一种光刻机激光器的H / E冷凝器自动监测补水装置
By introducing low-level liquid level sensors, high-level liquid level sensors, and a water replenishment mechanism into the condenser, combined with electrical cabinet control, the problems of inconvenient observation of condenser water level and leakage have been solved, realizing automatic monitoring and water replenishment, preventing laser temperature rise and shutdown, and improving production economy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HEFEI QINGYI PHOTOMASK LTD
- Filing Date
- 2025-07-08
- Publication Date
- 2026-07-17
AI Technical Summary
The existing condenser has a simple structure, making it inconvenient to observe the water level. It needs to be manually disassembled for inspection, which makes it impossible to detect leaks in time. This causes the laser temperature to rise and the machine to shut down, resulting in economic losses.
By employing low-level liquid level sensors, high-level liquid level sensors, and a water replenishment mechanism, combined with electrical cabinet control, the system enables automatic monitoring and replenishment of the water tank level, timely detection of leaks, and alarm activation.
It enables automatic water level monitoring and replenishment, reduces manual intervention, avoids laser downtime caused by leakage, and improves production efficiency.
Smart Images
Figure CN224519135U_ABST
Abstract
Claims
1. A kind of H / E condenser automatic monitoring water supply device of photolithography machine laser, it is characterized in that: It includes an electrical cabinet, an H / E condenser, a low-level liquid level sensor, a high-level liquid level sensor, and a water replenishment mechanism. The H / E condenser is equipped with a water tank inside. The low-level liquid level sensor is installed inside the water tank at the lowest liquid level to detect whether the real-time water level in the tank is lower than the lowest liquid level and sends the detection signal to the electrical cabinet. The high-level liquid level sensor is installed at the highest liquid level inside the water tank to detect whether the real-time water level in the tank has reached the highest liquid level and sends the detection signal to the electrical cabinet. The electrical cabinet receives detection signals from the low-level liquid level sensor and the high-level liquid level sensor, and controls the water replenishment mechanism to replenish water to the water tank according to the detection signals.
2. The automatic monitoring and water replenishing device for H / E condenser of the laser of the photoetch machine according to claim 1, characterized in that: The water replenishment mechanism includes a distilled water tank and a water pump. The inlet of the water pump is connected to the distilled water tank via a water pipe, and the outlet of the water pump is connected to a water tank via a water pipe.
3. The automatic monitoring and water replenishing device for H / E condenser of the laser of the photoetch machine according to claim 2, characterized in that: The electrical cabinet receives detection signals from the low-level liquid level sensor and the high-level liquid level sensor, and controls the water replenishment mechanism to replenish the water tank according to the detection signals, including: The electrical cabinet receives the detection signal from the low-level liquid sensor. When the real-time water level in the water tank is lower than the minimum level, the electrical cabinet controls the water pump to work and pump the water from the distilled water tank into the water tank. The control cabinet receives the detection signal from the high-level liquid level sensor. When the real-time water level in the water tank reaches the maximum level, the control cabinet controls the water pump to stop working.
4. The automatic monitoring and water replenishing device for H / E condenser of the laser of the photoetch machine according to claim 3, characterized in that: The low-level liquid sensor is equipped with a minimum liquid level indicator light. When the real-time water level of the water tank is lower than the minimum liquid level, the minimum liquid level indicator light will light up red; when the real-time water level of the water tank is not lower than the minimum liquid level, the minimum liquid level indicator light will light up green. The high-level liquid level sensor is equipped with a maximum liquid level indicator light, which illuminates when the real-time water level in the water tank reaches the maximum liquid level.
5. The automatic monitoring and water replenishment device for the H / E condenser of the lithography machine laser according to claim 3, characterized in that: It also includes traffic lights and display panels; The indicator light is installed on the top of the H / E condenser. When the electrical cabinet detects a leak in the water tank, the red light will flash and an alarm will sound under the control of the electrical cabinet to remind personnel to check the water tank. The display panel receives and displays the real-time water level data of the water tank, which is converted from the detection signals of the low-level and high-level liquid level sensors by the electrical cabinet. At the same time, when the electrical cabinet detects a leak in the water tank, it will provide a text prompt under the control of the electrical cabinet to remind personnel to check the water tank.