A silicon boat with high structural strength
By adding reinforcing rings and ramp structures to the silicon boat, the cracking problem caused by the deformation of the toothed rod was solved, and the structural strength and stability of the silicon boat at high temperatures were improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JISHENG MICRO (NINGBO) PRECISION TECH CO LTD
- Filing Date
- 2025-07-21
- Publication Date
- 2026-07-17
AI Technical Summary
The toothed rods of existing silicon wafer boats are long and thin and carry a large number of wafers, making them prone to deformation at high temperatures, which can lead to cracks at the connection between the toothed rod and the tray.
A reinforcing ring is added to the silicon boat, and the back side of the toothed bar is connected by the snap-fit part and the snap-fit part to evenly distribute the deformation stress. The contact area is increased by the assembly groove and slope of the tray to form a stable triangular support structure.
This effectively reduces stress concentration at the connection between the toothed bar and the tray, lowers the probability of cracking, and improves structural strength and stability.
Smart Images
Figure CN224521572U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of semiconductor processing tooling, and more specifically to a silicon boat with high structural strength. Background Technology
[0002] In integrated circuit manufacturing, processes such as oxidation, diffusion, annealing, and thin film deposition require batch processing using furnace tubes. These furnace tubes operate at relatively high temperatures, typically ranging from 900-1250℃. The furnace tubes contain wafer boats (wafers are evenly placed within the furnace tube via these boats). The industry standard for wafer boats is based on three materials: quartz, silicon, and silicon carbide. The room temperature range increases progressively for each material.
[0003] Existing silicon boat structures consist of two trays and several toothed rods bonded together. Because the toothed rods are long and thin, and need to support a large number of wafers in the operating environment, the silicon boat has a large load. Therefore, the toothed rods are prone to deformation at high temperatures, and the stress is transferred to the positions where the toothed rods are connected to the trays, causing the toothed rods and trays to crack. Utility Model Content
[0004] The purpose of this invention is to solve the problem in the prior art where the silicon boat has a long and thin toothed rod, and needs to support a large number of wafers in the usage environment, resulting in a large load on the silicon boat. Therefore, the toothed rod is prone to deformation at high temperatures, and the stress is transferred to the two ends of the toothed rod connected to the tray, causing the toothed rod and the tray to crack.
[0005] To address the aforementioned problems, this utility model provides a high-structural-strength silicon boat, comprising two trays and at least three toothed rods. The two trays are spaced vertically apart, and the toothed rods are connected between the two trays. Each tray has one toothed rod on each side of its front portion and at least one toothed rod at its rear portion. Each toothed rod has a toothed groove side facing the tray axis and a back side facing away from the tray axis. The model also includes a reinforcing ring, which is semi-circular. The reinforcing ring has locking portions at both ends and in the middle of its inner peripheral wall. The toothed rods have receiving portions on their back sides. The locking portions at both ends of the inner peripheral wall of the reinforcing ring are respectively locked to the receiving portions of the two toothed rods on the front sides of the trays, and the locking portions in the middle of the inner peripheral wall of the reinforcing ring are correspondingly locked to the receiving portions of the toothed rods at the rear of the trays.
[0006] Compared with the existing technology, the above solution adds a reinforcing ring. The reinforcing ring is connected to the back side of the toothed bar through the snap-fit action of the snap-fit part and the connecting part. This allows the originally independent toothed bars to be connected through the reinforcing ring. The deformation stress borne by a single toothed bar can be evenly distributed to each toothed bar through the reinforcing ring, which effectively reduces the stress at the connection points between the two ends of the toothed bar and the tray, and reduces the probability of cracking of the toothed bar and the tray.
[0007] In an improved embodiment, the locking part includes a slot vertically disposed on the inner peripheral wall of the reinforcing ring and a key block protruding from the bottom of the slot. The width of the slot corresponds to the width of the toothed bar. The engaging part is a keyway formed on the back side of the toothed bar. The back side of the toothed bar is inserted into the slot, and the key block is engaged in the corresponding keyway. Thus, the slot effectively positions the reinforcing ring and the toothed bar, and increases the contact area between the reinforcing ring and the toothed bar, resulting in good load-bearing capacity. The key block and the keyway effectively fix the reinforcing ring and the toothed bar.
[0008] In an improved embodiment, an adhesive is provided between the snap-fit portion and the connecting portion, thereby further enhancing the tightness of the connection between the reinforcing ring and the toothed bar.
[0009] In an improved embodiment, the pallet has multiple mounting slots on opposite sides, and the positions of the mounting slots correspond one by one with the toothed bars. The ends of the toothed bars are inserted into the corresponding mounting slots, so that the pallet is connected to the toothed bars through the mounting slots.
[0010] In an improved embodiment, there are three toothed bars in total, and the included angle α between the center lines of the two mounting slots corresponding to the toothed bars on both sides of the front of the tray is 120-160 degrees, so that the three toothed bars can form a stable triangular support structure.
[0011] In an improved embodiment, the planar shape of the assembly groove is rectangular or isosceles trapezoidal, and the end of the toothed bar has a boss with a shape adapted to the assembly groove. A ramp is provided at the junction of the boss and the toothed bar, thereby increasing the contact area between the toothed bar and the tray through the boss, effectively improving the structural strength and enhancing the stability between the tray and the toothed bar.
[0012] In an improved design, the included angle β of the ramp relative to the tray is 20-30 degrees, thereby effectively distributing the stress of the toothed bar on the boss.
[0013] In an improved embodiment, chamfers are provided between the ramp and the boss, and between the ramp and the toothed bar, thereby avoiding stress concentration problems between the ramp and the boss, and between the ramp and the toothed bar.
[0014] In an improved embodiment, the reinforcing rings are multiple and spaced apart, thereby distributing the stress on the toothed bar through multiple reinforcing rings and further improving the load-bearing performance. Attached Figure Description
[0015] Figure 1 A schematic diagram of a high-structural-strength silicon boat;
[0016] Figure 2 A schematic diagram of a high-structural-strength silicon boat with hidden toothed rods;
[0017] Figure 3 A schematic diagram of a tray for a high-structural-strength silicon boat;
[0018] Figure 4 A schematic diagram of the toothed rod of a high-structural-strength silicon boat;
[0019] Figure 5 for Figure 4 A magnified view of a portion of region A in the middle.
[0020] Explanation of reference numerals in the attached figures.
[0021] 1. Tray; 11. Assembly slot; 2. Toothed bar; 21. Keyway; 22. Boss; 23. Ramp; 3. Reinforcing ring; 31. Slot; 32. Key block. Detailed Implementation
[0022] It should be understood by those skilled in the art that the following embodiments are merely illustrative of the technical principles of the embodiments of this application and are not intended to limit the scope of protection of the embodiments of this application. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios.
[0023] In the following description of the embodiments, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.
[0024] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0025] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0026] Please see Figures 1-5The present invention provides a high structural strength silicon boat, comprising two trays 1 and at least three toothed rods 2. The two trays 1 are arranged vertically at intervals, and the toothed rods 2 are connected between the two trays 1. Each of the two sides of the front part of the tray 1 has a toothed rod 2 and at least one toothed rod 2 at the rear part. The toothed rod 2 has a toothed groove side facing the axis of the tray 1 and a back side facing away from the axis of the tray 1. It also includes a reinforcing ring 3. The reinforcing ring 3 is semi-circular and has a locking part at both ends and the middle of the inner peripheral wall of the reinforcing ring 3. The back side of the toothed rod 2 has a receiving part. The locking parts at both ends of the inner peripheral wall of the reinforcing ring 3 are respectively locked to the receiving parts of the two toothed rods 2 on both sides of the front part of the tray 1. The locking parts in the middle of the inner peripheral wall of the reinforcing ring 3 are locked to the receiving parts of the toothed rods 2 at the rear part of the tray 1 one by one.
[0027] Compared with the existing technology, the above solution adds a reinforcing ring 3. The reinforcing ring 3 is connected to the back side of the toothed rod 2 through the snapping action of the snapping part and the connecting part. This allows the originally independent toothed rods 2 to be connected through the reinforcing ring 3. The deformation stress borne by a single toothed rod 2 can be evenly distributed to each toothed rod 2 through the reinforcing ring 3, which effectively reduces the stress at the positions where the two ends of the toothed rod 2 are connected to the tray 1, and reduces the probability of cracking of the toothed rod 2 and the tray 1.
[0028] In this embodiment, the locking part includes a slot 31 vertically disposed on the inner peripheral wall of the reinforcing ring 3 and a key block 32 protruding from the bottom of the slot 31. The width of the slot 31 corresponds to the width of the toothed rod 2. The engaging part is a keyway 21 opened on the back side of the toothed rod 2. The back side of the toothed rod 2 is inserted into the slot 31, and the key block 32 is engaged in the corresponding keyway 21. Thus, the slot 31 achieves effective positioning between the reinforcing ring 3 and the toothed rod 2, and increases the contact area between the reinforcing ring 3 and the toothed rod 2, resulting in good load-bearing capacity. The key block 32 and the keyway 21 achieve effective fixation between the reinforcing ring 3 and the toothed rod 2. Of course, in other embodiments included in this design, the locking part and the engaging part can also be fixed by mortise and tenon structures, etc., which are also part of the inventive concept of this design.
[0029] Furthermore, an adhesive is provided between the snap-fit part and the connecting part, thereby further improving the tightness of the connection between the reinforcing ring 3 and the toothed bar 2.
[0030] In this embodiment, the opposite side of the tray 1 is provided with a plurality of assembly slots 11 and the positions of the assembly slots 11 correspond one by one with the toothed rods 2. The ends of the toothed rods 2 are inserted into the corresponding assembly slots 11, so that the tray 1 is connected to the toothed rods 2 through the assembly slots 11.
[0031] More specifically, such as Figure 1 and Figure 3 As shown, there are three toothed bars 2 in total. The included angle α between the center lines of the two mounting slots 11 corresponding to the toothed bars 2 on both sides of the front of the tray 1 is 120-160 degrees, so that the three toothed bars 2 can form a stable triangular support structure.
[0032] The planar shape of the assembly groove 11 is preferably rectangular or isosceles trapezoidal. The end of the toothed bar 2 has a boss 22 whose shape is adapted to the assembly groove 11. A ramp 23 is provided at the junction of the boss 22 and the toothed bar 2, thereby increasing the contact area between the toothed bar 2 and the tray 1 through the boss 22, effectively improving the structural strength and the stability between the tray 1 and the toothed bar 2.
[0033] In this embodiment, the included angle β between the ramp 23 and the tray 1 is 20-30 degrees, which can effectively distribute the stress of the toothed rod 2 on the boss 22.
[0034] Furthermore, there are chamfers between the ramp 23 and the boss 22, and between the ramp 23 and the toothed bar 2, so as to avoid stress concentration problems between the ramp 23 and the boss 22, and between the ramp 23 and the toothed bar 2.
[0035] In the improved embodiment, there are multiple reinforcing rings 3 distributed at intervals, thereby distributing the stress of the toothed rod 2 through multiple reinforcing rings 3, further improving the load-bearing performance.
[0036] It should be noted that in the description of this application, the terms "inner" and "outer," etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. This is only for the convenience of description and does not indicate or imply that the device or component must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application. All directional indications (such as up, down, left, right, front, back, inner, and outer) are only used to explain the relative positional relationships and movement between components in a specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0037] In the description of this application, the references to terms such as "an embodiment," "some embodiments," "in this embodiment," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0038] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A high-structural-strength silicon boat, comprising two trays (1) and at least three toothed rods (2), the two trays (1) being spaced vertically apart, the toothed rods (2) being connected between the two trays (1), wherein each tray (1) has one toothed rod (2) on each side of its front portion and at least one toothed rod (2) at its rear portion, the toothed rods (2) having a toothed groove side facing the axis of the trays (1) and a back side facing away from the axis of the trays (1), characterized in that, It also includes a reinforcing ring (3), which is semi-circular and has a locking part at both ends and the middle of the inner peripheral wall of the reinforcing ring (3). The back side of the toothed bar (2) has a connecting part. The locking parts at both ends of the inner peripheral wall of the reinforcing ring (3) are respectively locked to the connecting parts of the two toothed bars (2) on both sides of the front of the tray (1). The locking part in the middle of the inner peripheral wall of the reinforcing ring (3) is locked to the connecting parts of the toothed bars (2) at the rear of the tray (1) one by one.
2. The high-structural-strength silicon boat of claim 1, wherein The inserting part includes a slot (31) vertically arranged on the inner peripheral wall of the reinforcing ring (3) and a key block (32) protruding from the bottom of the slot (31). The width of the slot (31) corresponds to the width of the toothed bar (2). The inserting part is a keyway (21) opened on the back side of the toothed bar (2). The back side of the toothed bar (2) is inserted into the slot (31), and the key block (32) is inserted into the corresponding keyway (21).
3. The high-structural-strength silicon boat according to claim 1 or 2, characterized in that, An adhesive is provided between the snap-fit part and the connecting part.
4. The high-structural-strength silicon boat of claim 1, wherein The tray (1) has multiple assembly slots (11) on the opposite side, and the positions of the assembly slots (11) correspond to the toothed rods (2) one by one. The ends of the toothed rods (2) are inserted into the corresponding assembly slots (11).
5. The high-structural-strength silicon boat of claim 4, wherein The included angle α between the center lines of the two mounting slots (11) corresponding to the toothed bars (2) on both sides of the front of the tray (1) is 120-160 degrees.
6. The high-structural-strength silicon boat of claim 4, wherein The assembly groove (11) has a rectangular or isosceles trapezoidal shape in plan. The end of the toothed bar (2) has a boss (22) whose shape is adapted to the assembly groove (11). A ramp (23) is provided at the junction of the boss (22) and the toothed bar (2).
7. The high-structural-strength silicon boat of claim 6, wherein The angle β between the ramp (23) and the tray (1) is 20-30 degrees.
8. The high-structural-strength silicon boat of claim 6, wherein, The ramp (23) and the boss (22) have chamfers, and the ramp (23) and the toothed bar (2) have chamfers.
9. The high-structural-strength silicon boat of claim 1, wherein The number of the reinforcing rings (3) is multiple and they are distributed at intervals.