An insulating device for electrodes in a Czochralski single crystal furnace
By setting ceramic outer and inner ring fixing components on the electrodes of the Czochralski single crystal furnace, the replacement of insulation devices is simplified, the problem of decreased insulation resistance caused by volatile deposition is solved, and the quality of single crystal silicon rods and furnace sealing are ensured.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MCL ELECTRONICS MATERIALS
- Filing Date
- 2025-08-14
- Publication Date
- 2026-07-17
AI Technical Summary
In the prior art, the insulation device between the electrode and the furnace body of the Czochralski single crystal furnace is prone to a decrease in insulation resistance due to the deposition of volatiles in the furnace during continuous crystal pulling, which can cause the electrode and furnace body to arc and ground, affecting the quality of the single crystal silicon rod. Furthermore, replacing the insulating ceramic ring is time-consuming and labor-intensive and can easily lead to seal failure.
The design employs a ceramic outer ring, a ceramic inner ring, and a fixing component. The ceramic inner ring is fitted onto the electrode and shields the bakelite ring. The external threaded sleeve is threadedly connected to the ceramic outer ring, and the internal threaded sleeve is connected to the inner wall of the furnace bottom plate. Replacement is possible by simply disassembling the ceramic outer ring, thus preventing volatiles from adhering to the inner ring.
It simplifies the replacement process of insulation devices, avoids damage to bakelite ring assemblies and furnace seal failure, and improves the production safety and quality of monocrystalline silicon rods.
Smart Images
Figure CN224519521U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of single crystal furnace technology, specifically to an insulating device for electrodes in a Czochralski single crystal furnace. Background Technology
[0002] Currently, monocrystalline silicon is mainly produced through the Czochralski method. This process centers on a Czochralski single-crystal furnace, whose electrodes are responsible for supplying a large current to the heater, melting the polycrystalline silicon and maintaining the growth of the single crystal. During operation, reliable insulation must be maintained between the electrodes and the metal components of the furnace; otherwise, equipment safety will be directly threatened, and crystal quality may be damaged due to discharge or contamination.
[0003] like Figure 3 As shown, existing technology uses an insulating ceramic ring 19 in conjunction with a bakelite ring kit 20 to insulate the electrode, and the insulating ceramic ring 19 is secured with a nut 21. However, during continuous crystal pulling, volatiles inside the furnace continuously deposit on the surface of the insulating ceramic ring 19, causing its insulation resistance to decrease, leading to arcing and grounding between the electrode and the furnace body, thereby reducing the quality of the monocrystalline silicon rod. Therefore, the insulating ceramic ring 19 needs to be disassembled and replaced after several crystal pulling operations. Replacement requires two operators: one operator uses a stick or similar object to support the electrode, while the other operator unscrews the nut 21 to disassemble the insulating ceramic ring 19. This replacement method is time-consuming and labor-intensive, and if the support from the stick or similar object is not stable enough, the bakelite ring kit 20 may become loose due to uneven stress, causing the furnace body seal to fail. Utility Model Content
[0004] To address the shortcomings of existing technologies, this invention provides an insulating device for electrodes in a Czochralski single crystal furnace. This device only requires disassembling the ceramic outer ring, and the process is simple and does not damage the bakelite ring assembly, thus preventing furnace seal failure.
[0005] The technical solution adopted by this utility model to solve the above-mentioned technical problems is as follows: an insulating device for electrodes of a Czochralski-type single crystal furnace, comprising a bakelite ring assembly disposed in the mounting holes for mounting the electrodes on the bottom plate of the single crystal furnace, and the electrodes passing through the bakelite ring assembly. The device further comprises a ceramic outer ring, a ceramic inner ring, and a fixing component. The ceramic inner ring is sleeved on the portion of the electrode that passes through the bottom plate of the single crystal furnace, and the ceramic inner ring covers the bakelite ring assembly. The ceramic outer ring is sleeved on the ceramic inner ring. The fixing component includes an external threaded sleeve and an internal threaded sleeve that are threadedly connected to the electrode, and the internal threaded sleeve is located inside the external threaded sleeve. The external threaded sleeve is used to press the ceramic outer ring against the inner wall of the bottom plate of the single crystal furnace, and the internal threaded sleeve is used to press the ceramic inner ring against the inner wall of the bottom plate of the single crystal furnace.
[0006] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, the external threaded sleeve includes a threaded part and a receiving part that are distributed vertically and fixedly connected. The threaded part is threadedly connected to the electrode, and the receiving part extends downward. The receiving part can press the ceramic outer ring against the inner wall of the furnace bottom plate of the single crystal furnace. The inner wall of the receiving part and the electrode form a receiving space, which is used to accommodate the internal threaded sleeve.
[0007] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, the top of the threaded portion is fixedly connected to a connecting ring, and the outer diameter of the connecting ring is smaller than the outer diameter of the threaded portion. The inner wall of the connecting ring is provided with an internal thread that mates with the external thread on the electrode surface.
[0008] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, there is a gap between the inner wall of the external threaded sleeve and the outer wall of the internal threaded sleeve.
[0009] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, the bakelite ring assembly includes a first bakelite ring and a second bakelite ring located in the mounting holes for mounting the electrode on the bottom plate of the single crystal furnace, and both the first bakelite ring and the second bakelite ring are sleeved on the electrode.
[0010] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, a sealing ring fitted on the electrode is provided between the first bakelite ring and the second bakelite ring.
[0011] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, the bakelite ring assembly includes a third bakelite ring sleeved on the electrode, and the third bakelite ring is located in the gap between the electrode and the outer wall of the bottom plate of the single crystal furnace.
[0012] As a further optimization of the insulating device for the electrode of a Czochralski single crystal furnace, the outer diameter of the third bakelite ring is the same as the diameter of the bottom of the electrode.
[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0014] This invention features a ceramic outer ring, a ceramic inner ring, and a fixing assembly. The ceramic inner ring is fitted onto the portion of the electrode that passes through the bottom plate of the single crystal furnace, and it also shields the bakelite ring assembly. The ceramic outer ring is fitted onto the ceramic inner ring. The fixing assembly includes an externally threaded sleeve and an internally threaded sleeve that are threaded to the electrode, with the internally threaded sleeve located inside the externally threaded sleeve. The externally threaded sleeve holds the ceramic outer ring against the inner wall of the bottom plate of the single crystal furnace, and the internally threaded sleeve holds the ceramic inner ring against the inner wall of the bottom plate of the single crystal furnace. During the crystal pulling process, volatiles inside the furnace continuously deposit on the surface of the ceramic outer ring, but do not adhere to the ceramic inner ring. Therefore, only the ceramic outer ring needs to be disassembled. Furthermore, when disassembling the ceramic outer ring, the externally threaded sleeve is first unscrewed, and then the ceramic outer ring is directly slid off along the electrode axis. This invention is simple to operate and does not damage the bakelite ring assembly, thus preventing furnace seal failure. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of this utility model;
[0016] Figure 2 This is a top view of the threaded part, connecting ring, and fixing assembly of this utility model;
[0017] Figure 3 This is a schematic diagram of existing technology;
[0018] The markings in the diagram are: 1. Fixing component, 2. External threaded sleeve, 3. Internal threaded sleeve, 4. Bakelite ring assembly, 5. Electrode, 6. Ceramic outer ring, 7. Ceramic inner ring, 8. First Bakelite ring, 9. Second Bakelite ring, 10. Third Bakelite ring, 11. Sealing ring, 12. Threaded part, 13. Receiving part, 14. Receiving space, 15. Connecting ring, 16. Single crystal furnace bottom plate, 17. Shim ring, 18. Spacing, 19. Insulating ceramic ring, 20. Bakelite ring kit, 21. Nut. Detailed Implementation
[0019] The technical solution of this utility model will be further described in detail below with reference to specific embodiments. The parts of this utility model that are not described or disclosed in detail in the following embodiments should be understood as prior art known or should be known by those skilled in the art, such as the structure of electrode 5, the position and structure of mounting holes, the structure of single crystal furnace, the fit between electrode 5 and single crystal furnace bottom plate 16, and the material of bakelite ring assembly 4, etc.
[0020] Example 1
[0021] An insulating device for electrodes in a Czochralski single crystal furnace, such as Figure 1 and Figure 2As shown, the device includes a bakelite ring assembly 4 disposed in the mounting holes of the electrode 5 and the bottom plate 16 of the single crystal furnace for mounting the electrode 5, and the electrode 5 passes through the bakelite ring assembly 4. The device also includes a ceramic outer ring 6, a ceramic inner ring 7, and a fixing assembly 1. The ceramic inner ring 7 is sleeved on the part of the electrode 5 that passes through the bottom plate 16 of the single crystal furnace, and the ceramic inner ring 7 covers the bakelite ring assembly 4. The ceramic outer ring 6 is sleeved on the ceramic inner ring 7. The fixing assembly 1 includes an external threaded sleeve 2 and an internal threaded sleeve 3 that are threadedly connected to the electrode 5, and the internal threaded sleeve 3 is located inside the external threaded sleeve 2. The external threaded sleeve 2 is used to press the ceramic outer ring 6 against the inner wall of the bottom plate 16 of the single crystal furnace, and the internal threaded sleeve 3 is used to press the ceramic inner ring 7 against the inner wall of the bottom plate 16 of the single crystal furnace.
[0022] During assembly, first, install the electrode 5 and the bakelite ring assembly 4 into place; then, fit the ceramic inner ring 7 onto the electrode 5 inside the single crystal furnace bottom plate 16, ensuring the ceramic inner ring 7 contacts the inner wall of the single crystal furnace bottom plate 16 to shield the bakelite ring assembly 4. Alternatively, a pad ring 17 can be fitted onto the electrode 5 inside the single crystal furnace bottom plate 16. Specifically, after fitting the pad ring 17 onto the electrode 5, connect it to the electrode 5 via an internal threaded sleeve 3, thus fixing the positions of the pad ring 17 and the ceramic inner ring 7. At this point, the pad ring 17 is pressed tightly against the ceramic inner ring 7. Next, fit the ceramic outer ring 6 onto the outside of the ceramic inner ring 7, ensuring the inner wall of the ceramic outer ring 6 is tightly fitted against the outer wall of the ceramic inner ring 7. Finally, connect the external threaded sleeve 2 to the electrode 5, pressing the ceramic outer ring 6 firmly against the inner wall of the single crystal furnace bottom plate 16. The assembly is now complete.
[0023] Since the inner ceramic ring 7 is completely located inside the outer ceramic ring 6 and the external threaded sleeve 2, volatiles in the furnace during crystal pulling will continuously deposit on the surface of the outer ceramic ring 6, rather than adhering to the inner ceramic ring 7. Therefore, only the outer ceramic ring 6 needs to be disassembled. When disassembling the outer ceramic ring 6, an operator can first unscrew the external threaded sleeve 2, while keeping the inner threaded sleeve 3 stationary, and press and fix the inner ceramic ring 7 and the pad ring 17. That is, the state of the inner ceramic ring 7 will not be changed, and the electrode 5 will remain locked. The state of the bakelite ring assembly 4 will also remain unchanged, thus preventing the bakelite ring assembly 4 from loosening and causing the furnace seal to fail. Then, the outer ceramic ring 6 can be directly slid off along the axial direction of the electrode 5, and a new outer ceramic ring 6 can be installed. Finally, the external threaded sleeve 2 can be reinstalled on the electrode 5.
[0024] The above are the basic embodiments of this utility model. Further improvements, optimizations, and limitations can be made based on the above to obtain the following embodiments:
[0025] Example 2
[0026] This embodiment is an improvement on embodiment 1. Its main structure is the same as that of embodiment 1. The improvement is that the external threaded sleeve 2 includes a threaded part 12 and a receiving part 13 that are distributed vertically and fixedly connected. The threaded part 12 is threadedly connected to the electrode 5. The receiving part 13 extends downward and can press the ceramic outer ring 6 against the inner wall of the single crystal furnace bottom plate 16. The inner wall of the receiving part 13 and the electrode 5 form a receiving space 14, which is used to receive the internal threaded sleeve 3.
[0027] Since both the internal threaded sleeve 3 and the pad ring 17 are located inside the external threaded sleeve 2, the threaded portion 12 of the external threaded sleeve 2 ensures that it is threadedly connected to the electrode 5 located inside the bottom plate 16 of the single crystal furnace, while the receiving portion 13 of the external threaded sleeve 2 can form a receiving space 14 between it and the electrode 5 located inside the bottom plate 16 of the single crystal furnace, and both the internal threaded sleeve 3 and the pad ring 17 are located within the receiving space 14.
[0028] Example 3
[0029] This embodiment is an improvement on Embodiment 2. Its main structure is the same as Embodiment 2, but the improvement lies in the following: To increase the tightness of the connection between the threaded portion 12 of the external threaded sleeve 2 and the electrode 5 located inside the furnace bottom plate 16 of the single crystal furnace, a connecting ring 15 is fixedly connected to the top of the threaded portion. The outer diameter of the connecting ring 15 is smaller than the outer diameter of the threaded portion 12, and the inner wall of the connecting ring 15 is provided with an internal thread that mates with the external thread on the surface of the electrode 5. While the connecting ring 15 is threadedly connected to the electrode 5 located inside the furnace bottom plate 16 of the single crystal furnace, the smaller outer diameter of the connecting ring 15 compared to the threaded portion 12 saves space. For ease of processing, the connecting ring 15 and the threaded portion 12 are integrally formed.
[0030] Example 4
[0031] This embodiment is an improvement on embodiment 2. Its main structure is the same as embodiment 2, but the improvement lies in the following: During the unscrewing of the external threaded sleeve 2, if there is no gap 18 between the inner wall of the external threaded sleeve 2 and the outer wall of the internal threaded sleeve 3, causing them to directly contact each other, the external threaded sleeve 2 may cause the internal threaded sleeve 3 to rotate to a certain extent. This could loosen the internal threaded sleeve 3, leading to the inability to tighten the ceramic inner ring 7, ultimately causing the bakelite ring assembly 4 to loosen and the furnace seal to fail. Therefore, there is a gap 18 between the inner wall of the external threaded sleeve 2 and the outer wall of the internal threaded sleeve 3. Thus, when the external threaded sleeve 2 is unscrewed, its rotation will not cause the internal threaded sleeve 3 to rotate.
[0032] Specifically, there is a gap 18 between the threaded portion 12 and the receiving portion 13 of the external threaded sleeve 2 and the outer wall of the internal threaded sleeve 3. During the process of tightening the threaded portion 12 to press the ceramic outer ring 6 against the inner wall of the single crystal furnace bottom plate 16, neither the threaded portion 12 nor the receiving portion 13 will come into contact with the internal threaded sleeve 3.
[0033] Example 5
[0034] This embodiment is an improvement on embodiment 1. Its main structure is the same as that of embodiment 1. The improvement is that the bakelite ring assembly 4 includes a first bakelite ring 8 and a second bakelite ring 9 located in the mounting holes on the bottom plate 16 of the single crystal furnace for mounting the electrode 5, and both the first bakelite ring 8 and the second bakelite ring 9 are sleeved on the electrode 5.
[0035] The first bakelite ring 8 and the second bakelite ring 9 are both located within the mounting hole and fitted onto the electrode 5, thus sealing the mounting hole. If either the first bakelite ring 8 or the second bakelite ring 9 is damaged and needs replacement, only one of them needs to be removed and replaced; if the first bakelite ring 8 and the second bakelite ring 9 were a single unit, then both would need to be replaced, which would be wasteful. To further enhance the sealing of the mounting hole, a sealing ring 11 is provided between the first bakelite ring 8 and the second bakelite ring 9, fitted onto the electrode 5.
[0036] Example 6
[0037] This embodiment is an improvement on Embodiment 1. Its main structure is the same as Embodiment 1, but the improvement lies in the following: to further enhance the sealing of the mounting hole, the bakelite ring assembly 4 includes a third bakelite ring 10 sleeved on the electrode 5, and the third bakelite ring 10 is located within the gap between the electrode 5 and the outer wall of the single crystal furnace bottom plate 16. The mounting hole is sealed from the outside of the single crystal furnace bottom plate 16. To ensure a good seal, the outer diameter of the third bakelite ring 10 is the same as the diameter of the bottom of the electrode 5.
[0038] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An insulation device for a Czochralski single crystal furnace electrode, comprising a bakelite ring assembly (4) arranged in a mounting hole of the furnace bottom plate (16) of the single crystal furnace for mounting the electrode (5) and through which the electrode (5) passes, characterized in that: The device further includes a ceramic outer ring (6), a ceramic inner ring (7), and a fixing component (1). The ceramic inner ring (7) is fitted on the part of the electrode (5) that passes through the bottom plate (16) of the single crystal furnace, and the ceramic inner ring (7) shields the bakelite ring assembly (4). The ceramic outer ring (6) is fitted on the ceramic inner ring (7). The fixing component (1) includes an external threaded sleeve (2) and an internal threaded sleeve (3) that are threaded to the electrode (5). The internal threaded sleeve (3) is located inside the external threaded sleeve (2). The external threaded sleeve (2) is used to press the ceramic outer ring (6) against the inner wall of the bottom plate (16) of the single crystal furnace, and the internal threaded sleeve (3) is used to press the ceramic inner ring (7) against the inner wall of the bottom plate (16) of the single crystal furnace.
2. The insulation device for a Czochralski single crystal furnace electrode according to claim 1, characterized by: The external threaded sleeve (2) includes a threaded part (12) and a receiving part (13) that are distributed vertically and fixedly connected. The threaded part (12) is threadedly connected to the electrode (5). The receiving part (13) extends downward and can hold the ceramic outer ring (6) against the inner wall of the bottom plate (16) of the single crystal furnace. The inner wall of the receiving part (13) and the electrode (5) form a receiving space (14), which is used to accommodate the internal threaded sleeve (3).
3. The insulation device for the Czochralski single crystal furnace electrode according to claim 2, characterized by: A connecting ring (15) is fixedly connected to the top of the threaded part (12), and the outer diameter of the connecting ring (15) is smaller than the outer diameter of the threaded part (12). The inner wall of the connecting ring (15) is provided with an internal thread that mates with the external thread on the surface of the electrode (5).
4. The insulation device for a Czochralski single crystal furnace electrode according to claim 1, characterized by: There is a gap (18) between the inner wall of the external threaded sleeve (2) and the outer wall of the internal threaded sleeve (3).
5. The insulation device for a Czochralski single crystal furnace electrode according to claim 1, characterized by: The bakelite ring assembly (4) includes a first bakelite ring (8) and a second bakelite ring (9) located in the mounting holes for mounting electrodes (5) on the bottom plate (16) of the single crystal furnace, and both the first bakelite ring (8) and the second bakelite ring (9) are sleeved on the electrodes (5).
6. The insulation device for the Czochralski single crystal furnace electrode according to claim 5, characterized by: A sealing ring (11) is provided between the first bakelite ring (8) and the second bakelite ring (9) and is sleeved on the electrode (5).
7. The insulation device for a Czochralski single crystal furnace electrode according to claim 1, characterized by: The bakelite ring assembly (4) includes a third bakelite ring (10) sleeved on the electrode (5), and the third bakelite ring (10) is located in the gap between the electrode (5) and the outer wall of the single crystal furnace bottom plate (16).
8. The insulation device for the Czochralski single crystal furnace electrode according to claim 7, characterized by: The outer diameter of the third bakelite ring (10) is the same as the diameter of the bottom of the electrode (5).