一种机械手点位校准辅助装置、校准片收纳盒
By using transparent discs and a visual inspection module, the problems of difficulty in identifying the center of dummy wafers and poor cleanliness were solved, enabling high-precision, low-cost robotic arm calibration and avoiding confusion with genuine wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TIANJIN ZHONGHUAN ADVANCED MATERIAL TECH
- Filing Date
- 2025-06-25
- Publication Date
- 2026-07-17
AI Technical Summary
In existing technologies, the center of dummy wafers is difficult to identify, which obstructs the target point of the robotic arm. Positioning is time-consuming and inaccurate, and the cleanliness is poor, making it difficult to reuse the wafers multiple times. This leads to increased production costs and makes it easy for genuine wafers to be mixed in.
A transparent disc is used as a calibration disc. The center of the disc contains ultraviolet fluorescent material, and the edges are notched and have scale lines. Together with a visual inspection module and a storage box, it ensures positioning accuracy and cleanliness.
It achieves fast and accurate positioning, improves positioning accuracy and efficiency, reduces production costs, avoids confusion with genuine wafers, and extends the service life of calibration wafers.
Smart Images
Figure CN224521586U_ABST
Abstract
Claims
1. A mechanical hand point calibration auxiliary device, comprising a transparent wafer, the size and thickness of which are consistent with a genuine wafer, characterized in that: The transparent wafer includes a substrate layer, the center of which contains ultraviolet fluorescent material, and the edge of the substrate layer has a notch, the position of which is the same as that of the genuine wafer but the shape is different.
2. The robot point calibration aid of claim 1, wherein: The surface of the base layer is coated with an antistatic layer, and at least one side of the surface of the antistatic layer is provided with scale lines.
3. The robot point calibration aid of claim 2, wherein: The scale lines include concentric circular scale lines with the center of the base layer as the center and radial scale lines extending outward from the center of the base layer.
4. The robot point calibration aid of claim 3, wherein: The radii of the concentric scale lines are set at equal intervals.
5. The mechanical hand point calibration assisting device according to claim 3 or 4, characterized by: The included angle between any two adjacent radial scale lines is the same.
6. The mechanical hand point calibration auxiliary device according to any one of claims 1-3, characterized in that: The notch is triangular or trapezoidal.
7. The mechanical hand point calibration auxiliary device according to any one of claims 1-3, characterized in that: The transparent disc is also equipped with a coded identifier.
8. The mechanical hand point calibration auxiliary device according to any one of claims 1-3, characterized in that: The edges of the transparent disc have a double-R chamfered structure.
9. The mechanical hand point calibration auxiliary device according to any one of claims 1-3, characterized in that: It also includes a vision detection module for identifying the relative position of the center of the transparent disc and the target point of the robotic arm.
10. A calibration chip storage case characterized by: For storing the transparent disc as described in any one of claims 1-8, comprising: A dustproof compartment is used to store the unused transparent discs. A recycling bin is used to hold the used transparent discs; the recycling bin is equipped with a cleaning module and an identification module, the cleaning module is used to blow away the transparent discs; the identification module is used to identify the used transparent discs and automatically record the number of times they have been used; Both the dustproof chamber and the recycling chamber are equipped with vacuum modules to create a vacuum environment in the dustproof chamber and the recycling chamber.