一种高频石英晶片载盘
By setting a cross-shaped support and a semi-circular recess at the bottom of the wafer receiving slot in the high-frequency quartz wafer carrier, the problem of high-frequency quartz wafers being difficult to pick up when they are close to the bottom of the carrier is solved, and the effect of stable picking up without breaking the wafer is achieved.
CN224521575UActive Publication Date: 2026-07-17DONGGUAN CHUANGQUN QUARTZ CRYSTAL CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DONGGUAN CHUANGQUN QUARTZ CRYSTAL CO LTD
- Filing Date
- 2025-07-29
- Publication Date
- 2026-07-17
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Figure CN224521575U_ABST
Abstract
本申请涉及半导体技术领域，具体涉及一种晶片承载盘。本实用新型一种高频石英晶片载盘，其特征在于：在载盘（1）上设有至少一个晶片容纳槽（2），所述晶片容纳槽（2）呈矩阵排列于所述载盘（1）上，在所述晶片容纳槽（2）的槽底内设有“十”字形支架（3）。采用上述结构，高频石英晶片底面与晶片容纳槽（2）槽底不能紧贴，并能水平放置于容纳槽内。在吸取高频石英晶片时，能轻松把高频石英晶片吸取出来并不损坏高频石英晶片。
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