedly connected to a support frame 306, which transmits the force of the outer shell 1 and guides the movement trajectory of the slide column 304. The two slide rods 303 are slidably connected to the inner wall of the corresponding support frame 306, and the two slide columns 304 are slidably connected to the middle of the outer wall of the corresponding support frame 306. The top of each support frame 306 is fixedly connected to the bottom left and right sides of the outer wall of the outer shell 1.

[0039] Specifically, when the frame needs to be disassembled, push the outer shell 1 forcefully. The support frames 306 on the left and right sides of the bottom of the outer shell 1 will press down accordingly. The arc-shaped structure of the support frame 306 will contact the sliding column 304, converting the downward pressure into a thrust that causes the sliding column 304 to slide along the arc surface. This will drive the sliding rod 303 to rotate clockwise around its axis. The cuboid structure at the bottom of the sliding rod 303 will rotate accordingly. When it rotates to an angle consistent with the direction of the sliding groove 302, the sliding rod 303 can be smoothly pulled out along the sliding groove 302, realizing the separation of the base 1 301 and the sliding rod 303, completing the disassembly of the frame. When installing and fixing, insert the sliding rod 303 into the sliding groove 302 of the base 1 301, press the outer shell 1 to move the support frame 306 down, and at this time the sliding column 303 will rotate clockwise around its axis. 4. Under the reverse action of the arc surface of the support frame 306, the slide rod 303 is driven to rotate counterclockwise until the cuboid at the bottom of the slide rod 303 forms a perpendicular angle with the slide groove 302, making it impossible to pull out of the slide groove 302. At the same time, the spring 305 generates an upward elastic force after being compressed, so that the slide rod 303 is tightly engaged with the base 301. With the engaging action of the telescopic rod 14, the entire frame is stably fixed. After the disassembly or fixing operation is completed, the elastic restoring force of the spring 305 will assist the slide rod 303 and the support frame 306 to return to their original positions, ensuring the smoothness of the next operation. This structure solves the problem of cumbersome disassembly of traditional frames through mechanical transmission angle conversion, and realizes the dual functions of quick disassembly and stable fixing.

[0040] Reference Figure 1 , Figure 2 and Figure 3 Multiple sliding grooves 4 5 are provided on the top of the inner wall of the outer shell 1 to guide and limit the sliding of the slider 3 6. The bottom of multiple grippers 206 is fixedly connected to the slider 3 6, which cooperates with the sliding grooves 4 5 to ensure that the grippers 206 move smoothly. The multiple sliding grooves 4 5 are respectively slidably connected to the corresponding slider 3 6. Springs 4 7 are fixedly connected to the top left and right sides of the inner wall of the outer shell 1 to buffer the impact of external force. The top of the two springs 4 7 is fixedly connected to the same buffer pad 8, which can reduce collision damage when directly contacting the probe card. Wiring boxes 9 are fixedly connected to the top left and right sides of the outer wall of the outer shell 1 to organize and store cables to avoid clutter. Cameras 10 are fixedly connected to the top of the two wiring boxes 9, which can accurately detect the distance between the chip and the probe card.

[0041] Specifically, the sliding groove 4 5 on the top of the inner wall of the outer shell 1 slides and engages with the slider 3 6 at the bottom of the gripper 206 to guide the movement of the gripper 206. The spring 4 7 supports the buffer pad 8, which can buffer the impact force when the probe card is inserted. The wiring boxes 9 on the top left and right of the outer shell 1 facilitate the arrangement of cables, and the camera 10 on its top can monitor the internal situation in real time. All components work together to ensure the stable operation of the frame and convenient operation.

[0042] Reference Figure 1 , Figure 3 and Figure 8 A transparent dust cover 11 is provided on the top of the outer wall of the outer shell 1 to prevent dust from entering the interior of the outer shell 1 when not in use. Metal plates 12 are fixedly connected to the left and right sides of the outer wall of the outer shell 1, which attract each other with magnetic plates 13 to achieve fixation. Magnet plates 13 are fixedly connected to the left and right sides of the inner wall of the transparent dust cover 11. The adsorption of the metal plates 12 makes the transparent dust cover 11 tightly cover the outer shell 11. The two metal plates 12 are respectively attached to the corresponding magnetic plates 13. Telescopic rods 14 are fixedly connected to the top front and rear sides of the base 2 4 to assist in supporting the outer shell 1 and move it up and down. The two telescopic rods 14 are fixedly connected to the bottom of the outer wall of the outer shell 1. Screws 15 are threaded around the top of the base 2 4 to securely install the base 2 4 on the workbench.

[0043] Specifically, the transparent dust cover 11 on the top of the outer shell 1 is closed by the inner wall magnetic sheet 13 and the outer wall metal sheet 12, protecting the internal structure; the telescopic rod 14 on the top of the base 2 4 supports the outer shell 1 and assists its stable movement; the base 2 4 is fixed in position by the screws 15 around it. All the components work together to ensure that the frame is dustproof, stable and easy to operate.

[0044] Working principle: For chips of different sizes, the transparent dust cover 11 is first opened during operation, and the probe card to be used is placed inside the outer shell 1. At this time, the multiple limiting rods 2072 in the gripper 206 will tighten inward under the contraction action of the sliding rod 204 and the limiting action of the slider 1 205. Since the upper end of the limiting rod 2072 adopts an arc design, it can achieve adaptive clamping of the probe card through flexible contraction. For probe cards of different thicknesses, the two middle limiting rods 2072 will automatically adjust the clamping distance under the limiting action of the slider 2 2073 and the elastic contraction of the spring 2 2074, thereby firmly fixing the probe cards of different thicknesses. When the probe card is removed, the spring 1 203 and the spring 2 2074 will automatically spring back to reset, effectively solving the problem in the prior art that it is difficult to achieve adaptive clamping and fixing of probe cards corresponding to chips of different sizes.

[0045] To address the problem of inconvenient disassembly of the probe card frame, this structure solves the issue in the following way: When the outer shell 1 is pushed forcefully, the sliding column 304 in the locking mechanism 3, guided by the arc-shaped structure of the support frame 306, converts the upward pressure into a clockwise rotational force, causing the sliding rod 303 to rotate synchronously. When the cuboid at the bottom of the sliding rod 303 rotates to an angle that matches the sliding groove 302, it can smoothly slide out of the sliding groove 302, realizing the separation of the base 1 301 and the sliding rod 303, thus facilitating the disassembly of the probe card frame. If re-fixing is required, simply engage the telescopic rod 14 and press the outer shell 1. At this time, the cuboid at the bottom of the sliding rod 303 will rotate to a locking angle that cannot be pulled out, achieving a stable fixation of the entire frame and solving the problem of difficult disassembly of the probe card frame in the prior art.

[0046] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An adaptive probe card frame suitable for different chip sizes, comprising a housing (1), characterized in that: The inner wall of the outer shell (1) is provided with a clamping mechanism (2), the bottom end of the outer shell (1) is provided with a locking mechanism (3), and the bottom of the outer shell (1) is provided with a base (4). The clamping mechanism (2) includes multiple sleeves (201), which are fixedly connected to the inner wall of the outer shell (1). Each sleeve (201) has a sliding groove (202) on its inner wall. Each sleeve (201) has a spring (203) fixedly connected to the side of its inner wall away from each other. Each spring (203) has a sliding rod (204) fixedly connected to an adjacent end. Each sliding rod (204) has a slider (205) fixedly connected to an adjacent side of its outer wall. Each slider (205) is slidably connected to the corresponding sliding groove (202). Each sliding rod (204) has a gripper (206) fixedly connected to an adjacent end. Each gripper (206) has a telescopic component (207) on an adjacent end.

2. The self-adapting probe card frame suitable for different chip sizes according to claim 1, wherein: The locking mechanism (3) includes two bases (301), which are fixedly connected to the top left and right sides of the base (4). Each base (301) has a sliding groove (302) at its top and a sliding rod (303) at its top. The two sliding rods (303) are slidably connected to the corresponding sliding groove (302). Sliding columns (303) are fixedly connected to the left and right sides of the outer walls of the two sliding rods (303). 4) The top of each of the two slide rods (303) is fixedly connected to a spring three (305), and the top of each of the two spring three (305) is fixedly connected to a support frame (306). The two slide rods (303) are slidably connected to the inner wall of the corresponding support frame (306), and the two slide columns (304) are slidably connected to the middle of the outer wall of the corresponding support frame (306). The top of each of the two support frames (306) is fixedly connected to the left and right sides of the bottom of the outer wall of the outer shell (1).

3. The self-adapting probe card frame suitable for different chip sizes according to claim 1, wherein: The telescopic component (207) includes multiple sliding grooves (2071), which are respectively opened on the adjacent side of multiple grippers (206). Multiple limiting rods (2072) are provided on the adjacent side of each of the multiple grippers (206). The multiple limiting rods (2072) on the front and rear sides are respectively fixedly connected to the corresponding grippers (206). The multiple limiting rods (2072) in the middle are respectively slidably connected to the corresponding grippers (206). The opposite side of the multiple limiting rods (2072) in the middle is fixedly connected to sliders (2073). The multiple sliders (2073) are respectively slidably connected to the corresponding multiple sliding grooves (2071). Springs (2074) are fixedly connected between adjacent limiting rods (2072).

4. The self-adapting probe card frame suitable for different chip sizes of claim 1, wherein: The inner wall of the outer shell (1) is provided with multiple sliding grooves (5) at the top, and the bottom of each of the multiple grippers (206) is fixedly connected to a slider (6). The multiple sliding grooves (5) are slidably connected to the corresponding sliders (6).

5. The self-adapting probe card frame suitable for different chip sizes according to claim 1, wherein: The inner wall of the outer shell (1) is fixedly connected to the top left and right sides of the spring four (7), and the top of the two spring four (7) is fixedly connected to the same buffer pad (8).

6. The self-adapting probe card frame suitable for different chip sizes of claim 1, wherein: Wiring boxes (9) are fixedly connected to the top left and right sides of the outer wall of the outer shell (1), and cameras (10) are fixedly connected to the top of the two wiring boxes (9).

7. The self-adapting probe card frame suitable for different chip sizes according to claim 1, wherein: A transparent dust cover (11) is provided on the top of the outer wall of the outer shell (1). Metal sheets (12) are fixedly connected to the left and right sides of the outer wall of the outer shell (1). Magnet sheets (13) are fixedly connected to the left and right sides of the inner wall of the transparent dust cover (11). The two metal sheets (12) are respectively attached to the corresponding magnet sheets (13).

8. The self-adapting probe card frame suitable for different chip sizes according to claim 1, wherein: The top front and rear sides of the base 2 (4) are fixedly connected with telescopic rods (14), and both telescopic rods (14) are fixedly connected to the bottom of the outer wall of the outer shell (1). The top of the base 2 (4) is threaded with screws (15).

Images