一种适配不同直径硅片的花篮
By designing a basket that adapts to silicon wafers of different diameters and using adjusting and buffering components, the compatibility problem of baskets in existing technologies has been solved. This has enabled compatibility in multi-generation silicon wafer production and flexible equipment adaptability, reducing replacement costs and the need for equipment modification, and improving production efficiency and equipment lifespan.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI SHITONG MOULD & PLASTIC CO LTD
- Filing Date
- 2025-06-20
- Publication Date
- 2026-07-17
AI Technical Summary
Existing silicon wafer baskets are only compatible with a single size. When the silicon wafer size changes, the baskets need to be replaced and the equipment needs to be modified, which increases costs and affects output.
A basket was designed to adapt to silicon wafers of different diameters. It uses adjustable and buffer components, and achieves automatic adaptation to the silicon wafer diameter through a combination of elastic components and baffles. It is compatible with silicon wafer sizes with a range of more than 30%, avoiding the need for equipment replacement.
It achieves multi-generation silicon wafer production compatibility with the basket, eliminating the need to replace the basket, standardizing basket height specifications, preventing micro-cracks in silicon wafers, extending the lifespan of key components, and adapting to high-cleanliness process environments.
Smart Images
Figure CN224521571U_ABST
Abstract
Claims
1. A flower basket adaptable to silicon wafers of different diameters, characterized in that, The system includes a first plate (1), a second plate (2) disposed on one side of the first plate (1), a first limiting rod (3) for holding the silicon wafer, a second limiting rod (4) for holding the silicon wafer, an adjusting component (5) for adjusting according to different diameter silicon wafers, and a buffer component (6) to prevent excessive force on the side of the silicon wafer; the first plate (1) and the second plate (2) are arranged in two sets opposite to each other; the first plate (1) and the second plate (2) are each provided with a first limiting rod (3) and a second limiting rod (4); the adjusting component (5) is disposed inside the second plate (2) and... The other end of the adjusting member (5) is fixedly connected to the first plate (1); the buffer member (6) is disposed in the second plate (2) and the working end of the buffer member (6) corresponds to the adjusting member (5); the adjusting member (5) is elastic; when the silicon wafer is inserted, the silicon wafer drives the first plate (1) and the second plate (2) to move away from each other until the silicon wafer is fully inserted, the adjusting member (5) automatically resets to clamp the silicon wafer, and at this time the buffer member (6) is adjusted so that the force of the adjusting member (5) on the side of the silicon wafer is reduced, so as to prevent the side wall of the silicon wafer from being subjected to excessive pressure.
2. The wafer basket for accommodating wafers of different diameters according to claim 1, wherein The adjusting member (5) includes a first rod (51), a baffle (52) disposed on the end face of the first rod (51), and a resetting elastic member (53); the other end of the first rod (51) is connected to the side wall of the first plate (1); a first groove (21) is provided on the second plate (2); the baffle (52) slides in the first groove (21); the elastic member (53) is sleeved on the first rod (51); one end of the elastic member (53) abuts against the baffle (52), and the other end of the elastic member (53) abuts against the first groove (21).
3. The wafer basket of claim 2, wherein, The elastic element (53) is a spring.
4. The wafer basket of claim 2, wherein the wafer basket is adapted to accommodate wafers of different diameters. A sealing ring is provided between the first rod (51), the first groove (21), and the second plate (2) to prevent liquid from entering the first groove (21).
5. The wafer basket of claim 2, wherein the wafer basket is adapted to accommodate wafers of different diameters. The buffer (6) includes a top rod (61), a moving rod (62) that moves the top rod (61), and a sealing member (63); a second groove (22) is provided on the side wall of the first groove (21); the top rod (61) slides in the second groove (22); the moving rod (62) rotates in the second groove (22); the moving rod (62) is threaded through the top rod (61); a third groove (23) is provided on the side of the second groove (22); the sealing member (63) is detachably connected to the third groove (23); when the adjusting member (5) limits the silicon wafer, rotating the moving rod (62) drives the top rod (61) to abut against the baffle (52), so that the elastic member (53) is compressed, thereby eliminating part of the compressive force of the elastic member (53), thereby preventing damage to the side wall of the silicon wafer.
6. The wafer basket of claim 5, wherein the wafer basket is adapted to accommodate wafers of different diameters. The movable rod (62) is a countersunk bolt; the third groove (23) corresponds to the countersunk head of the movable rod (62).
7. The wafer basket of claim 5, wherein the wafer basket is adapted to accommodate wafers of different diameters. The top rod (61) has a square cross-section.