花篮
By using limit bars and baffles in the wafer basket design, the problem of wafer centers not being on the same axis is solved, ensuring that the robotic arm can pick up wafers normally and reducing the damage rate, thereby improving production efficiency and wafer retention rate.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU LEKIN SEMICON CO LTD
- Filing Date
- 2025-08-06
- Publication Date
- 2026-07-17
AI Technical Summary
The existing wafer baskets have wafer centers that are not on the same axis, causing the robotic arm to be unable to pick up the wafers properly or to damage the wafers during the picking process, which affects production efficiency and increases wafer loss.
Design a flower basket that, through the cooperation of a limiting stop bar and a limiting baffle, ensures that the wafer's center offset within the flower basket is less than the robotic arm's picking error. Employ elastic stops and an anti-corrosion coating to improve the robotic arm's picking success rate and reduce the probability of wafer damage.
This enabled the robotic arm to pick up wafers normally, reducing the probability of wafer damage, improving production efficiency, and reducing wafer loss.
Smart Images
Figure CN224521578U_ABST
Abstract
Claims
1. A flower basket for carrying a wafer (4), characterized in that, include: The main body of the flower basket (1) has a receiving cavity (13) inside. The main body of the flower basket (1) has a first inner wall (111) and a second inner wall (112) arranged opposite to each other. The first inner wall (111) and the second inner wall (112) are respectively provided with a plurality of spaced receiving grooves (113) and a receiving groove (115) connected to the receiving grooves (113). The receiving grooves (113) are used to receive wafers. The extending direction of the receiving grooves (115) is the arrangement direction of the receiving grooves (113). The receiving grooves (115) are close to the bottom of the main body of the flower basket (1). A limiting stop (2) is provided in the receiving groove (115); A limiting baffle (3) is installed on the main body (1) of the flower basket, and at least part of the limiting baffle (3) is located at the bottom of the receiving cavity (13); The distance between the axis a of the wafer that simultaneously abuts against the two limiting stops (2) and the axis b of the wafer that simultaneously abuts against the limiting baffle (3) and the limiting stops (2) is less than the standard threshold.
2. The flower basket according to claim 1, characterized in that, The limiting baffle (3) includes: The connecting part (31) is connected to the main body (1) of the flower basket; The blocking portion (32) extends from the connecting portion (31) by bending, and at least part of the blocking portion (32) protrudes into the bottom of the receiving cavity (13).
3. The flower basket of claim 1, wherein, The limiting stop (2) is an elastic stop; and / or, The standard threshold is less than or equal to 2 mm.
4. The flower basket of claim 1, wherein, The surface of the limiting baffle (3) is covered with an anti-corrosion coating.
5. The flower basket of claim 1, wherein, The main body of the flower basket (1) includes: Two support plates (11) are set opposite to each other; Several connectors (12) are connected between two support plates (11); The first inner wall (111) is located on one of the support plates (11), and the second inner wall (112) is located on another support plate (11).
6. The flower basket according to claim 5, characterized in that, The support plate (11) has a through hole (114) on its outer wall, and the through hole (114) penetrates the bottom wall of the receiving groove (113).
7. The flower basket of claim 5, wherein, The main body of the flower basket (1) also includes several support feet (14) spaced apart at the bottom of the support plate (11).
8. The flower basket of claim 5, wherein, At least one of the support plates (11) has a plurality of positioning pins (15) protruding from its top.
9. The flower basket of claim 5, wherein, Each of the support plates (11) is equipped with a limiting baffle (3).
10. The flower basket according to claim 1, characterized in that, Along the arrangement direction of the receiving slots (113), the size of the receiving slots (113) is greater than or equal to 3.1 mm, and the spacing between adjacent receiving slots (113) is greater than or equal to 4.76 mm.