An integrated linear motor slide

Abstract

This utility model relates to the field of slide table technology, and in particular discloses an integrated linear motor slide table, including a base, a slide rail disposed on the base, a slider slidably disposed on the slide rail, a first slide table fixedly connected to the slider, a drive assembly for driving the slide table to reciprocate on the slide rail, and an electrical drive system for supplying electrical energy to the drive assembly. The first slide table is located above the slider, the drive assembly is located between the base and the first slide table, and the electrical drive system is connected to the base. The drive assembly is a linear motor, which has a stator and a mover that works in conjunction with the stator. The stator is mounted on the base and is arranged parallel to the slide rail. The mover is connected to the first slide table. When the mover is energized, it interacts with the stator to generate an electromagnetic thrust that drives the first slide table to slide along the slide rail.

Description

Technical Field

[0001] This utility model relates to the field of slide table equipment technology, and in particular discloses an integrated linear motor slide table. Background Technology

[0002] Currently, in the field of industrial linear motion, traditional mechanical transmission devices (such as ball screws and rack and pinion gears) have inherent defects: the mechanical transmission chain causes backlash, wear, and lag in dynamic response, which cannot meet the stringent requirements of fields such as semiconductors and precision optics. Although the linear motor direct drive technology that emerged in the early 21st century eliminated the transmission chain, early products adopted a split structure, which had problems such as accumulated assembly errors, low heat dissipation efficiency, and insufficient protection levels. Utility Model Content

[0003] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide an integrated linear motor slide.

[0004] To achieve the above objectives, this utility model provides an integrated linear motor slide table, comprising a base, a slide rail mounted on the base, a slider slidably mounted on the slide rail, a first slide table fixedly connected to the slider, a drive assembly for reciprocating motion of the slide table on the slide rail, and an electrical drive system for supplying electrical energy to the drive assembly. The first slide table is located above the slider, the drive assembly is located between the base and the first slide table, and the electrical drive system is connected to the base. The drive assembly is a linear motor, having a stator and a mover that cooperates with the stator. The stator is mounted on the base and is arranged parallel to the slide rail. The mover is connected to the first slide table, and when energized, it interacts with the stator to generate electromagnetic thrust, driving the first slide table to slide along the slide rail.

[0005] Furthermore, the first slide has a base plate, a first side plate and a second side plate disposed on both sides of the base plate and parallel to each other, the base plate, the first side plate and the second side plate are combined to form a U-shape, and the first slide is used to carry materials conveyed by the belt.

[0006] Furthermore, the electrical drive system has a conductive slide rail and a current collector that slides and conducts through the conductive slide rail. The current collector is connected to the first slide table via a connector. The conductive slide rail is used to transmit external electrical energy, and the current collector transmits the electrical energy transmitted by the conductive slide rail to the drive assembly for driving.

[0007] Furthermore, a tensioner is provided at the end of the conductive slide rail. The tensioner maintains a certain tension on the conductive slide rail to prevent the current collector from sliding and deviating on the conductive slide rail, thus affecting the continuous power supply.

[0008] Furthermore, the base is also provided with a driver that works in conjunction with the drive assembly and is mounted on the sliding module. The driver uses external electrical energy supplied by the power drive assembly to adjust the voltage of the drive assembly in order to control the conveying speed of the slide.

[0009] Furthermore, the base is also provided with an encoder that is fixedly connected to the stator, and the encoder detects the position of the moving part as it slides with the first slide in real time.

[0010] Furthermore, a pressure sensor is also provided on the slide rail, which is used to detect the pressure distribution on the slide rail.

[0011] Furthermore, the base is also equipped with a limit switch. When the first slide moves to a preset position, it triggers the limit switch. The limit switch sends a signal to the control system of the integrated linear motor slide to control the first slide to stop moving.

[0012] Furthermore, the base is assembled from multiple substrates, each substrate having a U-shaped cross-section. Each substrate has a support plate and two parallel support plates located on the upper side of the support plate. Both support plates and the base plate are provided with cooling holes. The cooling holes of two adjacent substrates are connected, and an external cooling air mechanism inputs cold air into the cooling holes to dissipate heat from the base.

[0013] Furthermore, the slide rail is provided with a dustproof coating to prevent dust from adhering to the slide rail and causing wear and corrosion, thereby extending the service life of the equipment.

[0014] The beneficial effects of this utility model are:

[0015] (1) This utility model adopts direct drive technology of linear motor, in which the stator and mover interact to generate electromagnetic thrust, eliminating the traditional transmission chain (such as lead screw and belt), avoiding mechanical loss, and achieving high response speed and sub-micron positioning accuracy. The integrated structure integrates the slide rail, drive component (linear motor), and electrical system (conductive slide rail + current collector) into a U-shaped base, improving space utilization. The encoder monitors the position of the mover in real time, and together with the limit switch and pressure sensor, forms a closed-loop control to ensure dynamic response and load balance.

[0016] (2) The electrical system adopts a conductive sliding rail + current collector scheme, coupled with an end tensioner, to ensure that the contact resistance of the current collector is <5mΩ and the voltage fluctuation is <2% during sliding, supporting a 20 million cycle life. The U-shaped structure of the base integrates cooling holes, which, together with the external air cooling system, keeps the motor temperature rise at a suitable temperature, extending the insulation life. The dustproof coating on the sliding rail surface reduces dust adhesion by 90%, reducing the wear rate. The modular base (spliced ​​substrate) supports quick assembly and disassembly, shortening maintenance time.

[0017] (3) The slide table adopts a U-shaped groove structure (base plate + double side plates). Pressure sensors monitor the pressure distribution of the slide rail in real time, reducing the overload protection response time. The drive system integrates an intelligent driver that can dynamically adjust the voltage (accuracy ±0.5%) to achieve stepless speed regulation. The limit switch is linked with the control system, and the emergency braking distance is <5mm (5m / s operating condition). Cooling holes and dustproof coating work together to create a dust-free environment. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of an integrated linear motor slide structure according to the present invention;

[0019] Figure 2 This is a schematic diagram of the slide structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the drive component structure of this utility model.

[0021] The reference numerals in the attached drawings include: 1. base; 2. slide rail; 3. slider; 4. first slide table; 5. drive assembly; 6. electrical drive system; 7. stator; 8. mover; 11. base plate; 12. first side plate; 13. second side plate; 14. conductive slide rail; 15. current collector; 16. tensioner; 17. driver; 18. encoder; 21. support plate; 22. support plate; 23. dustproof coating. Detailed Implementation

[0022] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0023] Please see Figures 1 to 3 As shown, this utility model discloses an integrated linear motor slide table, comprising a base 1, a slide rail 2 mounted on the base 1, a slider 3 slidably mounted on the slide rail 2, a first slide table 4 fixedly connected to the slider 3, a drive assembly 5 for reciprocating motion of the slide table on the slide rail 2, and an electrical drive system 6 for supplying electrical energy to the drive assembly 5. The first slide table 4 is located above the slider 3, the drive assembly 5 is located between the base 1 and the first slide table 4, and the electrical drive system 6 is connected to the base 1. The drive assembly 5 is a linear motor, having a stator 7 and a mover 8 that cooperates with the stator 7. The stator 7 is mounted on the base 1 and is arranged parallel to the slide rail 2. The mover 8 is connected to the first slide table 4. When the mover 8 is energized, it interacts with the stator 7 to generate electromagnetic thrust, driving the first slide table 4 to slide along the slide rail 2.

[0024] In practical use, a direct linear motor drive technology is adopted (the stator is fixed to the base 1, and the mover is rigidly connected to the slide), eliminating intermediate transmission links such as lead screws and gears, improving transmission efficiency to over 95%, and reducing mechanical lag time to ≤3ms. The stator and slide rail 2 are arranged in parallel, and the direction of electromagnetic thrust is completely consistent with the direction of slide movement, avoiding lateral force interference and achieving a repeatability accuracy of ±0.005mm. The drive component 5 is integrated between the base 1 and the slide, increasing overall rigidity by 40%. The slider 3 and slide rail 2 use high-precision ball / roller guides, combined with the zero backlash characteristic of the linear motor, achieving a low-speed crawling threshold as low as 0.01mm / s, suitable for precision positioning and dynamic scanning scenarios.

[0025] Specifically, the first slide table 4 has a base plate 11, a first side plate 12 and a second side plate 13 disposed on both sides of the base plate 11 and parallel to each other. The base plate 11, the first side plate 12 and the second side plate 13 are combined to form a U-shape. The first slide table 4 is used to carry materials conveyed by the belt.

[0026] In practical use, the U-shaped structure (base plate 11 + double parallel side plates) forms a closed frame through the principle of triangular mechanics, significantly improving the overall rigidity of the slide table. The base plate 11, as the main load-bearing surface, distributes the load evenly, while the two side plates provide symmetrical support, suppressing bending deformation and torsional vibration of the slide table during high-speed reciprocating motion. Experimental data shows that the U-shaped structure improves stiffness by more than 40% compared to traditional single-layer plate structures. The perpendicular connection (90° angle) between the side plates and the base plate 11 forms an I-beam-like section, optimizing material distribution and maintaining equivalent bending strength while reducing weight by 25%. This design is particularly suitable for precision machining scenarios—when the slide table bears an eccentric load (such as a heavy workpiece placed on one side), the side plates can offset the overturning moment through torque balance, ensuring uniform pressure on the guide rail contact surface (deviation <5%) and extending the service life of the slider 3 and the guide rail 2. The two side plates constitute a physical protective boundary, preventing the load-bearing material from sliding laterally during the slide table's acceleration / deceleration. Flexible buffer strips can be integrated into the inner side of the side panel to absorb impact energy during accidental material collisions, preventing workpiece damage caused by rigid impacts. The internal space of the U-shaped channel forms a standardized material carrying area, compatible with various carriers such as pallets and jigs.

[0027] Specifically, the electrical drive system 6 has a conductive slide rail 14 and a current collector 15 that slides and is connected to the conductive slide rail 14. The current collector 15 is connected to the first slide table 4 via a connector. The conductive slide rail 14 is used to transmit external electrical energy, and the current collector 15 transmits the electrical energy transmitted by the conductive slide rail 14 to the drive assembly 5 for driving.

[0028] In actual use, the sliding engagement between the conductive slide rail 14 and the current collector 15 enables uninterrupted power supply, breaking through the bending life limitation of traditional cable drag chains (slide rail life > 10). 6The cycle time is 3-5 times that of a cable chain. The current collector 15 uses multi-point brush contact to ensure stable current transmission (voltage fluctuation < ±1%).

[0029] In this embodiment, a graphene composite lubricating coating is provided at the contact area between the conductive slide rail 14 and the current collector 15. This coating has extremely high conductivity and an extremely low coefficient of friction, which not only further reduces resistance loss during power transmission and improves the transmission efficiency to over 98%, but also effectively reduces mechanical wear between the brush of the current collector 15 and the conductive slide rail 14, extending the brush's service life by more than 2 times, thus ensuring the stability and reliability of the electrical drive system 6 under long-term high-frequency operation.

[0030] Specifically, a tensioner 16 is provided at the end of the conductive slide rail 14. The tensioner 16 maintains a certain tension on the conductive slide rail 14 to prevent the current collector 15 from sliding and deviating on the conductive slide rail 14, thus affecting the continuous power supply.

[0031] In practical use, the tensioner 16 maintains the conductive slide rail 14 at a certain tension, effectively preventing the current collector 15 from shifting due to slack. When the slide rail is under appropriate tension, the contact between the current collector 15 and the slide rail is tighter and more stable. For example, in a high-speed sliding table system, even if the slide table moves rapidly, the current collector 15 can slide smoothly on the tensioned slide rail with minimal contact resistance fluctuation, controlling voltage fluctuations within ±0.5%, ensuring a stable power supply to the drive component 5, preventing malfunctions or abnormal operation of the drive component 5 due to unstable power supply, and guaranteeing the reliable operation of the entire integrated linear motor slide table. Tensioning the slide rail reduces abnormal friction and collisions of the current collector 15 during sliding. If the slide rail tension is insufficient, the current collector 15 may jump or shift during sliding, generating unnecessary friction and impact with the slide rail, accelerating the wear of both the current collector 15 and the slide rail. The stable tension maintained by the tensioner 16 makes the contact between the current collector 15 and the slide rail more uniform, reducing the degree of wear. Tests have shown that by using tensioner 16, the wear rate of current collector 15 and slide rail can be reduced by 30%-40%, which greatly extends the service life of key components of the electric drive system 6 and reduces the maintenance cost and replacement frequency of the equipment.

[0032] In this embodiment, the tensioner 16 is equipped with an intelligent tension monitoring module, which can monitor the tension value of the conductive slide rail 14 in real time and feed the data back to the control system.

[0033] In actual use, if the tension fluctuates abnormally and deviates from the preset safety range, the control system will immediately issue an alarm and automatically adjust the working state of the tensioner 16, so that the tension of the conductive slide rail 14 can be quickly restored to a stable state, further ensuring that the current collector 15 slides smoothly on the slide rail, and ensuring the continuity and stability of power supply.

[0034] Specifically, the base 1 is also provided with a driver 17 that works in conjunction with the drive assembly 5 and is installed on the sliding module. The driver 17 uses the external power supplied by the power drive assembly 5 to adjust the voltage of the drive assembly 5 in order to control the conveying speed of the slide.

[0035] In practical use, the driver 17 can flexibly adjust the external electrical energy supplied to the drive assembly 5, thereby precisely controlling the conveying speed of the slide table. In different production processes, the slide table may need to operate at different speeds; for example, a lower and more stable speed is required during fine machining, while a higher speed is needed for rapid material transfer. The driver 17 can precisely adjust the voltage according to actual needs, keeping the slide table speed error within a minimal range. By adjusting the voltage of the drive assembly 5 to control the slide table speed, the integrated linear motor slide table can adapt to different workloads and operating conditions. When the slide table is carrying heavy materials, the driver 17 can appropriately increase the voltage to increase the output power of the drive assembly 5, ensuring that the slide table still operates at a stable speed; while under light load conditions, reducing the voltage can reduce energy consumption. This adaptive adjustment capability allows the equipment to maintain good performance under different environments and tasks, improving the equipment's versatility and applicability, and enabling its widespread application in various industries and production scenarios.

[0036] In this embodiment, the driver 17 integrates an intelligent adaptive algorithm module. This module can automatically adjust the voltage regulation strategy based on factors such as the real-time load of the slide, changes in running resistance, and ambient temperature. When the slide is carrying heavy materials, causing increased running resistance, the algorithm module quickly calculates and appropriately increases the output voltage to ensure the slide maintains a stable conveying speed. Furthermore, when the ambient temperature is too high and affects motor performance, it can dynamically optimize the voltage output, ensuring that the drive component 5 is always in a highly efficient and stable operating state, further improving the accuracy of slide speed control and the reliability of equipment operation.

[0037] Specifically, the base 1 is also provided with an encoder 18 fixedly connected to the stator 7, and the encoder 18 detects in real time the position of the moving part 8 as it slides with the first slide table 4.

[0038] In practical use, encoder 18 monitors the position of the slide table in real time, achieving dynamic trajectory compensation during high-speed reciprocating motion. By establishing a kinematic model (based on the Newton-Euler equations), the data from encoder 18 is used for feedforward control: predicting the inertial load of the moving part 8 (mass identification error <2%), and correcting the driving torque in advance. The position data provided by encoder 18 provides a crucial basis for slide table speed control. Based on the feedback from encoder 18, the control system can accurately calculate the actual speed of the slide table at different positions and compare it with the preset speed. Once a deviation occurs, the output of drive component 5 is quickly adjusted to achieve precise speed regulation.

[0039] In this embodiment, the encoder 18 is also equipped with a high-precision temperature compensation module, which can monitor the temperature changes of the encoder 18 itself and its surrounding environment in real time. Since temperature fluctuations affect the physical characteristics of the internal components of the encoder 18, potentially leading to deviations in detection accuracy, the temperature compensation module corrects the encoder 18's detection results in real time based on the detected temperature data and using a built-in algorithm. For example, in high-temperature environments, it can effectively eliminate position detection errors caused by factors such as thermal expansion, enabling the encoder 18 to maintain a high-precision position detection of ±0.005mm within a wide temperature range of -20℃ to 80℃, further improving the accuracy and stability of the slide position control.

[0040] Specifically, the slide rail 2 is also equipped with a pressure sensor, which is used to detect the pressure distribution on the slide rail 2.

[0041] In actual use, the pressure sensor on slide rail 2 can detect the pressure distribution it bears in real time. When the slide table is carrying materials, uneven load may occur. If the local pressure is too high, it may cause deformation or even damage to slide rail 2. The pressure sensor can capture these abnormal pressure changes in time. Once the pressure exceeds the safe range, the system can react quickly, such as reducing the slide table's operating speed or stopping operation, to prevent further damage to the equipment. For example, in the process of conveying heavy mechanical parts, it can effectively prevent irreversible damage to slide rail 2 due to overload, greatly improving the safety and stability of equipment operation and reducing the probability of failure and maintenance costs. By detecting the pressure distribution, the pressure sensor provides key data for optimizing equipment performance. The operating parameters of the slide table can be adjusted according to the pressure data, such as appropriately increasing the operating speed in areas with low pressure and reducing the speed and increasing lubrication in areas with high pressure, making the operation of the slide table more reasonable and efficient. At the same time, understanding the pressure distribution helps to discover problems in the equipment design or installation, such as whether there is uneven installation leading to local pressure concentration, so that timely adjustments and improvements can be made, thereby improving the working efficiency and performance of the entire integrated linear motor slide table.

[0042] Specifically, the base 1 is also equipped with a limit switch. When the first slide 4 moves to a preset position, it triggers the limit switch. The limit switch sends a signal to the control system of the integrated linear motor slide to control the first slide 4 to stop moving.

[0043] In practical use, limit switches provide a robust safety barrier for integrated linear motor slides. During the high-speed reciprocating motion of the slide, if it becomes uncontrollable due to drive system malfunction or program abnormalities, without limit switches, the slide may continue to move, potentially colliding violently with surrounding equipment, causing severe damage or even accidents. Limit switches, precisely preset at the slide's travel boundaries, trigger instantly when the slide reaches its limit position, sending a signal to the control system and causing emergency braking within milliseconds. For example, in automated warehousing equipment, this effectively prevents collisions between the slide and shelves, protecting equipment and goods, significantly reducing safety risks, ensuring personnel safety, and maintaining a stable production environment. The presence of limit switches greatly simplifies the control logic and maintenance process of integrated linear motor slides. From a control perspective, only the trigger position needs to be set in the system; complex algorithms are not required to accurately calculate the slide's travel endpoint, reducing programming difficulty and system computation, and improving system stability. In terms of maintenance, limit switches are simple in structure and highly reliable. Routine checks only require verifying their normal triggering; replacement is convenient and cost-effective in case of failure. Even if the control system malfunctions, the limit switches can still function independently, ensuring that the slide table does not run excessively, making it easier for maintenance personnel to troubleshoot other faults, shortening downtime, and improving equipment utilization.

[0044] Specifically, the base 1 is composed of multiple substrates spliced ​​together. The cross-section of the substrate is U-shaped. The substrate has a support plate 21 and two parallel support plates 22 located on the upper side of the support plate 21. Both support plates 22 and the bottom plate 11 are provided with cooling holes. The cooling holes of two adjacent substrates are connected. An external cooling air mechanism inputs cold air into the cooling holes to dissipate heat from the base 1.

[0045] In practical use, the unique U-shaped structure of base 1, combined with the cooling hole design, provides an efficient solution for heat dissipation. An external cooling fan quickly introduces cool air into the cooling holes, creating a good airflow path inside base 1. Since the heat generated by the motor accumulates near base 1 during operation, the cool air introduced through the cooling holes directly removes this heat, preventing excessive heat accumulation and subsequent performance degradation. Experiments show that this heat dissipation method can reduce the motor's operating temperature by 15-20℃, ensuring that the winding temperature remains within a safe range during long-term operation, maintaining stable output power, reducing overheating-induced failures, extending motor lifespan, and ensuring stable long-term operation of the integrated linear motor slide. The U-shaped cross-section of base 1, together with the support plate 21 and two parallel support plates 22, forms a robust mechanical support system. The support plate 21 bears the main weight, while the support plates 22 enhance the lateral stability of the structure, effectively resisting lateral forces and vibrations generated during slide movement. Compared to traditional flat base 1, this structure improves deformation resistance by more than 30%. When carrying heavy materials or operating at high speeds, it maintains good stability, reduces swaying and displacement, and ensures precise operation of the slide. Furthermore, the placement of cooling holes cleverly reduces the overall weight of the base 1 while ensuring heat dissipation, achieving lightweight design without compromising structural strength and further optimizing equipment performance.

[0046] Specifically, the slide rail 2 is provided with a dustproof coating 23, which prevents dust from adhering to the slide rail 2 and causing wear and corrosion, thereby extending the service life of the equipment.

[0047] In actual use, in real production environments, once dust particles adhere to the slide rail 2, they will continuously rub against the surface of the slide rail 2 like sandpaper as the slide table reciprocates, causing scratches and wear, affecting the smoothness of the slide table's movement and positioning accuracy. With the dustproof coating 23, the degree of wear can be reduced by more than 60%. Taking the slide table on a precision optical instrument production line as an example, it can ensure that the slide table maintains a high-precision positioning of ±0.01mm for a long time, ensuring stable production of high-quality products. The dustproof coating 23 has good chemical stability, not only preventing dust but also isolating the slide rail 2 from direct contact with corrosive media. Salt spray testing has verified that the slide rail 2 coated with the dustproof coating 23 extends its corrosion resistance time, greatly slowing down the process of damage caused by corrosion, reducing the overall frequency of equipment maintenance and replacement, saving enterprises significant equipment maintenance costs, and ensuring long-term stable operation of the equipment.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. An integrated linear motor slide, characterized by: The system includes a base (1), a slide rail (2) mounted on the base (1), a slider (3) slidably mounted on the slide rail (2), a first slide (4) fixedly connected to the slider (3), a drive assembly (5) that drives the slide to reciprocate on the slide rail (2), and an electrical drive system (6) that supplies electrical energy to the drive assembly (5). The first slide (4) is located above the slider (3), and the drive assembly (5) is located between the base (1) and the first slide (4). The electrical drive system (6) has a conductive slide rail (14) and a current collector (15) that slides and conducts through the conductive slide rail (14). The current collector (15) supplies electrical energy to the drive assembly (5). The first slide (4) is connected by a connector. The conductive slide rail (14) is used to transmit external electrical energy. The current collector (15) transmits the electrical energy transmitted by the conductive slide rail (14) to the drive assembly (5) for driving. The drive assembly (5) is a linear motor. The drive assembly (5) has a stator (7) and a mover (8) that works with the stator (7). The stator (7) is mounted on the base (1) and is arranged parallel to the slide rail (2). The mover (8) is connected to the first slide (4). After the mover (8) is energized, it interacts with the stator (7) to generate electromagnetic thrust, which drives the first slide (4) to slide along the slide rail (2).

2. The integrated linear motor slide of claim 1, wherein: The first slide (4) has a base plate (11), a first side plate (12) and a second side plate (13) located on both sides of the base plate (11) and parallel to each other. The base plate (11), the first side plate (12) and the second side plate (13) are combined to form a U-shape. The first slide (4) is used to carry the conveyor belt to transport materials.

3. The integrated linear motor slide of claim 1, wherein: A tensioner (16) is provided at the end of the conductive slide rail (14). The tensioner (16) maintains a certain tension on the conductive slide rail (14) to prevent the current collector (15) from sliding off the conductive slide rail (14) and affecting the continuous power supply.

4. The integrated linear motor slide of claim 1, wherein: The base (1) is also provided with a driver (17) that works in conjunction with the drive assembly (5) and is installed on the sliding module. The driver (17) uses the external power supplied by the power drive assembly (5) to adjust the voltage of the drive assembly (5) to control the conveying speed of the slide.

5. The integrated linear motor slide of claim 1, wherein: The base (1) is also provided with an encoder (18) fixedly connected to the stator (7), and the encoder (18) detects in real time the position of the moving part (8) sliding with the first slide (4).

6. The integrated linear motor slide of claim 1, wherein: The slide rail (2) is also equipped with a pressure sensor, which is used to detect the pressure distribution on the slide rail (2).

7. The integrated linear motor slide of claim 1, wherein: The base (1) is also equipped with a limit switch. When the first slide (4) moves to the preset position, it triggers the limit switch. The limit switch sends a signal to the control system of the integrated linear motor slide to control the first slide (4) to stop moving.

8. The integrated linear motor slide of claim 1, wherein: The base (1) is made up of multiple substrates. The cross-section of the substrate is U-shaped. The substrate has a support plate (21) and two parallel support plates (22) located on the upper side of the support plate (21). The two support plates (22) and the bottom plate (11) are provided with cooling holes. The cooling holes of two adjacent substrates are connected. The external cooling air mechanism inputs cold air into the cooling holes to dissipate heat from the base (1).

9. The integrated linear motor slide of claim 1, wherein: The slide rail (2) is provided with a dustproof coating (23). The dustproof coating (23) prevents dust from adhering to the slide rail (2) and causing wear and corrosion, thereby extending the service life of the equipment.

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