晶圆盒固定机构
By designing a wafer box fixing mechanism, pressure is applied to the wafer box using pressure bars and support structures, solving the problem of wafer box tipping, achieving wafer box stability, and preventing scrap and production interruption.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN WENDING CORE POLYMER TECH CO LTD
- Filing Date
- 2025-06-20
- Publication Date
- 2026-07-17
Smart Images
Figure CN224521570U_ABST
Abstract
Claims
1. A wafer boat fixing mechanism characterized by comprising: It includes a pressure rod, a movable side support rod, and a fixed side support rod. The movable side support rod is equipped with a rotating shaft, and one side of the pressure rod is located on the rotating shaft. The movable side support rod and the fixed side support rod are arranged opposite to each other, and the fixed side support rod is equipped with a support and fixing part corresponding to the pressure rod.
2. The wafer boat securing mechanism of claim 1, wherein, The support and fixing part includes a magnetic buffer pin A for supporting the other side of the pressure bar.
3. The wafer cassette fixing mechanism as described in claim 2, characterized in that, The support and fixing part also includes a limiting groove for limiting the front and rear movement of the other side of the pressure rod, and the inner side wall of the limiting groove is provided with a spring positioning plunger for locking the pressure rod.
4. The wafer boat securing mechanism of claim 1, wherein, The pressure bar is equipped with a pressing element for applying pressure to the top of the wafer cassette.
5. The wafer boat securing mechanism of claim 1, wherein, It also includes a sensor switch located on the fixed side of the support rod for position detection.
6. The wafer cassette fixing mechanism as described in claim 1, characterized in that, The movable side support rod is provided with a magnetic buffer pin B on the side facing the fixed side support rod to support the pressure rod.
7. The wafer boat securing mechanism of claim 1, wherein, A support part is provided on one side of the pressure rod, and a magnetic buffer pin C corresponding to the support part is provided on the side of the movable support rod away from the fixed support rod. When the pressure rod is rotated to the vertical direction, the support part contacts the magnetic buffer pin C.
8. The wafer boat securing mechanism of claim 1, wherein, The pressure rod has several positioning holes on one side, and the movable support rod has spring positioning pins corresponding to the positioning holes.
9. The wafer boat securing mechanism of claim 8, wherein, There are 4 sets of positioning holes and spring positioning pins.
10. The wafer boat securing mechanism of claim 1, wherein, It also includes a lifting adjustment component, with the movable side support rod mounted on the lifting adjustment component.