位置补偿装置
By designing a position compensation device, the problem of silicon wafers getting stuck in deformable quartz boats was solved by using visual inspection and adjustment mechanisms, thereby improving the stability and efficiency of silicon wafer processing and making it suitable for various automated equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI LEAD INTELLIGENT EQUIP CO LTD
- Filing Date
- 2025-06-25
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional silicon wafer shaping mechanisms are prone to wafer clipping issues when dealing with deformable quartz boats, a problem that existing technologies struggle to solve effectively.
Design a position compensation device, including a translation mechanism, a vision mechanism, a shaping mechanism and a boat positioning mechanism. The device detects the position deviation of the quartz boat through vision and performs position compensation in the adjustment space to ensure that the silicon wafer can smoothly enter the quartz boat.
It effectively avoids the problem of silicon wafers getting stuck in the quartz boat, improves the efficiency and stability of silicon wafer processing, and is suitable for a variety of automated equipment.
Smart Images
Figure CN224521541U_ABST
Abstract
Claims
1. A position compensating device, characterized by, include: Translation mechanism (1); A vision mechanism (2) and a shaping mechanism (3) are provided on the translation mechanism (1). A detection space is formed between the vision mechanism (2) and the translation mechanism (1), and an adjustment space is formed between the shaping mechanism (3) and the translation mechanism (1). Boat positioning mechanism (4), which is movably connected to the translation mechanism (1).
2. The position compensating device according to claim 1, characterized in that The translation mechanism (1) includes a first support (101) and a first drive structure (102). The first drive structure (102) is disposed on the first support (101) and the first drive structure (102) can drive the boat positioning mechanism (4) to move along the X-axis direction of the first support (101).
3. The position compensating device of claim 1, wherein The vision mechanism (2) includes a first support (201), a detection structure (202), a light source structure (203), and a reference structure (204). The first support (201) is disposed on the translation mechanism (1). The detection structure (202), the light source structure (203), and the reference structure (204) are disposed on the first support (201), and the reference structure (204) is disposed between the detection structure (202) and the light source structure (203).
4. The position compensating device according to claim 3, characterized in that The detection structure (202) includes a base (2021) and a positioning camera (2022). The base (2021) is provided with a first waist-shaped hole (20211) and a second waist-shaped hole (20212). The positioning camera (2022) is disposed on the base (2021) through the first waist-shaped hole (20211), and the base (2021) is disposed on the first bracket (201) through the second waist-shaped hole.
5. The position compensating device of claim 3, wherein The light source structure (203) includes a first fixing base (2031), a light source (2032), and a first driving unit (2033). The first fixing base (2031) is connected to the first bracket (201). The light source (2032) and the first driving unit (2033) are disposed on the first bracket (201), and the first driving unit (2033) can drive the light source (2032) to move closer to or away from the first fixing base (2031).
6. The position compensation device according to claim 3, characterized in that, The reference structure (204) includes a second fixed seat (2041) and a reference shaft (2042). The second fixed seat (2041) is connected to the first bracket (201), and the reference shaft (2042) is disposed on the second fixed seat (2041).
7. The position compensating device of claim 1, wherein The shaping mechanism (3) includes a second support (301), a shaping structure (302), and a second driving structure (303). The second support (301) is disposed on the translation mechanism (1), the shaping structure (302) and the second driving structure (303) are disposed on the second support (301), and the second driving structure (303) can drive the shaping structure (302) to move along the Y-axis direction of the second support (301).
8. The position compensating device according to claim 7, characterized in that The shaping structure (302) includes a first shaping unit (3021) and a second shaping unit (3022). The second driving structure (303) includes a second driving unit (3031) and a third driving unit (3032). The second driving unit (3031) can drive the first shaping unit (3021) to move closer to or further away from the second shaping unit (3022) relative to the second support (301). The third driving unit (3032) can drive the second shaping unit (3022) to move closer to or further away from the first shaping unit (3021) relative to the second support (301).
9. The position compensating device according to claim 8, characterized in that The first shaping unit (3021) is provided with a plurality of first shaping teeth (30211) spaced apart, and the second shaping unit (3022) is provided with a plurality of second shaping teeth (30221) spaced apart; The plurality of first shaping teeth (30211) can be opposite to the plurality of second shaping teeth (30221) to shape the silicon wafer.
10. The position compensating device of claim 1, wherein, It also includes a boat tooth support mechanism (5), which is located on the side of the translation mechanism (1) away from the shaping mechanism (3); The boat tooth mechanism (5) can transport the silicon wafer in the boat positioning mechanism (4) to the shaping mechanism (3); or, the boat tooth mechanism (5) can transport the silicon wafer in the shaping mechanism (3) to the boat positioning mechanism (4).
11. The position compensating device of claim 10, wherein The boat tooth support mechanism (5) includes a tooth support structure (501), a second support (502), and a third drive structure (503). The tooth support structure (501) is disposed on the second support (502), which is disposed on the side of the translation mechanism (1) away from the shaping mechanism (3). The third drive structure (503) can drive the second support (502) to move along the Z-axis direction of the translation mechanism (1).