一种半导体芯片超声波清洗装置
By employing a rotary motor-driven washing basket and limiting mechanism in the semiconductor chip cleaning device, combined with the design of a buffer pad, the problem of chip displacement caused by the flow of cleaning fluid is solved, ensuring that the chips do not collide during the cleaning process and improving the yield.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU NOME AUTOMATION TECH CO LTD
- Filing Date
- 2025-05-06
- Publication Date
- 2026-07-17
AI Technical Summary
During the semiconductor chip cleaning process, the flow and circulation of the cleaning solution may cause the chip to shift in the washing basket, resulting in scratches or damage to the chip surface and reducing the yield.
The washing basket is driven by a rotary motor, combined with a limiting mechanism and a buffer pad. The rotary motor drives the washing basket to rotate, and the limiting mechanism and buffer pad fix the chip, reducing the risk of collision. The buffer pad reduces physical damage.
It effectively prevents chips from colliding with the washing basket during the cleaning process, reducing scratches and damage, and improving the yield rate.
Smart Images
Figure CN224521533U_ABST
Abstract
Claims
1. A semiconductor chip ultrasonic cleaning apparatus comprising a washing basket (1), characterized in that: A rotary motor (2) is provided on the outside of the washing basket (1). A guide plate (3) is fixedly connected to the output shaft of the rotary motor (2). The guide plate (3) is fixedly connected to the washing basket (1). A pressure plate (4) is fixedly connected to the outside of the guide plate (3). A pressing wheel (5) is fixedly connected to the pressure plate (4). A pressing block (6) is rotatably connected to the outside of the output shaft of the rotary motor (2). The pressing wheel (5) and the pressing block (6) are adapted to each other. A limit mechanism is symmetrically provided on the inside of the washing basket (1).
2. The apparatus according to claim 1, wherein: The limiting mechanism includes an adjusting rod (7) that is symmetrically fixedly connected to the inside of the washing basket (1), and an adjusting seat (8) that is symmetrically slidably connected to the outside of the adjusting rod (7). The bottom of two adjacent adjusting seats (8) are fixedly connected to abutment plates (9).
3. The apparatus of claim 2, wherein: A buffer pad (10) is fixedly connected to the outside of the contact plate (9), and the shape of the buffer pad (10) is adapted to the contact plate (9).
4. The apparatus of claim 2, wherein: The inner side of the adjusting seat (8) is provided with a slot (11), and the outer side of the slot (11) is threaded with a threaded rod (12). The bottom end of the threaded rod (12) passes through the adjusting seat (8) and is rotatably connected to a clamping block (13). The clamping block (13) abuts against the adjusting rod (7), and the top end of the threaded rod (12) is fixedly connected to a knob (14).
5. The apparatus of claim 4, wherein: the semiconductor chip is a flip chip; and the ultrasonic energy is directed at the semiconductor chip through the substrate. 5 The bottom end of the clamping block (13) is fixedly connected to a friction pad (15). The bottom ends of both the clamping block (13) and the friction pad (15) are set as arc surfaces. The clamping block (13) and the friction pad (15) are adapted to the adjusting rod (7).
6. The apparatus of claim 4, wherein: The top of the clamping block (13) is fixedly connected to a guide rod (16), the top end of the guide rod (16) passes through the adjusting seat (8), and the guide rod (16) is slidably connected to the adjusting seat (8).