曝光装置及曝光设备
By employing a lateral movement module and a linear motor module in the exposure equipment, the problem of lens center of gravity shift is eliminated, achieving high-precision lens positioning and stability. This solves the problems of lens positioning error and center of gravity shift in existing technologies, improving the equipment's working efficiency and the flexibility of imaging lens group design.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU YSPHOTECH INTERGRATED CIRCUIT EQUIP CO LTD
- Filing Date
- 2025-05-29
- Publication Date
- 2026-07-17
AI Technical Summary
Existing exposure equipment suffers from large lens repositioning errors, and insufficient rigidity of the Z-axis column makes it difficult to control the lens's verticality, resulting in severe center of gravity shift after multiple movements.
The horizontal movement module replaces the vertical lead screw structure, and a linear motor module and guide rail system are used. The Z-axis column structure is eliminated. The exposure lens barrel is driven by the horizontal movement module, and the lens position is precisely controlled by displacement sensor and range sensor.
It improves the repeatability and stability of the lens, avoids lens center of gravity shift, extends the service life of the device, and improves work efficiency and the flexibility of imaging lens group design.
Smart Images
Figure CN224519130U_ABST
Abstract
Claims
1. An exposure apparatus characterized by comprising: include: A frame (100) is equipped with a reflector (110), the reflector (110) is inclined, and the frame (100) is provided with a through hole (120), the through hole (120) is located below the reflector (110); An exposure assembly (200) includes an exposure lens barrel (210) and a lateral movement module (220). The lateral movement module (220) is mounted on the frame (100) and located on one side of the reflector (110). The exposure lens barrel (210) is connected to the output end of the lateral movement module (220) and can move horizontally toward or away from the reflector (110). The reflector (110) is used to reflect the light emitted from the exposure lens barrel (210) through the through hole (120).
2. The exposure apparatus according to claim 1, wherein The lateral movement module (220) is configured as a linear motor module, which includes two guide rails (221), a support platform (222), a mover (223), and a stator (224). The two guide rails (221) are symmetrically arranged on the frame (100), and the stator (224) is laid between the two guide rails (221). The bottom surface of the support platform (222) is symmetrically provided with two guide blocks (2221), which are located between the two guide rails (221) to allow the support platform (222) to slide and connect with the guide rails (221). The mover (223) is fixed between the two guide blocks (2221).
3. The exposure apparatus according to claim 2, wherein Air outlets (2222) are provided on the bottom surface of the support platform (222) corresponding to the position of the guide rail (221) and on the side of the guide block (2221) facing the corresponding guide rail (221). The air outlets (2222) are connected to an external air source.
4. The exposure apparatus according to claim 2, wherein The support platform (222) is connected to a displacement sensor (230).
5. The exposure apparatus according to claim 4, wherein The displacement sensor (230) includes a grating ruler (231) and a reading head (232). The grating ruler (231) is fixed to the inner wall of one of the guide rails (221), and the reading head (232) is fixed to the end of the guide block (2221) adjacent to the grating ruler (231) near the reflector (110).
6. The exposure apparatus according to one of claims 1, wherein The frame (100) is connected to a detachable housing (130), which is mounted above the through hole (120). The sidewall and bottom wall of the housing (130) facing the exposure assembly (200) are hollowed out, and the reflector (110) is mounted on the housing (130).
7. The exposure apparatus according to claim 6, wherein The housing (130) is equipped with a distance sensor (140), and the detection end of the distance sensor (140) is positioned facing the through hole (120).
8. The exposure apparatus according to one of claims 1, wherein The exposure lens barrel (210) has a limiting part (211) at one end away from the reflector (110). The limiting part (211) extends downward and can abut against the lateral movement module (220) to limit the exposure lens barrel (210) in the horizontal direction.
9. The exposure apparatus according to one of claims 1, wherein The exposure components (200) are provided in multiple ways, and the multiple exposure components (200) are arranged at intervals along the length direction of the frame (100). The reflector (110) is arranged in a one-to-one correspondence with the exposure components (200).
10. An exposure apparatus characterized by comprising: The device includes a base (300), a camera (400), a light source assembly, a support (500), and an exposure apparatus as described in any one of claims 1-9. The exposure apparatus is mounted on the base (300). The light source assembly and the reflector (110) are located on opposite sides of the exposure lens barrel (210). The camera (400) is mounted on the base (300) via a bracket (410) and is located on the side of the reflector (110) away from the exposure lens barrel (210). The support (500) is mounted on the base (300) and is located below the through hole (120) and the camera (400).