一体化微波振荡与调谐杆集成波导装置及ECR离子源
By integrating microwave oscillation and tuning rod into a waveguide device, the microwave system of the ECR ion source is simplified, solving the problems of complex structure, large size, and low transmission efficiency, and achieving miniaturization and cost reduction.
CN224519865UActive Publication Date: 2026-07-17PEKING UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- PEKING UNIV
- Filing Date
- 2025-08-11
- Publication Date
- 2026-07-17
Smart Images
Figure CN224519865U_ABST
Abstract
本实用新型提供一种一体化微波振荡与调谐杆集成波导装置及ECR离子源，其中的装置包括微波激励腔、设置在所述微波激励腔上的磁控管、调谐组件和法兰组件；其中，在所述微波激励腔上设置有调谐窗口，所述调谐组件通过所述调谐窗口限位在所述微波激励腔上，用于微波阻抗匹配；所述磁控管用于产生微波，所述微波通过所述微波激励腔进行约束及传播；所述法兰组件用于实现所述微波激励腔与外部离子源放电室的连接。利用上述实用新型能够减小装置整体体积，提升微波传输效率，成本低，便于装配及调试。
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