Resonator devices, filters, and multiplexers

By optimizing the design of the surface acoustic wave filter through cascaded dual-mode surface acoustic wave (DMS) resonators and setting an electrically isolated grounding terminal, the balance between suppression and loss levels was solved, and the signal isolation effect was improved.

CN224521029UActive Publication Date: 2026-07-17WUHAN GRANDEUR MICROELECTRONICS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
WUHAN GRANDEUR MICROELECTRONICS CO LTD
Filing Date
2025-04-27
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing surface acoustic wave (SAW) filters are difficult to design simultaneously to achieve both high suppression levels and optimal loss levels, especially in narrow frequency band spacing, where signal leakage and interference problems are prominent.

Method used

By employing at least two cascaded dual-mode surface acoustic wave (DMS) resonators and electrically isolating their input and output ground terminals, the resonator design is optimized to improve the suppression level outside the passband while keeping the filter order and topology unchanged.

Benefits of technology

Without increasing the filter order or changing the topology, it significantly improves the suppression level outside the passband and enhances signal isolation, making it suitable for unbalanced signal processing.

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Abstract

This application provides a resonator device, a filter, and a multiplexer, comprising a resonant unit connected between a signal input terminal and a signal output terminal. The resonant unit includes at least two cascaded dual-mode surface acoustic wave (DMS) resonators; wherein the two cascaded DMS resonators are connected in series or in parallel; each DMS resonator includes an input terminal, an input ground terminal, an output terminal, and an output ground terminal; wherein the input terminal of the DMS resonator is used to input a radio frequency (RF) signal, and the output terminal of the DMS resonator is used to output a RF signal processed by the DMS resonator; the input ground terminal and the output ground terminal are electrically isolated.
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Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a resonator device, a filter, and a multiplexer. Background Technology

[0002] Surface acoustic wave (SAW) filters, with their smaller size and higher Q-factor compared to traditional microwave filters, are widely used in mobile communications. Since the suppression and loss levels of acoustic filters are interdependent, their design requires a balance between these two performance metrics. However, with technological advancements, higher design requirements have been placed on acoustic filters, demanding not only high suppression levels but also optimal loss levels.

[0003] As a core component of surface acoustic wave (SAW) filters, the performance of the SAW resonator directly affects the filter's suppression and loss levels. Optimizing the design of the resonator component to meet the filter's design requirements has become a pressing issue. Utility Model Content

[0004] In view of this, embodiments of this application provide a resonator device, a filter, and a multiplexer.

[0005] To achieve the above objectives, the technical solution of this application embodiment is implemented as follows:

[0006] In a first aspect, embodiments of this application provide a resonator device, including a resonant unit connected between a signal input terminal and a signal output terminal, wherein the resonant unit includes at least two cascaded dual-mode surface acoustic wave (DMS) resonators; wherein the two cascaded DMS resonators are connected in series or in parallel.

[0007] Any of the DMS resonators includes an input terminal, an input ground terminal, an output terminal, and an output ground terminal; wherein, the input terminal of the DMS resonator is used to input radio frequency signals, and the output terminal of the DMS resonator is used to output radio frequency signals processed by the DMS resonator; the input ground terminal and the output ground terminal are electrically isolated.

[0008] In some embodiments, the two cascaded DMS resonators include a first DMS resonator and a second DMS resonator;

[0009] The input ground terminal of the first DMS resonator is connected to the first ground terminal, and the input ground terminal of the second DMS resonator is connected to the first ground terminal.

[0010] And / or, the output ground terminal of the first DMS resonator is connected to the second ground terminal of the output ground terminal of the second DMS resonator;

[0011] The first grounding terminal is electrically isolated from the second grounding terminal.

[0012] In some embodiments, the resonator device further includes at least one first resonator;

[0013] The first end of the first resonator is connected between the signal input end and the resonant unit, or between the signal output end and the resonant unit;

[0014] The second end of the first resonator is grounded.

[0015] In some embodiments, the second end of the first resonator is electrically isolated from the input ground terminal; and / or, the second end of the first resonator is electrically isolated from the output ground terminal.

[0016] In some embodiments, the second end of the first resonator shares a common ground with the first ground terminal or with the second ground terminal.

[0017] In some embodiments, the resonator device further includes at least one second resonator;

[0018] The second resonator is connected in series between the signal input terminal and the resonant unit, or in series between the signal output terminal and the resonant unit.

[0019] In some embodiments, any of the DMS resonators includes two reflective gratings and a plurality of transducer structures between the reflective gratings.

[0020] In some embodiments, the number of transducer structures of the first DMS resonator is the same as the number of transducer structures of the second DMS resonator;

[0021] And / or, the interdigital structure within the transducer structure of the first DMS resonator is the same as the interdigital structure within the transducer structure of the second DMS resonator.

[0022] Secondly, embodiments of this application also provide a filter, including the above-described resonator device.

[0023] Thirdly, embodiments of this application also provide a multiplexer, including a transmit filter and a receive filter;

[0024] At least one of the transmitting filter and the receiving filter includes the aforementioned resonator device.

[0025] The resonator device provided in this application includes at least two cascaded DMS resonators. The input ground terminal A2 of any DMS resonator is electrically isolated from the output ground terminal B2 of any DMS resonator. By changing the grounding method of the input ground terminal and the output ground terminal of the cascaded DMS resonators, the suppression level outside the passband can be effectively improved without increasing the filter order or changing the overall topology. Attached Figure Description

[0026] Figure 1 Schematic diagram of the resonator device provided in the embodiments of this application Figure 1 ;

[0027] Figure 2 Schematic diagram of the resonator device provided in the embodiments of this application Figure 2 ;

[0028] Figure 3 This is a comparative example of existing technologies;

[0029] Figure 4 Performance effects of the resonator device provided in the embodiments of this application Figure 1 ;

[0030] Figure 5 for Figure 4 A magnified view of a portion outside the left passband in the middle section;

[0031] Figure 6 Schematic diagram of the resonator device provided in the embodiments of this application Figure 4 ;

[0032] Figure 7 Schematic diagram of the resonator device provided in the embodiments of this application Figure 5 ;

[0033] Figure 8 Schematic diagram of the resonator device provided in the embodiments of this application Figure 6 ;

[0034] Figure 9 Schematic diagram of the resonator device provided in the embodiments of this application Figure 7 ;

[0035] Figure 10 Schematic diagram of the resonator device provided in the embodiments of this application Figure 8 ;

[0036] Figure 11 Schematic diagram of the resonator device provided in the embodiments of this application Figure 9 ;

[0037] Figure 12 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 ;

[0038] Figure 13 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 one;

[0039] Figure 14 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 two;

[0040] Figure 15 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 three;

[0041] Figure 16 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 Four;

[0042] Figure 17 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 eight;

[0043] Figure 18 Schematic diagram of the resonator device provided in the embodiments of this application Figure 10 Nine;

[0044] Figure 19 Schematic diagram of the resonator device provided in the embodiments of this application Figure 2 ten;

[0045] Figure 20 Schematic diagram of the resonator device provided in the embodiments of this application Figure 2 eleven;

[0046] Figure 21 This is a schematic diagram of the filter structure provided in an embodiment of this application;

[0047] Figure 22 Schematic diagram of the multiplexer provided in the embodiments of this application Figure 1 ;

[0048] Figure 23 Schematic diagram of the multiplexer provided in the embodiments of this application Figure 2 . Detailed Implementation

[0049] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0050] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, to avoid confusion with this application, some technical features well-known in the art have not been described; that is, not all features of actual embodiments are described herein, nor are well-known functions and structures described in detail.

[0051] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0052] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solution of this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0053] In the field of mobile communications, spectrum resources are of paramount importance. To efficiently utilize spectrum resources, the spacing between some frequency bands is extremely narrow. For example, the transmit (Tx) and receive (Rx) bands in Band 8, Band 3, and Band 25 have very narrow spacing, with the uplink and downlink bands often only 10MHz to 20MHz apart. Furthermore, suppression in the transmit (Tx) and receive (Rx) bands typically requires at least -50dB or even higher, which places high demands on the design of acoustic filters. In this situation, to prevent signal leakage or interference between transmitted and received signals, the filter must possess both high suppression levels and optimal loss levels.

[0054] Compared to conventional resonators that include a single transducer, dual-mode surface acoustic wave (DMS) resonators can achieve a wider passband and lower insertion loss. Building upon this, to further reduce loss levels and improve suppression levels, embodiments of this application provide a resonator device, such as... Figure 1 and Figure 2As shown, the resonator device 100 includes a resonant unit 110 connected between the signal input terminal RFIN and the signal output terminal RFOUT. The resonant unit 110 includes at least two cascaded DMS resonators 101; wherein the two cascaded DMS resonators 101 are connected in series or in parallel.

[0055] Any DMS resonator 101 includes an input terminal A1, an input ground terminal A2, an output terminal B1, and an output ground terminal B2. The input terminal A1 of the DMS resonator is used to input a radio frequency (RF) signal, and the output terminal B1 of the DMS resonator is used to output the RF signal processed by the DMS resonator. The input ground terminal A2 and the output ground terminal B2 are electrically isolated; that is, in this embodiment, the DMS signal is single-input dual-output. In another embodiment, any DMS resonator signal is dual-input single-output, and the number of transducer structures can be arbitrarily selected as needed.

[0056] Electrical isolation means that there is no direct current path between each input ground terminal A2 and each output ground terminal B2. This can be understood as all input ground terminals A2 and each output ground terminal B2 being completely isolated from each other at least on the chip level. In other words, each input ground terminal A2 of any DMS resonator 101 is electrically isolated not only from each output ground terminal B2 of that DMS resonator 101, but also from the output ground terminal B2 of another cascaded DMS resonator 101. In practical applications, each input ground terminal A2 and each output ground terminal B2 can be connected to two separate grounds and isolated from them using insulating material. Alternatively, different input ground terminals or different output ground terminals can be connected to different grounds, as long as no input ground terminal is directly connected to an output ground terminal.

[0057] For example, continue to refer to Figure 1 The resonant unit 110 includes two DMS resonators 101 connected in series. Multiple input ground terminals A2 of the two DMS resonators are directly connected, and multiple output ground terminals B2 are also directly connected. There is no direct connection between each input ground terminal A2 and each output ground terminal B2. The radio frequency signal is input from the input terminal A1 of the first DMS resonator, processed by the two DMS resonators, and output from the output terminal B1 of the second DMS resonator.

[0058] Continue to refer to Figure 2 The resonant unit 110 includes two DMS resonators 101 connected in parallel. Multiple input ground terminals A2 of the two DMS resonators are directly connected, and multiple output ground terminals B2 are also directly connected. There is no direct connection between each input ground terminal A2 and each output ground terminal B2. Radio frequency signals are input from the input terminals A1 of the two DMS resonators, processed by each resonator, and then output from the output terminals B1 of the two resonators respectively.

[0059] It should be emphasized that the embodiments of this application do not limit the specific number of DMS resonators 101 in the resonant unit 110. When the number of DMS resonators 101 is greater than 2, it is sufficient that one DMS resonator is connected to another DMS resonator (in series or in parallel) and that the input ground terminal and output ground terminal of the connected DMS resonators are electrically isolated.

[0060] The resonator device 100 provided in this application embodiment includes at least two cascaded DMS resonators 101. The input ground terminal A2 of any DMS resonator is electrically isolated from the output ground terminal B2 of any DMS resonator. By changing the grounding method of the input ground terminal A2 and the output ground terminal B2 of the cascaded DMS resonators 101, the suppression level outside the passband can be effectively improved without increasing the filter order or changing the overall topology.

[0061] The resonator device provided in this application embodiment can be used to process unbalanced signals, that is, both the input signal at the signal input terminal and the output signal at the signal output terminal are unbalanced signals.

[0062] In addition, such as Figure 3 As shown, a comparative example of prior art is provided. The comparative embodiment includes two series-connected DMS resonators 101, with the input ground terminal A2 and output ground terminal B2 of the DMS directly electrically connected and both connected to a common ground GND. In practical applications, the input ground terminal A2 and output ground terminal B2 of these two series-connected DMS resonators can be directly connected on the chip side through a thickened layer, and all connected to the same common ground GND. Since the two DMS resonators share a common ground on the chip side's wiring layers, it simplifies circuit design and reduces chip wiring complexity. However, this arrangement is not conducive to forming a filter with a good suppression level.

[0063] Specifically, Figure 4 It shows that it contains Figure 1 and Figure 3 A comparison of the dB(S(2,1)) curves of the RX filter of the resonator device as a function of frequency. Figure 5 for Figure 4 The comparison chart shows a magnified view of the left side outside the passband. The dB(S(2,1)) curve represents insertion loss within the passband and out-of-band rejection outside the passband; the curves can be observed according to different product requirements. The solid line in the chart represents... Figure 1 The S(2,1) curve of the resonator device shown is represented by the dashed line. Figure 3 The S(2,1) curve of the resonator device is shown. Figure 4As shown, by setting the input ground terminal and the output ground terminal to be electrically isolated, the out-of-band rejection on the left side of the passband can be improved to some extent. Specifically, as... Figure 5 As shown, the out-of-band suppression effect is significantly improved within a certain frequency range. This is particularly evident in the out-of-band suppression of the Tx band of this filter.

[0064] In some embodiments, continue to refer to Figure 1 or Figure 2 The input terminal and input ground terminal of any DMS resonator are located on the same side of the DMS resonator, and its output terminal and output ground terminal are located on the other side of the DMS resonator.

[0065] In some embodiments, such as Figures 6 to 8 As shown, the two cascaded DMS resonators include a first DMS resonator 101a and a second DMS resonator 101b.

[0066] The input ground terminal A21 of the first DMS resonator 101a and the input ground terminal A22 of the second DMS resonator are connected to the first ground terminal GND1; and / or, the output ground terminal B21 of the first DMS resonator 101a and the output ground terminal B22 of the second DMS resonator 101b are connected to the second ground terminal GND2.

[0067] The first grounding terminal GND1 and the second grounding terminal GND2 are electrically isolated.

[0068] Taking the first DMS resonator 101a and the second DMS resonator 101b connected in series as an example, continue to refer to Figure 6 The input ground terminal A21 of the first DMS resonator 101a and the input ground terminal A22 of the second DMS resonator are both connected to the first ground terminal GND1. The output ground terminal of the first DMS resonator 101a and the output ground terminal of the second DMS resonator 101b are not directly connected to the first ground terminal GND1. The output ground terminals of the first DMS resonator 101a and the second DMS resonator 101b can be grounded separately, providing electrical isolation.

[0069] like Figure 7 As shown, the output ground terminal B21 of the first DMS resonator 101a and the output ground terminal B22 of the second DMS resonator 101b are connected to the second ground terminal GND2. Neither the input ground terminal of the first DMS resonator 101a nor the input ground terminal of the second DMS resonator are directly connected to the second ground terminal GND2; the input ground terminals of the first DMS resonator 101a and the second DMS resonator can be grounded separately, providing electrical isolation.

[0070] like Figure 8As shown, the first ground terminal GND1 and the second ground terminal GND2 are electrically isolated; the input ground terminal A21 of the first DMS resonator 101a and the input ground terminal A22 of the second DMS resonator are connected to the first ground terminal GND1; and the output ground terminal B21 of the first DMS resonator 101a and the output ground terminal B22 of the second DMS resonator 101b are connected to the second ground terminal GND2. By setting all input ground terminals to a common ground and all output ground terminals to a common ground, the circuit complexity can be reduced, which is beneficial for the miniaturization of resonator devices or filters.

[0071] In some embodiments, the resonator device further includes at least one first resonator;

[0072] The first end of the first resonator is connected between the signal input end and the resonant unit, or between the signal output end and the resonant unit;

[0073] The second terminal of the first resonator is grounded.

[0074] like Figure 9 As shown, one end of the first resonator 901 is connected between the signal input terminal RFIN and the resonant unit 110, and the other end is grounded. Figure 10 As shown, the first terminal of the first resonator P1 is connected between the signal output terminal RFOUT and the resonant unit 110, and the second terminal is grounded. Figure 11 As shown, a first resonator 901 has its first terminal connected between the signal input terminal RFIN and the resonant unit 110, and its second terminal grounded. Another first resonator 901 has its first terminal connected between the signal output terminal RFOUT and the resonant unit 110, and its second terminal grounded. Wherein, according to Figure 11 The filter formed by the topology can be illustrated Figure 4 and Figure 5 Medium performance curve.

[0075] It should be noted that the embodiments of this application do not limit the specific number of the first resonators. One or more first resonators can be set between the signal input terminal RFIN and the resonant unit, or one or more first resonators can be set between the signal output terminal RFOUT and the resonant unit.

[0076] In some embodiments, the first resonator may be a surface acoustic wave (SAW) resonator or a film bulk acoustic resonator (FBAR) resonator.

[0077] In some embodiments, the second end of the first resonator is electrically isolated from the input ground terminal; and / or, the second end of the first resonator is electrically isolated from the output ground terminal.

[0078] In some embodiments, the second terminal of the first resonator is electrically isolated from the input ground terminal and directly connected to the output ground terminal. In other embodiments, the second terminal of the first resonator is electrically isolated from the output ground terminal and directly connected to the input ground terminal. In still other embodiments, the second terminal of the first resonator is electrically isolated not only from the input ground terminal but also from the output ground terminal.

[0079] In some embodiments, the second end of the first resonator shares a common ground with the first ground terminal or with the second ground terminal.

[0080] like Figure 12 As shown, the first end of the first resonator is connected between the signal input terminal RFIN and the resonant unit 110. The second end (ground terminal) of the first resonator 901 is directly connected to the first ground terminal GND1. The input ground terminal of the first DMS resonator 101a and the input ground terminal of the second DMS resonator 101b are directly connected to the first ground terminal GND1. That is, the ground terminal of the first resonator 901, the input ground terminal of the first DMS resonator 101a, and the input ground terminal of the second DMS resonator 101b are all connected to the same ground.

[0081] like Figure 13 As shown, the first end of the first resonator is connected between the resonant unit 110 and the signal output terminal RFOUT. The second end (grounding end) of the first resonator 901 is directly connected to the second grounding terminal GND2. The output grounding terminal of the first DMS and the output grounding terminal of the second DMS are directly connected to the second grounding terminal GND2. That is, the grounding terminal of the first resonator P1, the input grounding terminal of the first DMS, and the input grounding terminal of the second DMS are all connected to the same ground.

[0082] In another embodiment, combined Figure 12 and Figure 13 There are multiple first resonators 901, and first resonators 901 can be designed on both sides of the resonant unit 110 at the same time. The second end (grounding end) of the first resonator 901 located at the input end is directly connected to the first grounding end GND1, and the second end (grounding end) of the first resonator 901 located at the output end is directly connected to the second grounding end GND2. GND1 and GND2 are electrically isolated.

[0083] By setting the input ground terminal and output ground terminal of the DMS to be electrically isolated, and by sharing a common ground with either the input ground terminal or the output ground terminal of the DMS, the suppression level outside the passband can be effectively improved, which is also beneficial to the miniaturization of resonator devices or filters.

[0084] In some embodiments, such as Figures 14 to 17As shown, the resonator device also includes at least one second resonator 1401;

[0085] The second resonator 1401 is connected in series between the signal input terminal RFIN and the resonant unit 110, or in series between the signal output terminal RFOUT and the resonant unit 110.

[0086] The second resonator 1401 is connected in series between the signal input terminal RFIN and the resonant unit 110. The radio frequency signal is processed by the second resonator 1401 and then input to the resonant unit 110. (Continue to refer to...) Figure 14 The first DMS resonator 101a and the second DMS resonator 101b are connected in series, and the second resonator 1401 is connected in series between the signal input terminal RFIN and the input terminal of the first DMS resonator 101a. (Continue to refer to...) Figure 15 The first DMS resonator 101a and the second DMS resonator 101b are connected in parallel between the first node N1 and the second node N2, and the second resonator S1 is connected in series between the signal input terminal RFIN and the first node N1.

[0087] The second resonator 1401 is connected in series between the signal input terminal RFOUT and the resonant unit 110. The radio frequency signal is processed by the resonant unit 110 and then input to the second resonator 1401.

[0088] Continue to refer to Figure 16 The first DMS resonator 101a and the second DMS resonator 101b are connected in series, and the second resonator S1 is connected in series between the signal input terminal RFOUT and the output terminal of the second DMS resonator 101b. (Continue to refer to...) Figure 17 The first DMS resonator 101a and the second DMS resonator 101b are connected in parallel between the first node N1 and the second node N2, and the second resonator S1 is connected in series between the signal output terminal RFIN and the second node N2.

[0089] In some embodiments, such as Figure 18As shown, the resonator device includes both a first resonator 901 and a second resonator 1401. Between the signal input terminal RFIN and the resonant unit 110, the second resonator 1401 can be positioned either between the signal input terminal RFIN and the first end of the first resonator 901, or between the first end of the first resonator 901 and the resonant unit 110. Similarly, the position between the first resonator 901 and the second resonator 1401 between the resonant unit 110 and the signal output terminal RFOUT is not limited; nor is the number of the first resonator 901 and the second resonator 1401 limited. In some embodiments, the first and second resonators can be surface acoustic wave (SAW) resonators or film bulk acoustic resonators (FBAR) resonators.

[0090] In some embodiments, any DMS resonator includes two reflective gratings and a plurality of transducer structures between the reflective gratings.

[0091] A reflective grating prevents sound waves from propagating outside the resonant cavity, confining surface acoustic waves within the cavity. When a sound wave encounters the reflective grating, it is reflected back into the resonant cavity, forming a stable standing wave to enhance the resonance effect.

[0092] Transducer structures can convert electrical signals into surface acoustic waves (SAWs), and the number of transducer structures directly affects the performance of resonator devices or filters. Multiple transducer structures can generate multiple resonance peaks, which is beneficial for further optimizing the transmission characteristics of DMS resonators. The embodiments of this application do not limit the specific number of transducer structures in the DMS resonator, as long as the number of transducer structures in each DMS resonator is greater than or equal to 2.

[0093] In some embodiments, the number of transducer structures of the first DMS resonator is the same as the number of transducer structures of the second DMS resonator;

[0094] And / or, the interdigital structure in the transducer structure of the first DMS resonator is the same as the interdigital structure in the transducer structure of the second DMS resonator; thus, the number of optimization variables during design is reduced, and the simulation optimization time is shortened.

[0095] By properly configuring the number of each transducer structure and the specific interdigital structure parameters (the number of interdigits in each transducer structure, the spacing between interdigits, the width of interdigits, etc.), the position and intensity of the resonant peak can be adjusted, and the transmission characteristics of the resonator device or filter can be optimized.

[0096] Taking the first and second DMS resonators connected in series as an example, such as Figure 19As shown, the first DMS resonator 101a includes two reflective gratings 1901 and three transducer structures 1902 between the reflective gratings 1901. The second DMS resonator 101b includes two reflective gratings 1901 and three transducer structures 1902 between the reflective gratings 1901. The number of transducer structures in the first DMS resonator 101a is the same as the number of transducer structures in the second DMS resonator 101b, both being three. Figure 20 As shown, the first DMS resonator 101a has 3 transducer structures, and the second DMS resonator 101b has 5 transducer structures. That is, the number of transducer structures in the first DMS resonator 101a is different from the number of transducer structures in the second DMS resonator 101b.

[0097] In some embodiments, the DMS resonators are symmetrically distributed about the axes of symmetry of the two reflective gratings; in other embodiments, the DMS resonators are asymmetrically distributed about the axes of symmetry of the two reflective gratings.

[0098] Based on the same inventive concept, this application also provides a filter 200, such as... Figure 21 As shown, the filter 200 includes the resonator device 100 described above.

[0099] In some embodiments, the filter 200 may include a plurality of cascaded resonator devices 100.

[0100] The filter in this embodiment can be an unbalanced filter. By setting the input ground terminal and output ground terminal of the DMS in the resonator device to be electrically isolated, the suppression level outside the passband of the filter can be effectively improved without increasing the filter order or changing the overall filter topology.

[0101] Based on the same inventive concept, this application also provides a multiplexer 300, such as... Figure 22 As shown in Figure 23, the multiplexer 300 includes a transmit filter 301 and a receive filter 302;

[0102] At least one of the transmitting filter 301 and the receiving filter 302 includes the resonator device 100 described above.

[0103] Since the transmitting filter 301 and the receiving filter 302 include a resonator device 100, the filters have similar beneficial technical effects to the resonator device described above. Therefore, the beneficial effects of the filters will not be repeated here.

[0104] The various embodiments / implementations provided in this application can be combined with each other without creating contradictions.

[0105] The above description is merely a preferred embodiment of this application and is not intended to limit the application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A resonator device, characterized by, The system includes a resonant unit connected between a signal input terminal and a signal output terminal, wherein the resonant unit includes at least two cascaded dual-mode surface acoustic wave (DMS) resonators; wherein the two cascaded DMS resonators are connected in series or in parallel. Any of the DMS resonators includes an input terminal, an input ground terminal, an output terminal, and an output ground terminal; wherein, the input terminal of the DMS resonator is used to input radio frequency signals, and the output terminal of the DMS resonator is used to output radio frequency signals processed by the DMS resonator; the input ground terminal and the output ground terminal are electrically isolated.

2. The resonator device of claim 1, wherein The two cascaded DMS resonators include a first DMS resonator and a second DMS resonator; The input ground terminal of the first DMS resonator is connected to the first ground terminal, and the input ground terminal of the second DMS resonator is connected to the first ground terminal. And / or, the output ground terminal of the first DMS resonator is connected to the output ground terminal of the second DMS resonator to the second ground terminal; The first grounding terminal is electrically isolated from the second grounding terminal.

3. The resonator device of claim 2, wherein, It also includes at least one first resonator; The first end of the first resonator is connected between the signal input end and the resonant unit, or between the signal output end and the resonant unit; The second end of the first resonator is grounded.

4. The resonator device of claim 3, wherein The second end of the first resonator is electrically isolated from the input ground terminal; and / or, the second end of the first resonator is electrically isolated from the output ground terminal.

5. The resonator device of claim 3, wherein The second end of the first resonator shares a common ground with the first grounding terminal or with the second grounding terminal.

6. The resonator device of claim 1, wherein It also includes at least one second resonator; The second resonator is connected in series between the signal input terminal and the resonant unit, or in series between the signal output terminal and the resonant unit.

7. The resonator device of claim 2, wherein Each of the DMS resonators includes two reflective gratings and a plurality of transducer structures between the reflective gratings.

8. The resonator device of claim 7, wherein, The number of transducer structures in the first DMS resonator is the same as the number of transducer structures in the second DMS resonator; And / or, the interdigital structure within the transducer structure of the first DMS resonator is the same as the interdigital structure within the transducer structure of the second DMS resonator.

9. A filter, characterized by Includes the resonator device as described in any one of claims 1 to 8.

10. A multiplexer, characterized by Includes transmit filters and receive filters; At least one of the transmitting filter and the receiving filter includes a resonator device as described in any one of claims 1 to 8.