一种运动平台装置及贴片设备

Abstract

本实用新型涉及一种运动平台装置及贴片设备，用于承托和移动待加工件，并配合加压单元、加热单元及视觉单元完成贴片加工，所述运动平台装置包括底座；第一移动单元，其包括第一移载机构和承载机构，所述第一移载机构活动设置于所述底座，且沿第一方向移动；待加工件设置于所述承载机构；承载机构连接于第一移载机构，以在第一移载机构的带动下；第二移动单元，其包括支撑架、第二移载机构以及安装载体，支撑架装配于底座。本实用新型能够增强动态稳定性，提升运动精度，并对管线安装方式进行调整，以解决管线的缠绕干涉问题，从而满足半导体贴片工艺对高速、高精度及高可靠性的要求；并能够适应不同工况，减少空间占用和维护成本。

Claims

1. A motion platform apparatus, characterised by: The motion platform device is used to support and move the workpiece to be processed, and works in conjunction with the pressurizing unit, heating unit, and vision unit to complete the patch processing. Base; The first moving unit includes a first transfer mechanism and a support mechanism. The first transfer mechanism is movably disposed on the base and is capable of moving along a first direction. The workpiece to be processed is disposed on the support mechanism. The bearing mechanism is connected to the first transfer mechanism so that the workpiece to be processed can be moved to a designated position under the drive of the first transfer mechanism; The second moving unit includes a support frame, a second transfer mechanism, and a mounting carrier. The support frame is mounted on the base. The second transfer mechanism is slidably connected to the support frame and is movable along the first direction. The second transfer mechanism is located on the opposite side of the first transfer mechanism along the height direction. The second transfer mechanism is used to mount the vision unit, which is able to move above the area where the workpiece is located under the drive of the second transfer mechanism. The support frame has an extension mounting block extending along the first direction. The second transfer mechanism is driven to move below the extension mounting block. The upper end of the extension mounting block has a notch structure. The mounting carrier is disposed on the support frame and the second transfer mechanism. The pipeline assembly of the motion platform device is movably connected to the support frame through the mounting carrier.

2. A motion platform apparatus according to claim 1, wherein: The supporting mechanism includes a heat dissipation assembly, which includes a heat dissipation plate, a heat dissipation channel, and a connecting pipe. The heat dissipation channel includes a plurality of heat dissipation holes disposed on the heat dissipation plate along the first direction. The ends of the heat dissipation holes are connected by the connecting pipe to form a heat dissipation channel. Gas is blown into the heat dissipation channel for heat dissipation.

3. A motion platform apparatus according to claim 1, wherein: The second moving unit further includes a lifting and moving assembly, which is disposed at the movable end of the second transfer mechanism. The lifting and moving assembly includes a first wedge block, a second wedge block, and a lifting and driving assembly. The first wedge block and the second wedge block fit together, and the inclined surface of the first wedge block is in contact with the inclined surface of the second wedge block. The vision unit is connected to the first wedge block. When the lifting and driving assembly is activated, it drives the first wedge block to move along the first direction, thereby driving the vision unit to rise and fall.

4. A motion platform apparatus according to claim 1, wherein: The installation carrier includes a fixed carrier and a movable carrier. The fixed carrier is assembled on the support frame. The movable carrier is connected to the second transfer mechanism to move under the drive of the second transfer mechanism. The pipeline assembly includes a corrugated pipe and a line body, and the line body is housed in the corrugated pipe.

5. A motion platform apparatus according to claim 4, wherein: The number of fixed carriers is set to multiple, and the number of movable carriers is adapted to the number of fixed carriers.

6. A motion platform apparatus according to claim 1, wherein: The base is provided with a first guide rail and a first slider along the first direction, the first slider is slidably connected to the first guide rail, and the first transfer mechanism is connected to the first slider; the support frame is provided with a second guide rail and a second slider along the first direction, the second slider is slidably connected to the second guide rail, and the second transfer mechanism is connected to the second slider.

7. A motion platform apparatus according to any one of claims 1 to 6, wherein: The first transfer mechanism includes a first connecting plate and a first guide rail assembly. The first guide rail assembly is disposed on the first connecting plate. The first guide rail assembly includes a third guide rail and a third slider. The third guide rail extends along a second direction, which is perpendicular to the first direction. The third slider is slidably disposed on the third guide rail. The bearing mechanism is connected to the third slider.

8. A motion platform apparatus according to claim 7, wherein: The second transfer mechanism includes a second connecting plate, a second guide rail assembly, and a transition plate. The second guide rail assembly is disposed on the second connecting plate. The second guide rail assembly includes a fourth guide rail and a fourth slider. The fourth guide rail extends along the second direction, and the fourth slider is slidably disposed on the fourth guide rail. The transition plate is connected to the fourth slider.

9. A motion platform apparatus according to claim 1, wherein: The base and the support frame are made of marble.

10. A patch device characterized by: The device includes a pressurizing unit, a heating unit, a vision unit, and a motion platform device as described in any one of claims 1-9; the heating unit is used to heat the workpiece to be processed; the pressurizing unit is adjacent to the first transfer mechanism, so as to be driven to move to the area where the workpiece to be processed is located, and press the workpiece to be processed to form a finished product; The vision unit is connected to the second transfer mechanism to move under the drive of the second transfer mechanism and to perform visual inspection on the workpiece to be processed, so as to align and calibrate the workpiece.

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