A dry-type transformer for semiconductor equipment

Abstract

This utility model relates to the technical field of dry-type transformers, and in particular to a dry-type transformer for semiconductor equipment, comprising: a transformer body mounted on a support mechanism, the transformer body being located inside an isolation mechanism; the support mechanism comprising: a mounting bracket mounted on the bottom end of the transformer body, at least two mounting brackets being mounted in parallel, each end of the mounting bracket having a threaded post, and fasteners mounted on the threaded post; a support frame, mounted in parallel to the mounting bracket, the threaded post passing through a through hole in the support frame, the support frame and the mounting bracket being connected by fasteners; and a support shaft slidably mounted inside the shaft cavity of the threaded post, a connecting frame mounted on the support shaft, and rollers rotatably mounted on the connecting frame, the support shaft and the threaded post being aligned one-to-one, the connection position between the support shaft and the threaded post being adjusted by a drive mechanism; it offers high flexibility in installation and maintenance.

Description

Technical Field

[0001] This utility model relates to the technical field of dry-type transformers, and in particular to a dry-type transformer for semiconductor equipment. Background Technology

[0002] Dry-type transformers are power transformation devices that do not use insulating oil. They dissipate heat through natural cooling or air cooling. In the semiconductor manufacturing process, dry-type transformers serve as key power equipment, providing stable power to various high-precision production equipment. With the continuous development of semiconductor technology, higher requirements are placed on the power supply quality, installation flexibility, and ease of maintenance of production equipment.

[0003] Existing dry-type transformers generally lack flexible movement and installation mechanisms in their design, which makes operation inconvenient when facing site changes, equipment upgrades or maintenance and repairs. This is especially true in clean rooms with limited space, where the entry and exit of large equipment becomes extremely difficult, increasing handling costs and time consumption. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a dry-type transformer for semiconductor equipment with high installation and maintenance flexibility.

[0005] This utility model discloses a dry-type transformer for semiconductor equipment, comprising: The transformer body is mounted on the support mechanism and is located inside the isolation mechanism. Supporting institutions include: Mounting brackets are installed at the bottom of the transformer body. At least two mounting brackets are installed in parallel. Threaded posts are provided at both ends of the mounting bracket along its length, and fasteners are installed on the threaded posts. The support frame is installed parallel to the mounting frame in a one-to-one correspondence. The threaded column passes through the through hole of the support frame, and the support frame and the mounting frame are connected by fasteners. The support shaft is slidably installed inside the shaft cavity of the threaded column. A connecting frame is installed on the support shaft, and rollers are rotatably installed on the connecting frame. The support shaft and the threaded column correspond one-to-one. The connection position between the support shaft and the threaded column is adjusted by the drive mechanism.

[0006] As a preferred embodiment of this utility model, the driving mechanism includes: The fastener is installed on the mounting bracket. A threaded rod is installed in the threaded inner hole of the fastener, and the support shaft is rotatably connected to the inner hole of the threaded rod. The drive rod is mounted on the threaded rod.

[0007] As a preferred embodiment of this utility model, the isolation mechanism includes: The housing has symmetrical through slots at both ends, and connecting slots are provided on the housing corresponding to the mounting bracket, with guides provided at the connecting slots; The mounting bracket is equipped with a limiting component, which is slidably connected to the guide component. The guide component and the mounting bracket are positioned by the limiting mechanism. Two sealing mechanisms are installed at the through slots at both ends of the housing.

[0008] As a preferred embodiment of this utility model, the limiting mechanism includes: The piston cylinder is mounted on the mounting bracket. Locating pins are slidably mounted at both ends of the piston cylinder along its length. The locating pins are connected to the ratchet grooves reserved on the guide. The locating pin has a chamfered structure on one side, and the ratchet groove reserved on the guide is a right-angle structure; The spring is connected to two locating pins at each end.

[0009] As a preferred embodiment of this utility model, the positioning pin is provided with an extension, which is used to connect and disconnect the positioning pin from the positioning pin.

[0010] As a preferred embodiment of this utility model, a buffer pad is provided at the connection between the guide and the mounting bracket.

[0011] As a preferred embodiment of this utility model, the sealing mechanism includes: Two sealed doors are mounted on the through groove of the box body by means of hinges, and the flip ends of the two sealed doors are connected; The drive shaft is rotatably mounted at the through hole of a sealed door. A locking plate is installed on the drive shaft, and the locking plate is connected to the reserved groove of the housing. The connector is installed on another sealed door, and the locking plate is slidably connected to the inner groove of the connector; An adjustment cap is provided on the drive shaft, and the adjustment cap is provided with an anti-slip structure.

[0012] As a preferred embodiment of this utility model, a filter screen is installed at the heat dissipation holes on the box body.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: the mounting bracket provides a bearing foundation for the transformer body. At least two parallel mounting brackets are connected to the support frame through threaded columns at both ends. With the help of fasteners, the relative position of the transformer body and the support frame can be firmly fixed, ensuring installation stability. The assembly holes on the support frame are used to connect with the ground or equipment base. The support shaft is slidably installed inside the shaft cavity of the threaded column. By adjusting its connection position with the threaded column through the drive mechanism, the rollers on the connecting bracket can be extended or retracted. When extended, it is convenient for the transformer body to be moved and transported. When retracted, it can be stably supported by the support frame. The overall structure takes into account both the reliability of installation and fixation and the convenience of movement and transport, improving the flexibility of equipment installation and maintenance. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a dry-type transformer for semiconductor equipment in the present invention at a first angle; Figure 2 This is a schematic diagram of the internal structure of a dry-type transformer used in semiconductor equipment according to this utility model. Figure 3 This is a schematic diagram of the housing structure of a dry-type transformer used in semiconductor equipment according to this utility model. Figure 4 This is a schematic diagram of the drive mechanism structure of a dry-type transformer used in semiconductor equipment according to this utility model. Figure 5 This is a schematic diagram of the sealing mechanism structure of a dry-type transformer used in semiconductor equipment according to this utility model. Figure 6 This invention relates to a dry-type transformer for semiconductor equipment. Figure 2 Enlarged structural diagram of section B; Figure 7 This invention relates to a dry-type transformer for semiconductor equipment. Figure 2 Schematic diagram of the cross-sectional structure of part A in the middle; The following components are labeled in the attached diagram: 1. Transformer body; 2. Support mechanism; 21. Mounting bracket; 22. Threaded column; 23. Fastener; 24. Support frame; 25. Support shaft; 26. Connecting frame; 27. Roller; 28. Drive mechanism; 28a. Fixing component; 28b. Threaded rod; 28c. Drive rod; 3. Isolation mechanism; 31. Housing; 32. Guide component; 33. Limiting component; 34. Limiting mechanism; 34a. Piston cylinder; 34b. Positioning pin; 34c. Spring; 34d. Extension component; 35. Sealing mechanism; 35a. Sealing door; 35b. Drive shaft; 35c. Locking plate; 35d. Connecting component; 35e. Adjusting cap; 36. Filter screen. Detailed Implementation

[0015] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0016] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0017] like Figures 1 to 7As shown, this embodiment provides a dry-type transformer for semiconductor equipment, comprising: The transformer body 1 is mounted on the support mechanism 2. The transformer body 1 is located inside the isolation mechanism 3, which is used to physically isolate the transformer body 1. Supporting mechanism 2 includes: Mounting bracket 21 is the basic structure that directly supports the transformer body 1. It is installed at the bottom of the transformer body 1. At least two mounting brackets 21 are installed in parallel. Threaded posts 22 are provided at both ends of the mounting bracket 21 along its length. Fasteners 23 are installed on the threaded posts 22. Support frame 24 is used to connect to the ground or equipment base. It is installed in parallel with mounting frame 21 in a one-to-one correspondence. Threaded post 22 passes through the through hole of support frame 24. Support frame 24 and mounting frame 21 are connected by fastener 23. Support frame 24 is provided with multiple assembly holes. The support shaft 25 is slidably installed inside the shaft cavity of the threaded column 22. A connecting frame 26 is installed on the support shaft 25, and a roller 27 is rotatably installed on the connecting frame 26. The support shaft 25 and the threaded column 22 correspond one-to-one. The connection position between the support shaft 25 and the threaded column 22 is adjusted by the drive mechanism 28. In this embodiment, the mounting bracket 21 provides a bearing base for the transformer body 1. At least two parallel mounting brackets 21 are connected to the support bracket 24 through threaded posts 22 at both ends. With the fasteners 23, the relative positions of the transformer body 1 and the support bracket 24 can be firmly fixed to ensure installation stability. The assembly holes on the support bracket 24 are used to connect to the ground or equipment base. The support shaft 25 is slidably installed inside the shaft cavity of the threaded post 22. The connection position between the support shaft 25 and the threaded post 22 can be adjusted by the drive mechanism 28, which can drive the rollers 27 on the connecting bracket 26 to extend or retract. When extended, it is convenient for the transformer body 1 to be moved and transported. When retracted, it can be stably supported by the support bracket 24. The overall structure takes into account the reliability of installation and fixation and the convenience of movement and transport, improving the flexibility of equipment installation and maintenance.

[0018] As a preferred embodiment of the above technical solution, such as Figures 1 to 6 As shown, the drive mechanism 28 includes: The fastener 28a is mounted on the mounting bracket 21. A threaded rod 28b is installed in the threaded inner hole of the fastener 28a. The support shaft 25 is rotatably connected to the inner hole of the threaded rod 28b. Drive rod 28c is mounted on threaded rod 28b; In this embodiment, the fixing member 28a is installed on the mounting bracket 21, and the threaded rod 28b in its threaded inner hole is rotatably connected to the support shaft 25. By rotating the drive rod 28c, the threaded rod 28b can be rotated. The sliding position of the support shaft 25 in the shaft cavity of the threaded column 22 is adjusted by using the threaded engagement, thereby controlling the extension and retraction of the roller 27 and improving the operational convenience of the support mechanism 2.

[0019] As a preferred embodiment of the above technical solution, such as Figures 1 to 3 As shown, isolation facility 3 includes: The housing 31 has symmetrical through slot structures at both ends. The housing 31 has a connecting slot corresponding to the mounting bracket 21, and a guide 32 is provided at the connecting slot. A buffer pad is provided at the connection between the guide 32 and the mounting bracket 21. The mounting bracket 21 is provided with a limiting component 33, which is slidably connected with the guide component 32. The guide component 32 and the mounting bracket 21 are positioned by the limiting mechanism 34. Two sealing mechanisms 35 are respectively installed in the through slots at both ends of the housing 31; In this embodiment, the enclosure 31 provides a closed space for the transformer body 1 to achieve physical isolation. The through slots at both ends, together with the sealing mechanism 35, can ensure the isolation effect and facilitate the connection of the circuit. The guide 32 at the connecting slot of the enclosure 31 and the limiting member 33 of the mounting frame 21 are slidably connected to facilitate the precise docking and installation of the isolation mechanism 3 and the support mechanism 2. The buffer pad between the guide 32 and the mounting frame 21 can reduce vibration transmission. The limiting mechanism 34 can fix the relative position of the guide 32 and the mounting frame 21, ensuring that the isolation mechanism 3 is installed firmly and improving the stability of equipment operation.

[0020] As a preferred embodiment of the above technical solution, such as Figures 2 to 7 As shown, the limiting mechanism 34 includes: Piston cylinder 34a is mounted on mounting bracket 21. Positioning pins 34b are slidably mounted at both ends of piston cylinder 34a along its length. Positioning pins 34b are connected to the ratchet grooves reserved on guide member 32. The locating pin 34b has a chamfered structure on one side, and the ratchet groove reserved on the guide 32 has a right angle structure; Spring 34c is connected to two locating pins 34b at both ends; An extension 34d is provided on the locating pin 34b, and the extension 34d is used to connect and disconnect the locating pin 34b from the locating pin 34b. In this embodiment, the piston cylinder 34a of the limiting mechanism 34 is mounted on the mounting bracket 21. The positioning pins 34b slidably mounted at both ends are connected to the ratchet groove of the guide member 32 under the action of the spring 34c. The chamfer on one side of the positioning pin 34b is matched with the right angle structure of the ratchet groove, which can realize unidirectional positioning when the guide member 32 and the mounting bracket 21 slide relative to each other, preventing the isolation mechanism 3 from accidentally disengaging. It is also easy to insert directly during assembly. The extension 34d on the positioning pin 34b is easy to manually drive the positioning pin 34b to disengage from the ratchet groove, realizing the separation of the two and ensuring the stable connection between the isolation mechanism 3 and the support mechanism 2.

[0021] As a preferred embodiment of the above technical solution, such as Figures 1 to 5 As shown, the sealing mechanism 35 includes: Two sealing doors 35a are mounted on the through slot of the housing 31 by hinges, and the flip ends of the two sealing doors 35a are connected. The drive shaft 35b is rotatably mounted at the through hole of a sealing door 35a. A locking plate 35c is mounted on the drive shaft 35b, and the locking plate 35c is connected to the reserved slot of the housing 31. Connector 35d is installed on another sealing door 35a, and locking piece 35c is slidably connected to the inner groove of connector 35d; An adjusting cap 35e is provided on the drive shaft 35b, and an anti-slip structure is provided on the adjusting cap 35e; In this embodiment, the two sealing doors 35a of the sealing mechanism 35 are rotatably mounted on the through slot of the housing 31 via hinges. The flip-up end connection can realize the closure and opening of the through slot, ensuring the sealing performance of the isolation mechanism 3. Rotating the adjusting cap 35e on the drive shaft 35b can drive the locking plate 35c to cooperate with the reserved slot of the housing 31 and the inner groove of the connector 35d at the same time, which not only fixes the relative position of the sealing door 35a and the housing 31, but also locks the connection end of the two sealing doors 35a to ensure reliable sealing. The overall structure facilitates quick opening and closing of the through slot, meeting the needs of circuit connection and maintenance.

[0022] As a preferred embodiment of the above technical solution, such as Figures 1 to 3 As shown, a filter screen 36 is installed at the heat dissipation holes on the housing 31; In this embodiment, the filter screen 36 installed at the heat dissipation holes of the housing 31 can not only ensure the air circulation between the inside of the housing 31 and the outside, help the transformer body 1 dissipate heat and prevent the operation stability from being affected by high temperature, but also effectively block external impurities from entering the inside of the housing 31, so as to prevent them from adhering to the transformer body 1 and affecting the insulation performance.

[0023] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A dry-type transformer for semiconductor equipment, characterized by, include: The transformer body (1) is mounted on the support mechanism (2), and the transformer body (1) is located inside the isolation mechanism (3); The support mechanism (2) includes: Mounting bracket (21) is installed at the bottom of the transformer body (1). At least two mounting brackets (21) are installed in parallel. Threaded posts (22) are provided at both ends of the mounting bracket (21) in the length direction. Fasteners (23) are installed on the threaded posts (22). The support frame (24) is installed parallel to the mounting frame (21) in a one-to-one correspondence. The threaded post (22) passes through the through hole of the support frame (24). The support frame (24) and the mounting frame (21) are connected by the fastener (23). A support shaft (25) is slidably installed inside the shaft cavity of the threaded column (22). A connecting frame (26) is installed on the support shaft (25), and a roller (27) is rotatably installed on the connecting frame (26). The support shaft (25) and the threaded column (22) correspond one-to-one. The connection position between the support shaft (25) and the threaded column (22) is adjusted by the drive mechanism (28).

2. The dry-type transformer for semiconductor equipment according to claim 1, characterized by, The drive mechanism (28) includes: A fastener (28a) is installed on the mounting bracket (21). A threaded rod (28b) is installed in the threaded inner hole of the fastener (28a). The support shaft (25) is rotatably connected to the inner hole of the threaded rod (28b). The drive rod (28c) is mounted on the threaded rod (28b).

3. The dry-type transformer for semiconductor equipment according to claim 2, characterized by, The isolation facility (3) includes: The box body (31) has symmetrical through slot structures at both ends. The box body (31) is provided with a connecting slot corresponding to the mounting bracket (21), and a guide (32) is provided at the connecting slot. The mounting bracket (21) is provided with a limiting member (33), the limiting member (33) and the guide member (32) are slidably connected, and the guide member (32) and the mounting bracket (21) are positioned by a limiting mechanism (34); Two sealing mechanisms (35) are respectively installed at the through slots at both ends of the housing (31).

4. The dry-type transformer for semiconductor equipment according to claim 3, characterized by, The limiting mechanism (34) includes: The piston cylinder (34a) is mounted on the mounting bracket (21). The piston cylinder (34a) has locating pins (34b) slidably mounted at both ends along its length. The locating pins (34b) are connected to the ratchet groove reserved on the guide member (32). The positioning pin (34b) has a chamfered structure on one side, and the ratchet groove reserved on the guide (32) is a right-angle structure; The spring (34c) is connected to the two positioning pins (34b) at both ends.

5. The dry transformer for semiconductor equipment according to claim 4, wherein An extension (34d) is provided on the positioning pin (34b), the extension (34d) being used for the positioning pin (34b) to connect and disconnect from the positioning pin (34b).

6. The dry-type transformer for semiconductor equipment according to claim 3, wherein A buffer pad is provided at the connection between the guide (32) and the mounting bracket (21).

7. The dry-type transformer for semiconductor equipment according to claim 3, wherein The sealing mechanism (35) includes: Two sealing doors (35a) are rotatably installed in the through slot of the housing (31) by hinges, and the flip ends of the two sealing doors (35a) are connected. A drive shaft (35b) is rotatably mounted at a through hole of a sealing door (35a). A locking plate (35c) is mounted on the drive shaft (35b), and the locking plate (35c) is connected to the reserved slot of the housing (31). A connector (35d) is installed on another of the sealing doors (35a), and the locking piece (35c) is slidably connected to the inner groove of the connector (35d); An adjusting cap (35e) is provided on the drive shaft (35b), and the adjusting cap (35e) is provided with an anti-slip structure.

8. The dry-type transformer for semiconductor equipment according to claim 3, characterized by, A filter screen (36) is installed at the heat dissipation holes provided on the housing (31).

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