闪蒸炉及闪蒸设备

Abstract

本公开涉及半导体和光伏技术领域，尤其涉及一种闪蒸炉及闪蒸设备，解决相关技术中由于钙钛矿溶液流动性较强导致无法兼顾结晶成膜速率和成膜均匀性的问题。该闪蒸炉包括炉体，具有容置腔室，炉体具有与容置腔室连通的多个第一出气口和多个第二出气口，容置腔室设有放置区域，放置区域被配置为供片材放置，抽气组件，分别与第一出气口和第二出气口连通，抽气组件被配置为将容置腔室的气体抽出，其中，炉体包括围合成容置腔室的底壁和侧壁，底壁和侧壁分别与放置区域之间具有间隙，底壁布置有第一出气口，侧壁布置有第二出气口。本公开提供的闪蒸炉及闪蒸设备，能够兼顾成膜均匀性和成膜速率。

Claims

1. A flash furnace, characterized in that, The flash furnace is configured to process sheet materials and includes: The furnace body has a receiving chamber, the furnace body has a plurality of first air outlets and a plurality of second air outlets communicating with the receiving chamber, the receiving chamber is provided with a placement area, the placement area is configured for placing the sheet; An air extraction assembly is connected to the first air outlet and the second air outlet respectively, and the air extraction assembly is configured to extract the gas from the accommodating chamber. The furnace body includes a bottom wall and a side wall that enclose the accommodating chamber. The bottom wall and the side wall have gaps with the placement area. The bottom wall is provided with the first air outlet, and the side wall is provided with the second air outlet.

2. The flash evaporator according to claim 1, characterized in that, Multiple first air outlets are distributed on the bottom wall, and at least a portion of the first air outlets overlap the placement area in the vertical direction; and / or, A plurality of second air outlets are arranged at intervals around the periphery of the accommodating chamber on the side wall, and at least a portion of the second air outlets are perpendicularly distanced from the bottom wall to a distance greater than or equal to the distance from the placement area to the bottom wall.

3. The flash evaporator according to claim 1, characterized in that, Multiple first air outlets are arranged at equal intervals on the bottom wall; and / or, Multiple second air outlets are arranged at equal intervals on the sidewall; and / or, The cross-sectional area of ​​the first air outlet is the same as the cross-sectional area of ​​the second air outlet; and / or, The total cross-sectional area of ​​the plurality of first air outlets located on the bottom wall is greater than or equal to the total cross-sectional area of ​​the plurality of second air outlets located on the side wall.

4. The flash furnace according to claim 1, characterized in that, The furnace body also has a flow equalization chamber, which is connected to the first air outlet, the second air outlet and the air extraction component. The suction force of the air extraction component can act on the accommodating chamber through the first air outlet and the second air outlet via the flow equalization chamber.

5. The flash furnace as claimed in claim 1, wherein, The air extraction assembly includes: A vacuum pump has an inlet and an outlet, the inlet being connected to a first outlet and a second outlet respectively via a suction pipe, and the outlet being configured to discharge gas extracted from the accommodating chamber. A condenser, connected to the exhaust pipe, is configured to condense and filter the gas discharged from the first outlet and the second outlet. A particulate trap, connected to the extraction pipe, is located between the condenser and the inlet of the vacuum pump, and is configured to filter and collect solid particles.

6. The flash furnace according to any one of claims 1-5, characterized in that, Also includes: Multiple support members are spaced apart on the bottom wall, and at least a portion of the support members overlap with the placement area in the vertical direction. The support members do not overlap with the first air outlet, wherein the tops of the multiple support members form the placement area.

7. The flash furnace according to any one of claims 1-5, characterized in that, Also includes: A heating assembly is disposed in the receiving chamber and is configured to heat the receiving chamber.

8. The flash furnace according to claim 7, characterized in that The furnace body further includes a top wall surrounding the accommodating chamber, and the heating assembly includes: A first heating element is disposed around the top wall, and at least a portion of the first heating element's orthographic projection in the vertical direction overlaps with the placement area; A second heating element is disposed around the top wall and arranged on the outer periphery of the first heating element. The orthographic projection of the second heating element in the vertical direction does not overlap with the placement area.

9. The flash furnace according to any one of claims 1-5, characterized in that, The furnace body includes: The cavity has a groove, and the first air outlet and the second air outlet are respectively disposed on the bottom surface and the side surface of the groove, wherein the bottom surface and the side surface together form at least a portion of the accommodating cavity. A cover plate is rotatably connected to the cavity, and the cover plate can close to the opening of the groove to form the receiving chamber.

10. A flash evaporation apparatus characterized by comprising: include: The flash furnace according to any one of claims 1 to 9, wherein the flash furnace is configured to process sheet material; A loading and unloading mechanism is disposed on one side of the flash furnace, and the loading and unloading mechanism is configured to load the sheet into the flash furnace or unload it from the flash furnace.

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